8/16/2011	9:36:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/16/2011	9:36:57 AM	Recipe started at 9:36 AM
8/16/2011	9:36:57 AM	Helium valve closed
8/16/2011	9:36:57 AM	H2 valve closed
8/16/2011	9:36:57 AM	BCl3 valve closed
8/16/2011	9:36:57 AM	PH3 valve closed
8/16/2011	9:36:57 AM	SiCl4 pre valve closed
8/16/2011	9:36:57 AM	SiCl4 post valve closed
8/16/2011	9:36:57 AM	Main Vac valve closed
8/16/2011	9:36:57 AM	Bypass valve closed
8/16/2011	9:36:57 AM	Bubbler valve closed
8/16/2011	9:36:57 AM	Helium MFC set to  0.000000
8/16/2011	9:36:57 AM	H2 MFC set to  0.000000
8/16/2011	9:36:57 AM	BCl3 MFC set to  0.000000
8/16/2011	9:36:57 AM	PHl3 MFC set to  0.000000
8/16/2011	9:36:57 AM	SiCl4 MFC set to  0.000000
8/16/2011	9:36:57 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:36:57 AM	Tube furnace set to 0
8/16/2011	9:37:01 AM	H2 valve closed
8/16/2011	9:37:01 AM	BCl3 valve closed
8/16/2011	9:37:01 AM	PH3 valve closed
8/16/2011	9:37:01 AM	SiCl4 pre valve closed
8/16/2011	9:37:01 AM	SiCl4 post valve closed
8/16/2011	9:37:01 AM	Main Vac valve closed
8/16/2011	9:37:01 AM	Bypass valve closed
8/16/2011	9:37:01 AM	Bubbler valve closed
8/16/2011	9:37:01 AM	Helium valve opened
8/16/2011	9:37:01 AM	Helium MFC set to  500.000000
8/16/2011	9:37:01 AM	H2 MFC set to  0.000000
8/16/2011	9:37:01 AM	BCl3 MFC set to  0.000000
8/16/2011	9:37:01 AM	PHl3 MFC set to  0.000000
8/16/2011	9:37:01 AM	SiCl4 MFC set to  0.000000
8/16/2011	9:37:01 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:37:01 AM	Tube furnace set to 0
8/16/2011	9:38:06 AM	Helium valve closed
8/16/2011	9:38:06 AM	H2 valve closed
8/16/2011	9:38:06 AM	BCl3 valve closed
8/16/2011	9:38:06 AM	PH3 valve closed
8/16/2011	9:38:06 AM	SiCl4 pre valve closed
8/16/2011	9:38:06 AM	SiCl4 post valve closed
8/16/2011	9:38:06 AM	Main Vac valve closed
8/16/2011	9:38:06 AM	Bypass valve closed
8/16/2011	9:38:06 AM	Bubbler valve closed
8/16/2011	9:38:06 AM	Helium MFC set to  0.000000
8/16/2011	9:38:06 AM	H2 MFC set to  0.000000
8/16/2011	9:38:06 AM	BCl3 MFC set to  0.000000
8/16/2011	9:38:06 AM	PHl3 MFC set to  0.000000
8/16/2011	9:38:06 AM	SiCl4 MFC set to  0.000000
8/16/2011	9:38:06 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:38:06 AM	Tube furnace set to 0
8/16/2011	9:38:07 AM	Run finished at 9:38 AM
8/16/2011	9:38:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/16/2011	9:41:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	9:41:59 AM	Recipe started at 9:41 AM
8/16/2011	9:41:59 AM	Helium valve closed
8/16/2011	9:41:59 AM	H2 valve closed
8/16/2011	9:41:59 AM	BCl3 valve closed
8/16/2011	9:41:59 AM	PH3 valve closed
8/16/2011	9:41:59 AM	SiCl4 pre valve closed
8/16/2011	9:41:59 AM	SiCl4 post valve closed
8/16/2011	9:41:59 AM	Main Vac valve closed
8/16/2011	9:41:59 AM	Bubbler valve closed
8/16/2011	9:41:59 AM	Bypass valve opened
8/16/2011	9:41:59 AM	Helium MFC set to  0.000000
8/16/2011	9:41:59 AM	H2 MFC set to  0.000000
8/16/2011	9:41:59 AM	BCl3 MFC set to  0.000000
8/16/2011	9:41:59 AM	PHl3 MFC set to  0.000000
8/16/2011	9:41:59 AM	SiCl4 MFC set to  0.000000
8/16/2011	9:41:59 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:41:59 AM	Tube furnace set to 0
8/16/2011	9:43:16 AM	Helium valve closed
8/16/2011	9:43:16 AM	H2 valve closed
8/16/2011	9:43:16 AM	BCl3 valve closed
8/16/2011	9:43:16 AM	PH3 valve closed
8/16/2011	9:43:16 AM	SiCl4 pre valve closed
8/16/2011	9:43:16 AM	SiCl4 post valve closed
8/16/2011	9:43:16 AM	Main Vac valve closed
8/16/2011	9:43:16 AM	Bubbler valve closed
8/16/2011	9:43:16 AM	Bypass valve opened
8/16/2011	9:43:16 AM	Helium MFC set to  0.000000
8/16/2011	9:43:16 AM	H2 MFC set to  0.000000
8/16/2011	9:43:16 AM	BCl3 MFC set to  0.000000
8/16/2011	9:43:16 AM	PHl3 MFC set to  0.000000
8/16/2011	9:43:16 AM	SiCl4 MFC set to  0.000000
8/16/2011	9:43:16 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:43:16 AM	Tube furnace set to 0
8/16/2011	9:44:16 AM	Helium valve closed
8/16/2011	9:44:16 AM	H2 valve closed
8/16/2011	9:44:16 AM	BCl3 valve closed
8/16/2011	9:44:16 AM	PH3 valve closed
8/16/2011	9:44:16 AM	SiCl4 pre valve closed
8/16/2011	9:44:16 AM	SiCl4 post valve closed
8/16/2011	9:44:16 AM	Bypass valve closed
8/16/2011	9:44:16 AM	Bubbler valve closed
8/16/2011	9:44:16 AM	Main Vac valve opened
8/16/2011	9:44:16 AM	Helium MFC set to  0.000000
8/16/2011	9:44:16 AM	H2 MFC set to  0.000000
8/16/2011	9:44:16 AM	BCl3 MFC set to  0.000000
8/16/2011	9:44:16 AM	PHl3 MFC set to  0.000000
8/16/2011	9:44:16 AM	SiCl4 MFC set to  0.000000
8/16/2011	9:44:16 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:44:16 AM	Tube furnace set to 0
8/16/2011	9:44:17 AM	Run finished at 9:44 AM
8/16/2011	9:44:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	9:44:25 AM	Tube furnace set to 250
8/16/2011	10:04:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/16/2011	10:05:08 AM	Recipe started at 10:05 AM
8/16/2011	10:05:08 AM	Helium valve closed
8/16/2011	10:05:08 AM	H2 valve closed
8/16/2011	10:05:08 AM	BCl3 valve closed
8/16/2011	10:05:08 AM	PH3 valve closed
8/16/2011	10:05:08 AM	SiCl4 pre valve closed
8/16/2011	10:05:08 AM	SiCl4 post valve closed
8/16/2011	10:05:08 AM	Main Vac valve closed
8/16/2011	10:05:08 AM	Bubbler valve closed
8/16/2011	10:05:08 AM	Bypass valve opened
8/16/2011	10:05:08 AM	Helium MFC set to  0.000000
8/16/2011	10:05:08 AM	H2 MFC set to  0.000000
8/16/2011	10:05:08 AM	BCl3 MFC set to  0.000000
8/16/2011	10:05:08 AM	PHl3 MFC set to  0.000000
8/16/2011	10:05:08 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:05:08 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:05:08 AM	Tube furnace set to 0
8/16/2011	10:05:08 AM	Helium valve closed
8/16/2011	10:05:08 AM	H2 valve closed
8/16/2011	10:05:08 AM	BCl3 valve closed
8/16/2011	10:05:08 AM	PH3 valve closed
8/16/2011	10:05:08 AM	SiCl4 pre valve closed
8/16/2011	10:05:08 AM	SiCl4 post valve closed
8/16/2011	10:05:08 AM	Main Vac valve closed
8/16/2011	10:05:08 AM	Bubbler valve closed
8/16/2011	10:05:08 AM	Bypass valve opened
8/16/2011	10:05:08 AM	Helium MFC set to  0.000000
8/16/2011	10:05:08 AM	H2 MFC set to  0.000000
8/16/2011	10:05:08 AM	BCl3 MFC set to  0.000000
8/16/2011	10:05:08 AM	PHl3 MFC set to  0.000000
8/16/2011	10:05:08 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:05:08 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:05:08 AM	Tube furnace set to 0
8/16/2011	10:05:38 AM	Helium valve closed
8/16/2011	10:05:38 AM	H2 valve closed
8/16/2011	10:05:38 AM	BCl3 valve closed
8/16/2011	10:05:38 AM	PH3 valve closed
8/16/2011	10:05:38 AM	SiCl4 pre valve closed
8/16/2011	10:05:38 AM	SiCl4 post valve closed
8/16/2011	10:05:38 AM	Bypass valve closed
8/16/2011	10:05:38 AM	Bubbler valve closed
8/16/2011	10:05:38 AM	Main Vac valve opened
8/16/2011	10:05:38 AM	Helium MFC set to  0.000000
8/16/2011	10:05:38 AM	H2 MFC set to  0.000000
8/16/2011	10:05:38 AM	BCl3 MFC set to  0.000000
8/16/2011	10:05:38 AM	PHl3 MFC set to  0.000000
8/16/2011	10:05:38 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:05:38 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:05:38 AM	Tube furnace set to 0
8/16/2011	10:06:08 AM	H2 valve closed
8/16/2011	10:06:08 AM	BCl3 valve closed
8/16/2011	10:06:08 AM	PH3 valve closed
8/16/2011	10:06:08 AM	SiCl4 pre valve closed
8/16/2011	10:06:08 AM	SiCl4 post valve closed
8/16/2011	10:06:08 AM	Bypass valve closed
8/16/2011	10:06:08 AM	Bubbler valve closed
8/16/2011	10:06:08 AM	Helium valve opened
8/16/2011	10:06:08 AM	Main Vac valve opened
8/16/2011	10:06:08 AM	Helium MFC set to  20.000000
8/16/2011	10:06:08 AM	H2 MFC set to  0.000000
8/16/2011	10:06:08 AM	BCl3 MFC set to  0.000000
8/16/2011	10:06:08 AM	PHl3 MFC set to  0.000000
8/16/2011	10:06:08 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:06:08 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:06:09 AM	Tube furnace set to 0
8/16/2011	10:06:39 AM	Helium valve closed
8/16/2011	10:06:39 AM	H2 valve closed
8/16/2011	10:06:39 AM	BCl3 valve closed
8/16/2011	10:06:39 AM	PH3 valve closed
8/16/2011	10:06:39 AM	SiCl4 pre valve closed
8/16/2011	10:06:39 AM	SiCl4 post valve closed
8/16/2011	10:06:39 AM	Bypass valve closed
8/16/2011	10:06:39 AM	Bubbler valve closed
8/16/2011	10:06:39 AM	Main Vac valve opened
8/16/2011	10:06:39 AM	Helium MFC set to  0.000000
8/16/2011	10:06:39 AM	H2 MFC set to  0.000000
8/16/2011	10:06:39 AM	BCl3 MFC set to  0.000000
8/16/2011	10:06:39 AM	PHl3 MFC set to  0.000000
8/16/2011	10:06:39 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:06:39 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:06:39 AM	Tube furnace set to 0
8/16/2011	10:07:09 AM	H2 valve closed
8/16/2011	10:07:09 AM	BCl3 valve closed
8/16/2011	10:07:09 AM	PH3 valve closed
8/16/2011	10:07:09 AM	SiCl4 pre valve closed
8/16/2011	10:07:09 AM	SiCl4 post valve closed
8/16/2011	10:07:09 AM	Bypass valve closed
8/16/2011	10:07:09 AM	Bubbler valve closed
8/16/2011	10:07:09 AM	Helium valve opened
8/16/2011	10:07:09 AM	Main Vac valve opened
8/16/2011	10:07:09 AM	Helium MFC set to  20.000000
8/16/2011	10:07:09 AM	H2 MFC set to  0.000000
8/16/2011	10:07:09 AM	BCl3 MFC set to  0.000000
8/16/2011	10:07:09 AM	PHl3 MFC set to  0.000000
8/16/2011	10:07:09 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:07:09 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:07:09 AM	Tube furnace set to 0
8/16/2011	10:07:39 AM	Helium valve closed
8/16/2011	10:07:39 AM	H2 valve closed
8/16/2011	10:07:39 AM	BCl3 valve closed
8/16/2011	10:07:39 AM	PH3 valve closed
8/16/2011	10:07:39 AM	SiCl4 pre valve closed
8/16/2011	10:07:39 AM	SiCl4 post valve closed
8/16/2011	10:07:39 AM	Bypass valve closed
8/16/2011	10:07:39 AM	Bubbler valve closed
8/16/2011	10:07:39 AM	Main Vac valve opened
8/16/2011	10:07:39 AM	Helium MFC set to  0.000000
8/16/2011	10:07:39 AM	H2 MFC set to  0.000000
8/16/2011	10:07:39 AM	BCl3 MFC set to  0.000000
8/16/2011	10:07:39 AM	PHl3 MFC set to  0.000000
8/16/2011	10:07:39 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:07:39 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:07:39 AM	Tube furnace set to 0
8/16/2011	10:08:09 AM	H2 valve closed
8/16/2011	10:08:09 AM	BCl3 valve closed
8/16/2011	10:08:09 AM	PH3 valve closed
8/16/2011	10:08:09 AM	SiCl4 pre valve closed
8/16/2011	10:08:09 AM	SiCl4 post valve closed
8/16/2011	10:08:09 AM	Bypass valve closed
8/16/2011	10:08:09 AM	Bubbler valve closed
8/16/2011	10:08:09 AM	Helium valve opened
8/16/2011	10:08:09 AM	Main Vac valve opened
8/16/2011	10:08:09 AM	Helium MFC set to  20.000000
8/16/2011	10:08:09 AM	H2 MFC set to  0.000000
8/16/2011	10:08:09 AM	BCl3 MFC set to  0.000000
8/16/2011	10:08:09 AM	PHl3 MFC set to  0.000000
8/16/2011	10:08:09 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:08:09 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:08:09 AM	Tube furnace set to 0
8/16/2011	10:08:39 AM	Helium valve closed
8/16/2011	10:08:39 AM	H2 valve closed
8/16/2011	10:08:39 AM	BCl3 valve closed
8/16/2011	10:08:39 AM	PH3 valve closed
8/16/2011	10:08:39 AM	SiCl4 pre valve closed
8/16/2011	10:08:39 AM	SiCl4 post valve closed
8/16/2011	10:08:39 AM	Bypass valve closed
8/16/2011	10:08:39 AM	Bubbler valve closed
8/16/2011	10:08:39 AM	Main Vac valve opened
8/16/2011	10:08:39 AM	Helium MFC set to  0.000000
8/16/2011	10:08:39 AM	H2 MFC set to  0.000000
8/16/2011	10:08:39 AM	BCl3 MFC set to  0.000000
8/16/2011	10:08:39 AM	PHl3 MFC set to  0.000000
8/16/2011	10:08:39 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:08:39 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:08:40 AM	Tube furnace set to 0
8/16/2011	10:09:10 AM	H2 valve closed
8/16/2011	10:09:10 AM	BCl3 valve closed
8/16/2011	10:09:10 AM	PH3 valve closed
8/16/2011	10:09:10 AM	SiCl4 pre valve closed
8/16/2011	10:09:10 AM	SiCl4 post valve closed
8/16/2011	10:09:10 AM	Bypass valve closed
8/16/2011	10:09:10 AM	Bubbler valve closed
8/16/2011	10:09:10 AM	Helium valve opened
8/16/2011	10:09:10 AM	Main Vac valve opened
8/16/2011	10:09:10 AM	Helium MFC set to  20.000000
8/16/2011	10:09:10 AM	H2 MFC set to  0.000000
8/16/2011	10:09:10 AM	BCl3 MFC set to  0.000000
8/16/2011	10:09:10 AM	PHl3 MFC set to  0.000000
8/16/2011	10:09:10 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:09:10 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:09:10 AM	Tube furnace set to 0
8/16/2011	10:09:40 AM	Helium valve closed
8/16/2011	10:09:40 AM	H2 valve closed
8/16/2011	10:09:40 AM	BCl3 valve closed
8/16/2011	10:09:40 AM	PH3 valve closed
8/16/2011	10:09:40 AM	SiCl4 pre valve closed
8/16/2011	10:09:40 AM	SiCl4 post valve closed
8/16/2011	10:09:40 AM	Bypass valve closed
8/16/2011	10:09:40 AM	Bubbler valve closed
8/16/2011	10:09:40 AM	Main Vac valve opened
8/16/2011	10:09:40 AM	Helium MFC set to  0.000000
8/16/2011	10:09:40 AM	H2 MFC set to  0.000000
8/16/2011	10:09:40 AM	BCl3 MFC set to  0.000000
8/16/2011	10:09:40 AM	PHl3 MFC set to  0.000000
8/16/2011	10:09:40 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:09:40 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:09:40 AM	Tube furnace set to 0
8/16/2011	10:10:10 AM	H2 valve closed
8/16/2011	10:10:10 AM	BCl3 valve closed
8/16/2011	10:10:10 AM	PH3 valve closed
8/16/2011	10:10:10 AM	SiCl4 pre valve closed
8/16/2011	10:10:10 AM	SiCl4 post valve closed
8/16/2011	10:10:10 AM	Bypass valve closed
8/16/2011	10:10:10 AM	Bubbler valve closed
8/16/2011	10:10:10 AM	Helium valve opened
8/16/2011	10:10:10 AM	Main Vac valve opened
8/16/2011	10:10:10 AM	Helium MFC set to  20.000000
8/16/2011	10:10:10 AM	H2 MFC set to  0.000000
8/16/2011	10:10:10 AM	BCl3 MFC set to  0.000000
8/16/2011	10:10:10 AM	PHl3 MFC set to  0.000000
8/16/2011	10:10:10 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:10:10 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:10:10 AM	Tube furnace set to 0
8/16/2011	10:10:40 AM	Helium valve closed
8/16/2011	10:10:40 AM	H2 valve closed
8/16/2011	10:10:40 AM	BCl3 valve closed
8/16/2011	10:10:40 AM	PH3 valve closed
8/16/2011	10:10:40 AM	SiCl4 pre valve closed
8/16/2011	10:10:40 AM	SiCl4 post valve closed
8/16/2011	10:10:40 AM	Bypass valve closed
8/16/2011	10:10:40 AM	Bubbler valve closed
8/16/2011	10:10:40 AM	Main Vac valve opened
8/16/2011	10:10:40 AM	Helium MFC set to  0.000000
8/16/2011	10:10:40 AM	H2 MFC set to  0.000000
8/16/2011	10:10:40 AM	BCl3 MFC set to  0.000000
8/16/2011	10:10:40 AM	PHl3 MFC set to  0.000000
8/16/2011	10:10:40 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:10:40 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:10:40 AM	Tube furnace set to 0
8/16/2011	10:11:10 AM	H2 valve closed
8/16/2011	10:11:10 AM	BCl3 valve closed
8/16/2011	10:11:10 AM	PH3 valve closed
8/16/2011	10:11:10 AM	SiCl4 pre valve closed
8/16/2011	10:11:10 AM	SiCl4 post valve closed
8/16/2011	10:11:10 AM	Bypass valve closed
8/16/2011	10:11:10 AM	Bubbler valve closed
8/16/2011	10:11:10 AM	Helium valve opened
8/16/2011	10:11:10 AM	Main Vac valve opened
8/16/2011	10:11:10 AM	Helium MFC set to  20.000000
8/16/2011	10:11:10 AM	H2 MFC set to  0.000000
8/16/2011	10:11:10 AM	BCl3 MFC set to  0.000000
8/16/2011	10:11:10 AM	PHl3 MFC set to  0.000000
8/16/2011	10:11:10 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:11:10 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:11:11 AM	Tube furnace set to 0
8/16/2011	10:11:41 AM	Helium valve closed
8/16/2011	10:11:41 AM	H2 valve closed
8/16/2011	10:11:41 AM	BCl3 valve closed
8/16/2011	10:11:41 AM	PH3 valve closed
8/16/2011	10:11:41 AM	SiCl4 pre valve closed
8/16/2011	10:11:41 AM	SiCl4 post valve closed
8/16/2011	10:11:41 AM	Bypass valve closed
8/16/2011	10:11:41 AM	Bubbler valve closed
8/16/2011	10:11:41 AM	Main Vac valve opened
8/16/2011	10:11:41 AM	Helium MFC set to  0.000000
8/16/2011	10:11:41 AM	H2 MFC set to  0.000000
8/16/2011	10:11:41 AM	BCl3 MFC set to  0.000000
8/16/2011	10:11:41 AM	PHl3 MFC set to  0.000000
8/16/2011	10:11:41 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:11:41 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:11:41 AM	Tube furnace set to 0
8/16/2011	10:12:11 AM	H2 valve closed
8/16/2011	10:12:11 AM	BCl3 valve closed
8/16/2011	10:12:11 AM	PH3 valve closed
8/16/2011	10:12:11 AM	SiCl4 pre valve closed
8/16/2011	10:12:11 AM	SiCl4 post valve closed
8/16/2011	10:12:11 AM	Bypass valve closed
8/16/2011	10:12:11 AM	Bubbler valve closed
8/16/2011	10:12:11 AM	Helium valve opened
8/16/2011	10:12:11 AM	Main Vac valve opened
8/16/2011	10:12:11 AM	Helium MFC set to  20.000000
8/16/2011	10:12:11 AM	H2 MFC set to  0.000000
8/16/2011	10:12:11 AM	BCl3 MFC set to  0.000000
8/16/2011	10:12:11 AM	PHl3 MFC set to  0.000000
8/16/2011	10:12:11 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:12:11 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:12:11 AM	Tube furnace set to 0
8/16/2011	10:12:41 AM	Helium valve closed
8/16/2011	10:12:41 AM	H2 valve closed
8/16/2011	10:12:41 AM	BCl3 valve closed
8/16/2011	10:12:41 AM	PH3 valve closed
8/16/2011	10:12:41 AM	SiCl4 pre valve closed
8/16/2011	10:12:41 AM	SiCl4 post valve closed
8/16/2011	10:12:41 AM	Bypass valve closed
8/16/2011	10:12:41 AM	Bubbler valve closed
8/16/2011	10:12:41 AM	Main Vac valve opened
8/16/2011	10:12:41 AM	Helium MFC set to  0.000000
8/16/2011	10:12:41 AM	H2 MFC set to  0.000000
8/16/2011	10:12:41 AM	BCl3 MFC set to  0.000000
8/16/2011	10:12:41 AM	PHl3 MFC set to  0.000000
8/16/2011	10:12:41 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:12:41 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:12:41 AM	Tube furnace set to 0
8/16/2011	10:13:11 AM	H2 valve closed
8/16/2011	10:13:11 AM	BCl3 valve closed
8/16/2011	10:13:11 AM	PH3 valve closed
8/16/2011	10:13:11 AM	SiCl4 pre valve closed
8/16/2011	10:13:11 AM	SiCl4 post valve closed
8/16/2011	10:13:11 AM	Bypass valve closed
8/16/2011	10:13:11 AM	Bubbler valve closed
8/16/2011	10:13:11 AM	Helium valve opened
8/16/2011	10:13:11 AM	Main Vac valve opened
8/16/2011	10:13:11 AM	Helium MFC set to  20.000000
8/16/2011	10:13:11 AM	H2 MFC set to  0.000000
8/16/2011	10:13:11 AM	BCl3 MFC set to  0.000000
8/16/2011	10:13:11 AM	PHl3 MFC set to  0.000000
8/16/2011	10:13:11 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:13:11 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:13:11 AM	Tube furnace set to 0
8/16/2011	10:13:41 AM	Helium valve closed
8/16/2011	10:13:41 AM	H2 valve closed
8/16/2011	10:13:41 AM	BCl3 valve closed
8/16/2011	10:13:41 AM	PH3 valve closed
8/16/2011	10:13:41 AM	SiCl4 pre valve closed
8/16/2011	10:13:41 AM	SiCl4 post valve closed
8/16/2011	10:13:41 AM	Bypass valve closed
8/16/2011	10:13:41 AM	Bubbler valve closed
8/16/2011	10:13:41 AM	Main Vac valve opened
8/16/2011	10:13:41 AM	Helium MFC set to  0.000000
8/16/2011	10:13:41 AM	H2 MFC set to  0.000000
8/16/2011	10:13:41 AM	BCl3 MFC set to  0.000000
8/16/2011	10:13:41 AM	PHl3 MFC set to  0.000000
8/16/2011	10:13:41 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:13:41 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:13:42 AM	Tube furnace set to 0
8/16/2011	10:14:12 AM	H2 valve closed
8/16/2011	10:14:12 AM	BCl3 valve closed
8/16/2011	10:14:12 AM	PH3 valve closed
8/16/2011	10:14:12 AM	SiCl4 pre valve closed
8/16/2011	10:14:12 AM	SiCl4 post valve closed
8/16/2011	10:14:12 AM	Bypass valve closed
8/16/2011	10:14:12 AM	Bubbler valve closed
8/16/2011	10:14:12 AM	Helium valve opened
8/16/2011	10:14:12 AM	Main Vac valve opened
8/16/2011	10:14:12 AM	Helium MFC set to  20.000000
8/16/2011	10:14:12 AM	H2 MFC set to  0.000000
8/16/2011	10:14:12 AM	BCl3 MFC set to  0.000000
8/16/2011	10:14:12 AM	PHl3 MFC set to  0.000000
8/16/2011	10:14:12 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:14:12 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:14:12 AM	Tube furnace set to 0
8/16/2011	10:14:42 AM	Helium valve closed
8/16/2011	10:14:42 AM	H2 valve closed
8/16/2011	10:14:42 AM	BCl3 valve closed
8/16/2011	10:14:42 AM	PH3 valve closed
8/16/2011	10:14:42 AM	SiCl4 pre valve closed
8/16/2011	10:14:42 AM	SiCl4 post valve closed
8/16/2011	10:14:42 AM	Bypass valve closed
8/16/2011	10:14:42 AM	Bubbler valve closed
8/16/2011	10:14:42 AM	Main Vac valve opened
8/16/2011	10:14:42 AM	Helium MFC set to  0.000000
8/16/2011	10:14:42 AM	H2 MFC set to  0.000000
8/16/2011	10:14:42 AM	BCl3 MFC set to  0.000000
8/16/2011	10:14:42 AM	PHl3 MFC set to  0.000000
8/16/2011	10:14:42 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:14:42 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:14:42 AM	Tube furnace set to 0
8/16/2011	10:15:12 AM	H2 valve closed
8/16/2011	10:15:12 AM	BCl3 valve closed
8/16/2011	10:15:12 AM	PH3 valve closed
8/16/2011	10:15:12 AM	SiCl4 pre valve closed
8/16/2011	10:15:12 AM	SiCl4 post valve closed
8/16/2011	10:15:12 AM	Bypass valve closed
8/16/2011	10:15:12 AM	Bubbler valve closed
8/16/2011	10:15:12 AM	Helium valve opened
8/16/2011	10:15:12 AM	Main Vac valve opened
8/16/2011	10:15:12 AM	Helium MFC set to  20.000000
8/16/2011	10:15:12 AM	H2 MFC set to  0.000000
8/16/2011	10:15:12 AM	BCl3 MFC set to  0.000000
8/16/2011	10:15:12 AM	PHl3 MFC set to  0.000000
8/16/2011	10:15:12 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:15:12 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:15:12 AM	Tube furnace set to 0
8/16/2011	10:15:42 AM	Helium valve closed
8/16/2011	10:15:42 AM	H2 valve closed
8/16/2011	10:15:42 AM	BCl3 valve closed
8/16/2011	10:15:42 AM	PH3 valve closed
8/16/2011	10:15:42 AM	SiCl4 pre valve closed
8/16/2011	10:15:42 AM	SiCl4 post valve closed
8/16/2011	10:15:42 AM	Bypass valve closed
8/16/2011	10:15:42 AM	Bubbler valve closed
8/16/2011	10:15:42 AM	Main Vac valve opened
8/16/2011	10:15:42 AM	Helium MFC set to  0.000000
8/16/2011	10:15:42 AM	H2 MFC set to  0.000000
8/16/2011	10:15:42 AM	BCl3 MFC set to  0.000000
8/16/2011	10:15:42 AM	PHl3 MFC set to  0.000000
8/16/2011	10:15:42 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:15:42 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:15:42 AM	Tube furnace set to 0
8/16/2011	10:15:43 AM	Run finished at 10:15 AM
8/16/2011	10:15:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/16/2011	10:29:25 AM	Main Vac valve closed
8/16/2011	10:29:32 AM	Main Vac valve opened
8/16/2011	10:33:11 AM	Recipe started at 10:33 AM
8/16/2011	10:33:11 AM	Helium valve closed
8/16/2011	10:33:11 AM	H2 valve closed
8/16/2011	10:33:11 AM	BCl3 valve closed
8/16/2011	10:33:11 AM	PH3 valve closed
8/16/2011	10:33:11 AM	SiCl4 pre valve closed
8/16/2011	10:33:11 AM	SiCl4 post valve closed
8/16/2011	10:33:11 AM	Main Vac valve closed
8/16/2011	10:33:11 AM	Bypass valve closed
8/16/2011	10:33:11 AM	Bubbler valve closed
8/16/2011	10:33:11 AM	Helium MFC set to  0.000000
8/16/2011	10:33:11 AM	H2 MFC set to  0.000000
8/16/2011	10:33:11 AM	BCl3 MFC set to  0.000000
8/16/2011	10:33:11 AM	PHl3 MFC set to  0.000000
8/16/2011	10:33:11 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:33:11 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:33:12 AM	Tube furnace set to 0
8/16/2011	10:33:15 AM	Helium valve closed
8/16/2011	10:33:15 AM	BCl3 valve closed
8/16/2011	10:33:15 AM	PH3 valve closed
8/16/2011	10:33:15 AM	SiCl4 pre valve closed
8/16/2011	10:33:15 AM	SiCl4 post valve closed
8/16/2011	10:33:15 AM	Main Vac valve closed
8/16/2011	10:33:15 AM	Bypass valve closed
8/16/2011	10:33:15 AM	Bubbler valve closed
8/16/2011	10:33:15 AM	H2 valve opened
8/16/2011	10:33:15 AM	Helium MFC set to  0.000000
8/16/2011	10:33:15 AM	H2 MFC set to  500.000000
8/16/2011	10:33:15 AM	BCl3 MFC set to  0.000000
8/16/2011	10:33:15 AM	PHl3 MFC set to  0.000000
8/16/2011	10:33:15 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:33:15 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:33:15 AM	Tube furnace set to 0
8/16/2011	10:34:20 AM	Helium valve closed
8/16/2011	10:34:20 AM	BCl3 valve closed
8/16/2011	10:34:20 AM	PH3 valve closed
8/16/2011	10:34:20 AM	SiCl4 pre valve closed
8/16/2011	10:34:20 AM	SiCl4 post valve closed
8/16/2011	10:34:20 AM	Main Vac valve closed
8/16/2011	10:34:20 AM	Bypass valve closed
8/16/2011	10:34:20 AM	H2 valve opened
8/16/2011	10:34:20 AM	Bubbler valve opened
8/16/2011	10:34:20 AM	Helium MFC set to  0.000000
8/16/2011	10:34:20 AM	H2 MFC set to  500.000000
8/16/2011	10:34:20 AM	BCl3 MFC set to  0.000000
8/16/2011	10:34:20 AM	PHl3 MFC set to  0.000000
8/16/2011	10:34:20 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:34:20 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:34:20 AM	Tube furnace set to 0
8/16/2011	10:34:21 AM	Helium valve closed
8/16/2011	10:34:21 AM	BCl3 valve closed
8/16/2011	10:34:21 AM	PH3 valve closed
8/16/2011	10:34:21 AM	SiCl4 pre valve closed
8/16/2011	10:34:21 AM	SiCl4 post valve closed
8/16/2011	10:34:21 AM	Main Vac valve closed
8/16/2011	10:34:21 AM	Bypass valve closed
8/16/2011	10:34:21 AM	H2 valve opened
8/16/2011	10:34:21 AM	Bubbler valve opened
8/16/2011	10:34:21 AM	Helium MFC set to  0.000000
8/16/2011	10:34:21 AM	H2 MFC set to  500.000000
8/16/2011	10:34:21 AM	BCl3 MFC set to  0.000000
8/16/2011	10:34:21 AM	PHl3 MFC set to  0.000000
8/16/2011	10:34:21 AM	SiCl4 MFC set to  0.000000
8/16/2011	10:34:21 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:34:21 AM	Tube furnace set to 1000
8/16/2011	10:54:21 AM	Helium valve closed
8/16/2011	10:54:21 AM	PH3 valve closed
8/16/2011	10:54:21 AM	Main Vac valve closed
8/16/2011	10:54:21 AM	Bypass valve closed
8/16/2011	10:54:21 AM	H2 valve opened
8/16/2011	10:54:21 AM	BCl3 valve opened
8/16/2011	10:54:21 AM	SiCl4 pre valve opened
8/16/2011	10:54:21 AM	SiCl4 post valve opened
8/16/2011	10:54:21 AM	Bubbler valve opened
8/16/2011	10:54:21 AM	Helium MFC set to  0.000000
8/16/2011	10:54:21 AM	H2 MFC set to  500.000000
8/16/2011	10:54:21 AM	BCl3 MFC set to  2.200000
8/16/2011	10:54:21 AM	PHl3 MFC set to  0.000000
8/16/2011	10:54:21 AM	SiCl4 MFC set to  50.000000
8/16/2011	10:54:21 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:54:21 AM	Tube furnace set to 1000
8/16/2011	11:09:21 AM	Helium valve closed
8/16/2011	11:09:21 AM	BCl3 valve closed
8/16/2011	11:09:21 AM	PH3 valve closed
8/16/2011	11:09:21 AM	SiCl4 pre valve closed
8/16/2011	11:09:21 AM	SiCl4 post valve closed
8/16/2011	11:09:21 AM	Main Vac valve closed
8/16/2011	11:09:21 AM	Bypass valve closed
8/16/2011	11:09:21 AM	H2 valve opened
8/16/2011	11:09:21 AM	Bubbler valve opened
8/16/2011	11:09:21 AM	Helium MFC set to  0.000000
8/16/2011	11:09:21 AM	H2 MFC set to  500.000000
8/16/2011	11:09:21 AM	BCl3 MFC set to  0.000000
8/16/2011	11:09:21 AM	PHl3 MFC set to  0.000000
8/16/2011	11:09:21 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:09:21 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:09:22 AM	Tube furnace set to 750
8/16/2011	11:14:22 AM	H2 valve closed
8/16/2011	11:14:22 AM	BCl3 valve closed
8/16/2011	11:14:22 AM	PH3 valve closed
8/16/2011	11:14:22 AM	SiCl4 pre valve closed
8/16/2011	11:14:22 AM	SiCl4 post valve closed
8/16/2011	11:14:22 AM	Main Vac valve closed
8/16/2011	11:14:22 AM	Bypass valve closed
8/16/2011	11:14:22 AM	Helium valve opened
8/16/2011	11:14:22 AM	Bubbler valve opened
8/16/2011	11:14:22 AM	Helium MFC set to  500.000000
8/16/2011	11:14:22 AM	H2 MFC set to  0.000000
8/16/2011	11:14:22 AM	BCl3 MFC set to  0.000000
8/16/2011	11:14:22 AM	PHl3 MFC set to  0.000000
8/16/2011	11:14:22 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:14:22 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:14:22 AM	Tube furnace set to 0
8/16/2011	11:34:22 AM	Helium valve closed
8/16/2011	11:34:22 AM	H2 valve closed
8/16/2011	11:34:22 AM	BCl3 valve closed
8/16/2011	11:34:22 AM	PH3 valve closed
8/16/2011	11:34:22 AM	SiCl4 pre valve closed
8/16/2011	11:34:22 AM	SiCl4 post valve closed
8/16/2011	11:34:22 AM	Main Vac valve closed
8/16/2011	11:34:22 AM	Bypass valve closed
8/16/2011	11:34:22 AM	Bubbler valve closed
8/16/2011	11:34:22 AM	Helium MFC set to  0.000000
8/16/2011	11:34:22 AM	H2 MFC set to  0.000000
8/16/2011	11:34:22 AM	BCl3 MFC set to  0.000000
8/16/2011	11:34:22 AM	PHl3 MFC set to  0.000000
8/16/2011	11:34:22 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:34:22 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:34:22 AM	Tube furnace set to 0
8/16/2011	11:34:23 AM	Run finished at 11:34 AM
8/16/2011	11:50:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/16/2011	11:50:33 AM	Recipe started at 11:50 AM
8/16/2011	11:50:33 AM	Helium valve closed
8/16/2011	11:50:33 AM	H2 valve closed
8/16/2011	11:50:33 AM	BCl3 valve closed
8/16/2011	11:50:33 AM	PH3 valve closed
8/16/2011	11:50:33 AM	SiCl4 pre valve closed
8/16/2011	11:50:33 AM	SiCl4 post valve closed
8/16/2011	11:50:33 AM	Main Vac valve closed
8/16/2011	11:50:33 AM	Bypass valve closed
8/16/2011	11:50:33 AM	Bubbler valve closed
8/16/2011	11:50:33 AM	Helium MFC set to  0.000000
8/16/2011	11:50:33 AM	H2 MFC set to  0.000000
8/16/2011	11:50:33 AM	BCl3 MFC set to  0.000000
8/16/2011	11:50:33 AM	PHl3 MFC set to  0.000000
8/16/2011	11:50:33 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:50:33 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:50:33 AM	Tube furnace set to 0
8/16/2011	11:50:36 AM	H2 valve closed
8/16/2011	11:50:36 AM	BCl3 valve closed
8/16/2011	11:50:36 AM	PH3 valve closed
8/16/2011	11:50:36 AM	SiCl4 pre valve closed
8/16/2011	11:50:36 AM	SiCl4 post valve closed
8/16/2011	11:50:36 AM	Main Vac valve closed
8/16/2011	11:50:36 AM	Bypass valve closed
8/16/2011	11:50:36 AM	Bubbler valve closed
8/16/2011	11:50:36 AM	Helium valve opened
8/16/2011	11:50:36 AM	Helium MFC set to  500.000000
8/16/2011	11:50:36 AM	H2 MFC set to  0.000000
8/16/2011	11:50:36 AM	BCl3 MFC set to  0.000000
8/16/2011	11:50:36 AM	PHl3 MFC set to  0.000000
8/16/2011	11:50:36 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:50:36 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:50:36 AM	Tube furnace set to 0
8/16/2011	11:50:36 AM	Helium valve closed
8/16/2011	11:50:36 AM	H2 valve closed
8/16/2011	11:50:36 AM	BCl3 valve closed
8/16/2011	11:50:36 AM	PH3 valve closed
8/16/2011	11:50:36 AM	SiCl4 pre valve closed
8/16/2011	11:50:36 AM	SiCl4 post valve closed
8/16/2011	11:50:36 AM	Main Vac valve closed
8/16/2011	11:50:36 AM	Bypass valve closed
8/16/2011	11:50:36 AM	Bubbler valve closed
8/16/2011	11:50:36 AM	Helium MFC set to  0.000000
8/16/2011	11:50:36 AM	H2 MFC set to  0.000000
8/16/2011	11:50:36 AM	BCl3 MFC set to  0.000000
8/16/2011	11:50:36 AM	PHl3 MFC set to  0.000000
8/16/2011	11:50:36 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:50:36 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:50:36 AM	Tube furnace set to 0
8/16/2011	11:50:37 AM	Run finished at 11:50 AM
8/16/2011	11:50:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/16/2011	11:55:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	11:55:40 AM	Recipe started at 11:55 AM
8/16/2011	11:55:40 AM	Helium valve closed
8/16/2011	11:55:40 AM	H2 valve closed
8/16/2011	11:55:40 AM	BCl3 valve closed
8/16/2011	11:55:40 AM	PH3 valve closed
8/16/2011	11:55:40 AM	SiCl4 pre valve closed
8/16/2011	11:55:40 AM	SiCl4 post valve closed
8/16/2011	11:55:40 AM	Main Vac valve closed
8/16/2011	11:55:40 AM	Bubbler valve closed
8/16/2011	11:55:40 AM	Bypass valve opened
8/16/2011	11:55:40 AM	Helium MFC set to  0.000000
8/16/2011	11:55:40 AM	H2 MFC set to  0.000000
8/16/2011	11:55:40 AM	BCl3 MFC set to  0.000000
8/16/2011	11:55:40 AM	PHl3 MFC set to  0.000000
8/16/2011	11:55:40 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:55:40 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:55:40 AM	Tube furnace set to 0
8/16/2011	11:56:49 AM	Helium valve closed
8/16/2011	11:56:49 AM	H2 valve closed
8/16/2011	11:56:49 AM	BCl3 valve closed
8/16/2011	11:56:49 AM	PH3 valve closed
8/16/2011	11:56:49 AM	SiCl4 pre valve closed
8/16/2011	11:56:49 AM	SiCl4 post valve closed
8/16/2011	11:56:49 AM	Main Vac valve closed
8/16/2011	11:56:49 AM	Bubbler valve closed
8/16/2011	11:56:49 AM	Bypass valve opened
8/16/2011	11:56:49 AM	Helium MFC set to  0.000000
8/16/2011	11:56:49 AM	H2 MFC set to  0.000000
8/16/2011	11:56:49 AM	BCl3 MFC set to  0.000000
8/16/2011	11:56:49 AM	PHl3 MFC set to  0.000000
8/16/2011	11:56:49 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:56:49 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:56:49 AM	Tube furnace set to 0
8/16/2011	11:57:49 AM	Helium valve closed
8/16/2011	11:57:49 AM	H2 valve closed
8/16/2011	11:57:49 AM	BCl3 valve closed
8/16/2011	11:57:49 AM	PH3 valve closed
8/16/2011	11:57:49 AM	SiCl4 pre valve closed
8/16/2011	11:57:49 AM	SiCl4 post valve closed
8/16/2011	11:57:49 AM	Bypass valve closed
8/16/2011	11:57:49 AM	Bubbler valve closed
8/16/2011	11:57:49 AM	Main Vac valve opened
8/16/2011	11:57:49 AM	Helium MFC set to  0.000000
8/16/2011	11:57:49 AM	H2 MFC set to  0.000000
8/16/2011	11:57:49 AM	BCl3 MFC set to  0.000000
8/16/2011	11:57:49 AM	PHl3 MFC set to  0.000000
8/16/2011	11:57:49 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:57:49 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:57:49 AM	Tube furnace set to 0
8/16/2011	11:57:50 AM	Run finished at 11:57 AM
8/16/2011	11:57:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	11:59:53 AM	Recipe started at 11:59 AM
8/16/2011	11:59:53 AM	Helium valve closed
8/16/2011	11:59:53 AM	H2 valve closed
8/16/2011	11:59:53 AM	BCl3 valve closed
8/16/2011	11:59:53 AM	PH3 valve closed
8/16/2011	11:59:53 AM	SiCl4 pre valve closed
8/16/2011	11:59:53 AM	SiCl4 post valve closed
8/16/2011	11:59:53 AM	Bypass valve closed
8/16/2011	11:59:53 AM	Bubbler valve closed
8/16/2011	11:59:53 AM	Main Vac valve opened
8/16/2011	11:59:53 AM	Helium MFC set to  0.000000
8/16/2011	11:59:53 AM	H2 MFC set to  0.000000
8/16/2011	11:59:53 AM	BCl3 MFC set to  0.000000
8/16/2011	11:59:53 AM	PHl3 MFC set to  0.000000
8/16/2011	11:59:53 AM	SiCl4 MFC set to  0.000000
8/16/2011	11:59:53 AM	Bypass solenoid MFC set to  0.000000
8/16/2011	11:59:53 AM	Tube furnace set to 0
8/16/2011	12:00:23 PM	H2 valve closed
8/16/2011	12:00:23 PM	BCl3 valve closed
8/16/2011	12:00:23 PM	PH3 valve closed
8/16/2011	12:00:23 PM	SiCl4 pre valve closed
8/16/2011	12:00:23 PM	SiCl4 post valve closed
8/16/2011	12:00:23 PM	Bypass valve closed
8/16/2011	12:00:23 PM	Bubbler valve closed
8/16/2011	12:00:23 PM	Helium valve opened
8/16/2011	12:00:23 PM	Main Vac valve opened
8/16/2011	12:00:23 PM	Helium MFC set to  20.000000
8/16/2011	12:00:23 PM	H2 MFC set to  0.000000
8/16/2011	12:00:23 PM	BCl3 MFC set to  0.000000
8/16/2011	12:00:23 PM	PHl3 MFC set to  0.000000
8/16/2011	12:00:23 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:00:23 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:00:24 PM	Tube furnace set to 0
8/16/2011	12:00:54 PM	Helium valve closed
8/16/2011	12:00:54 PM	H2 valve closed
8/16/2011	12:00:54 PM	BCl3 valve closed
8/16/2011	12:00:54 PM	PH3 valve closed
8/16/2011	12:00:54 PM	SiCl4 pre valve closed
8/16/2011	12:00:54 PM	SiCl4 post valve closed
8/16/2011	12:00:54 PM	Bypass valve closed
8/16/2011	12:00:54 PM	Bubbler valve closed
8/16/2011	12:00:54 PM	Main Vac valve opened
8/16/2011	12:00:54 PM	Helium MFC set to  0.000000
8/16/2011	12:00:54 PM	H2 MFC set to  0.000000
8/16/2011	12:00:54 PM	BCl3 MFC set to  0.000000
8/16/2011	12:00:54 PM	PHl3 MFC set to  0.000000
8/16/2011	12:00:54 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:00:54 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:00:54 PM	Tube furnace set to 0
8/16/2011	12:01:24 PM	H2 valve closed
8/16/2011	12:01:24 PM	BCl3 valve closed
8/16/2011	12:01:24 PM	PH3 valve closed
8/16/2011	12:01:24 PM	SiCl4 pre valve closed
8/16/2011	12:01:24 PM	SiCl4 post valve closed
8/16/2011	12:01:24 PM	Bypass valve closed
8/16/2011	12:01:24 PM	Bubbler valve closed
8/16/2011	12:01:24 PM	Helium valve opened
8/16/2011	12:01:24 PM	Main Vac valve opened
8/16/2011	12:01:24 PM	Helium MFC set to  20.000000
8/16/2011	12:01:24 PM	H2 MFC set to  0.000000
8/16/2011	12:01:24 PM	BCl3 MFC set to  0.000000
8/16/2011	12:01:24 PM	PHl3 MFC set to  0.000000
8/16/2011	12:01:24 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:01:24 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:01:24 PM	Tube furnace set to 0
8/16/2011	12:01:54 PM	Helium valve closed
8/16/2011	12:01:54 PM	H2 valve closed
8/16/2011	12:01:54 PM	BCl3 valve closed
8/16/2011	12:01:54 PM	PH3 valve closed
8/16/2011	12:01:54 PM	SiCl4 pre valve closed
8/16/2011	12:01:54 PM	SiCl4 post valve closed
8/16/2011	12:01:54 PM	Bypass valve closed
8/16/2011	12:01:54 PM	Bubbler valve closed
8/16/2011	12:01:54 PM	Main Vac valve opened
8/16/2011	12:01:54 PM	Helium MFC set to  0.000000
8/16/2011	12:01:54 PM	H2 MFC set to  0.000000
8/16/2011	12:01:54 PM	BCl3 MFC set to  0.000000
8/16/2011	12:01:54 PM	PHl3 MFC set to  0.000000
8/16/2011	12:01:54 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:01:54 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:01:54 PM	Tube furnace set to 0
8/16/2011	12:02:24 PM	H2 valve closed
8/16/2011	12:02:24 PM	BCl3 valve closed
8/16/2011	12:02:24 PM	PH3 valve closed
8/16/2011	12:02:24 PM	SiCl4 pre valve closed
8/16/2011	12:02:24 PM	SiCl4 post valve closed
8/16/2011	12:02:24 PM	Bypass valve closed
8/16/2011	12:02:24 PM	Bubbler valve closed
8/16/2011	12:02:24 PM	Helium valve opened
8/16/2011	12:02:24 PM	Main Vac valve opened
8/16/2011	12:02:24 PM	Helium MFC set to  20.000000
8/16/2011	12:02:24 PM	H2 MFC set to  0.000000
8/16/2011	12:02:24 PM	BCl3 MFC set to  0.000000
8/16/2011	12:02:24 PM	PHl3 MFC set to  0.000000
8/16/2011	12:02:24 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:02:24 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:02:24 PM	Tube furnace set to 0
8/16/2011	12:02:54 PM	Helium valve closed
8/16/2011	12:02:54 PM	H2 valve closed
8/16/2011	12:02:54 PM	BCl3 valve closed
8/16/2011	12:02:54 PM	PH3 valve closed
8/16/2011	12:02:54 PM	SiCl4 pre valve closed
8/16/2011	12:02:54 PM	SiCl4 post valve closed
8/16/2011	12:02:54 PM	Bypass valve closed
8/16/2011	12:02:54 PM	Bubbler valve closed
8/16/2011	12:02:54 PM	Main Vac valve opened
8/16/2011	12:02:54 PM	Helium MFC set to  0.000000
8/16/2011	12:02:54 PM	H2 MFC set to  0.000000
8/16/2011	12:02:54 PM	BCl3 MFC set to  0.000000
8/16/2011	12:02:54 PM	PHl3 MFC set to  0.000000
8/16/2011	12:02:54 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:02:54 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:02:55 PM	Tube furnace set to 0
8/16/2011	12:03:25 PM	H2 valve closed
8/16/2011	12:03:25 PM	BCl3 valve closed
8/16/2011	12:03:25 PM	PH3 valve closed
8/16/2011	12:03:25 PM	SiCl4 pre valve closed
8/16/2011	12:03:25 PM	SiCl4 post valve closed
8/16/2011	12:03:25 PM	Bypass valve closed
8/16/2011	12:03:25 PM	Bubbler valve closed
8/16/2011	12:03:25 PM	Helium valve opened
8/16/2011	12:03:25 PM	Main Vac valve opened
8/16/2011	12:03:25 PM	Helium MFC set to  20.000000
8/16/2011	12:03:25 PM	H2 MFC set to  0.000000
8/16/2011	12:03:25 PM	BCl3 MFC set to  0.000000
8/16/2011	12:03:25 PM	PHl3 MFC set to  0.000000
8/16/2011	12:03:25 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:03:25 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:03:25 PM	Tube furnace set to 0
8/16/2011	12:03:55 PM	Helium valve closed
8/16/2011	12:03:55 PM	H2 valve closed
8/16/2011	12:03:55 PM	BCl3 valve closed
8/16/2011	12:03:55 PM	PH3 valve closed
8/16/2011	12:03:55 PM	SiCl4 pre valve closed
8/16/2011	12:03:55 PM	SiCl4 post valve closed
8/16/2011	12:03:55 PM	Bypass valve closed
8/16/2011	12:03:55 PM	Bubbler valve closed
8/16/2011	12:03:55 PM	Main Vac valve opened
8/16/2011	12:03:55 PM	Helium MFC set to  0.000000
8/16/2011	12:03:55 PM	H2 MFC set to  0.000000
8/16/2011	12:03:55 PM	BCl3 MFC set to  0.000000
8/16/2011	12:03:55 PM	PHl3 MFC set to  0.000000
8/16/2011	12:03:55 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:03:55 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:03:55 PM	Tube furnace set to 0
8/16/2011	12:04:25 PM	H2 valve closed
8/16/2011	12:04:25 PM	BCl3 valve closed
8/16/2011	12:04:25 PM	PH3 valve closed
8/16/2011	12:04:25 PM	SiCl4 pre valve closed
8/16/2011	12:04:25 PM	SiCl4 post valve closed
8/16/2011	12:04:25 PM	Bypass valve closed
8/16/2011	12:04:25 PM	Bubbler valve closed
8/16/2011	12:04:25 PM	Helium valve opened
8/16/2011	12:04:25 PM	Main Vac valve opened
8/16/2011	12:04:25 PM	Helium MFC set to  20.000000
8/16/2011	12:04:25 PM	H2 MFC set to  0.000000
8/16/2011	12:04:25 PM	BCl3 MFC set to  0.000000
8/16/2011	12:04:25 PM	PHl3 MFC set to  0.000000
8/16/2011	12:04:25 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:04:25 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:04:25 PM	Tube furnace set to 0
8/16/2011	12:04:55 PM	Helium valve closed
8/16/2011	12:04:55 PM	H2 valve closed
8/16/2011	12:04:55 PM	BCl3 valve closed
8/16/2011	12:04:55 PM	PH3 valve closed
8/16/2011	12:04:55 PM	SiCl4 pre valve closed
8/16/2011	12:04:55 PM	SiCl4 post valve closed
8/16/2011	12:04:55 PM	Bypass valve closed
8/16/2011	12:04:55 PM	Bubbler valve closed
8/16/2011	12:04:55 PM	Main Vac valve opened
8/16/2011	12:04:55 PM	Helium MFC set to  0.000000
8/16/2011	12:04:55 PM	H2 MFC set to  0.000000
8/16/2011	12:04:55 PM	BCl3 MFC set to  0.000000
8/16/2011	12:04:55 PM	PHl3 MFC set to  0.000000
8/16/2011	12:04:55 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:04:55 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:04:55 PM	Tube furnace set to 0
8/16/2011	12:05:25 PM	H2 valve closed
8/16/2011	12:05:25 PM	BCl3 valve closed
8/16/2011	12:05:25 PM	PH3 valve closed
8/16/2011	12:05:25 PM	SiCl4 pre valve closed
8/16/2011	12:05:25 PM	SiCl4 post valve closed
8/16/2011	12:05:25 PM	Bypass valve closed
8/16/2011	12:05:25 PM	Bubbler valve closed
8/16/2011	12:05:25 PM	Helium valve opened
8/16/2011	12:05:25 PM	Main Vac valve opened
8/16/2011	12:05:25 PM	Helium MFC set to  20.000000
8/16/2011	12:05:25 PM	H2 MFC set to  0.000000
8/16/2011	12:05:25 PM	BCl3 MFC set to  0.000000
8/16/2011	12:05:25 PM	PHl3 MFC set to  0.000000
8/16/2011	12:05:25 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:05:25 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:05:26 PM	Tube furnace set to 0
8/16/2011	12:05:56 PM	Helium valve closed
8/16/2011	12:05:56 PM	H2 valve closed
8/16/2011	12:05:56 PM	BCl3 valve closed
8/16/2011	12:05:56 PM	PH3 valve closed
8/16/2011	12:05:56 PM	SiCl4 pre valve closed
8/16/2011	12:05:56 PM	SiCl4 post valve closed
8/16/2011	12:05:56 PM	Bypass valve closed
8/16/2011	12:05:56 PM	Bubbler valve closed
8/16/2011	12:05:56 PM	Main Vac valve opened
8/16/2011	12:05:56 PM	Helium MFC set to  0.000000
8/16/2011	12:05:56 PM	H2 MFC set to  0.000000
8/16/2011	12:05:56 PM	BCl3 MFC set to  0.000000
8/16/2011	12:05:56 PM	PHl3 MFC set to  0.000000
8/16/2011	12:05:56 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:05:56 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:05:56 PM	Tube furnace set to 0
8/16/2011	12:06:26 PM	H2 valve closed
8/16/2011	12:06:26 PM	BCl3 valve closed
8/16/2011	12:06:26 PM	PH3 valve closed
8/16/2011	12:06:26 PM	SiCl4 pre valve closed
8/16/2011	12:06:26 PM	SiCl4 post valve closed
8/16/2011	12:06:26 PM	Bypass valve closed
8/16/2011	12:06:26 PM	Bubbler valve closed
8/16/2011	12:06:26 PM	Helium valve opened
8/16/2011	12:06:26 PM	Main Vac valve opened
8/16/2011	12:06:26 PM	Helium MFC set to  20.000000
8/16/2011	12:06:26 PM	H2 MFC set to  0.000000
8/16/2011	12:06:26 PM	BCl3 MFC set to  0.000000
8/16/2011	12:06:26 PM	PHl3 MFC set to  0.000000
8/16/2011	12:06:26 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:06:26 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:06:26 PM	Tube furnace set to 0
8/16/2011	12:06:56 PM	Helium valve closed
8/16/2011	12:06:56 PM	H2 valve closed
8/16/2011	12:06:56 PM	BCl3 valve closed
8/16/2011	12:06:56 PM	PH3 valve closed
8/16/2011	12:06:56 PM	SiCl4 pre valve closed
8/16/2011	12:06:56 PM	SiCl4 post valve closed
8/16/2011	12:06:56 PM	Bypass valve closed
8/16/2011	12:06:56 PM	Bubbler valve closed
8/16/2011	12:06:56 PM	Main Vac valve opened
8/16/2011	12:06:56 PM	Helium MFC set to  0.000000
8/16/2011	12:06:56 PM	H2 MFC set to  0.000000
8/16/2011	12:06:56 PM	BCl3 MFC set to  0.000000
8/16/2011	12:06:56 PM	PHl3 MFC set to  0.000000
8/16/2011	12:06:56 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:06:56 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:06:56 PM	Tube furnace set to 0
8/16/2011	12:07:26 PM	H2 valve closed
8/16/2011	12:07:26 PM	BCl3 valve closed
8/16/2011	12:07:26 PM	PH3 valve closed
8/16/2011	12:07:26 PM	SiCl4 pre valve closed
8/16/2011	12:07:26 PM	SiCl4 post valve closed
8/16/2011	12:07:26 PM	Bypass valve closed
8/16/2011	12:07:26 PM	Bubbler valve closed
8/16/2011	12:07:26 PM	Helium valve opened
8/16/2011	12:07:26 PM	Main Vac valve opened
8/16/2011	12:07:26 PM	Helium MFC set to  20.000000
8/16/2011	12:07:26 PM	H2 MFC set to  0.000000
8/16/2011	12:07:26 PM	BCl3 MFC set to  0.000000
8/16/2011	12:07:26 PM	PHl3 MFC set to  0.000000
8/16/2011	12:07:26 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:07:26 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:07:26 PM	Tube furnace set to 0
8/16/2011	12:07:56 PM	Helium valve closed
8/16/2011	12:07:56 PM	H2 valve closed
8/16/2011	12:07:56 PM	BCl3 valve closed
8/16/2011	12:07:56 PM	PH3 valve closed
8/16/2011	12:07:56 PM	SiCl4 pre valve closed
8/16/2011	12:07:56 PM	SiCl4 post valve closed
8/16/2011	12:07:56 PM	Bypass valve closed
8/16/2011	12:07:56 PM	Bubbler valve closed
8/16/2011	12:07:56 PM	Main Vac valve opened
8/16/2011	12:07:56 PM	Helium MFC set to  0.000000
8/16/2011	12:07:56 PM	H2 MFC set to  0.000000
8/16/2011	12:07:56 PM	BCl3 MFC set to  0.000000
8/16/2011	12:07:56 PM	PHl3 MFC set to  0.000000
8/16/2011	12:07:57 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:07:57 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:07:57 PM	Tube furnace set to 0
8/16/2011	12:08:27 PM	H2 valve closed
8/16/2011	12:08:27 PM	BCl3 valve closed
8/16/2011	12:08:27 PM	PH3 valve closed
8/16/2011	12:08:27 PM	SiCl4 pre valve closed
8/16/2011	12:08:27 PM	SiCl4 post valve closed
8/16/2011	12:08:27 PM	Bypass valve closed
8/16/2011	12:08:27 PM	Bubbler valve closed
8/16/2011	12:08:27 PM	Helium valve opened
8/16/2011	12:08:27 PM	Main Vac valve opened
8/16/2011	12:08:27 PM	Helium MFC set to  20.000000
8/16/2011	12:08:27 PM	H2 MFC set to  0.000000
8/16/2011	12:08:27 PM	BCl3 MFC set to  0.000000
8/16/2011	12:08:27 PM	PHl3 MFC set to  0.000000
8/16/2011	12:08:27 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:08:27 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:08:27 PM	Tube furnace set to 0
8/16/2011	12:08:57 PM	Helium valve closed
8/16/2011	12:08:57 PM	H2 valve closed
8/16/2011	12:08:57 PM	BCl3 valve closed
8/16/2011	12:08:57 PM	PH3 valve closed
8/16/2011	12:08:57 PM	SiCl4 pre valve closed
8/16/2011	12:08:57 PM	SiCl4 post valve closed
8/16/2011	12:08:57 PM	Bypass valve closed
8/16/2011	12:08:57 PM	Bubbler valve closed
8/16/2011	12:08:57 PM	Main Vac valve opened
8/16/2011	12:08:57 PM	Helium MFC set to  0.000000
8/16/2011	12:08:57 PM	H2 MFC set to  0.000000
8/16/2011	12:08:57 PM	BCl3 MFC set to  0.000000
8/16/2011	12:08:57 PM	PHl3 MFC set to  0.000000
8/16/2011	12:08:57 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:08:57 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:08:57 PM	Tube furnace set to 200
8/16/2011	12:09:27 PM	H2 valve closed
8/16/2011	12:09:27 PM	BCl3 valve closed
8/16/2011	12:09:27 PM	PH3 valve closed
8/16/2011	12:09:27 PM	SiCl4 pre valve closed
8/16/2011	12:09:27 PM	SiCl4 post valve closed
8/16/2011	12:09:27 PM	Bypass valve closed
8/16/2011	12:09:27 PM	Bubbler valve closed
8/16/2011	12:09:27 PM	Helium valve opened
8/16/2011	12:09:27 PM	Main Vac valve opened
8/16/2011	12:09:27 PM	Helium MFC set to  20.000000
8/16/2011	12:09:27 PM	H2 MFC set to  0.000000
8/16/2011	12:09:27 PM	BCl3 MFC set to  0.000000
8/16/2011	12:09:27 PM	PHl3 MFC set to  0.000000
8/16/2011	12:09:27 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:09:27 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:09:27 PM	Tube furnace set to 200
8/16/2011	12:09:57 PM	Helium valve closed
8/16/2011	12:09:57 PM	H2 valve closed
8/16/2011	12:09:57 PM	BCl3 valve closed
8/16/2011	12:09:57 PM	PH3 valve closed
8/16/2011	12:09:57 PM	SiCl4 pre valve closed
8/16/2011	12:09:57 PM	SiCl4 post valve closed
8/16/2011	12:09:57 PM	Bypass valve closed
8/16/2011	12:09:57 PM	Bubbler valve closed
8/16/2011	12:09:57 PM	Main Vac valve opened
8/16/2011	12:09:57 PM	Helium MFC set to  0.000000
8/16/2011	12:09:57 PM	H2 MFC set to  0.000000
8/16/2011	12:09:57 PM	BCl3 MFC set to  0.000000
8/16/2011	12:09:57 PM	PHl3 MFC set to  0.000000
8/16/2011	12:09:57 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:09:57 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:09:58 PM	Tube furnace set to 200
8/16/2011	12:10:28 PM	H2 valve closed
8/16/2011	12:10:28 PM	BCl3 valve closed
8/16/2011	12:10:28 PM	PH3 valve closed
8/16/2011	12:10:28 PM	SiCl4 pre valve closed
8/16/2011	12:10:28 PM	SiCl4 post valve closed
8/16/2011	12:10:28 PM	Bypass valve closed
8/16/2011	12:10:28 PM	Bubbler valve closed
8/16/2011	12:10:28 PM	Helium valve opened
8/16/2011	12:10:28 PM	Main Vac valve opened
8/16/2011	12:10:28 PM	Helium MFC set to  20.000000
8/16/2011	12:10:28 PM	H2 MFC set to  0.000000
8/16/2011	12:10:28 PM	BCl3 MFC set to  0.000000
8/16/2011	12:10:28 PM	PHl3 MFC set to  0.000000
8/16/2011	12:10:28 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:10:28 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:10:28 PM	Tube furnace set to 200
8/16/2011	12:10:58 PM	Helium valve closed
8/16/2011	12:10:58 PM	H2 valve closed
8/16/2011	12:10:58 PM	BCl3 valve closed
8/16/2011	12:10:58 PM	PH3 valve closed
8/16/2011	12:10:58 PM	SiCl4 pre valve closed
8/16/2011	12:10:58 PM	SiCl4 post valve closed
8/16/2011	12:10:58 PM	Bypass valve closed
8/16/2011	12:10:58 PM	Bubbler valve closed
8/16/2011	12:10:58 PM	Main Vac valve opened
8/16/2011	12:10:58 PM	Helium MFC set to  0.000000
8/16/2011	12:10:58 PM	H2 MFC set to  0.000000
8/16/2011	12:10:58 PM	BCl3 MFC set to  0.000000
8/16/2011	12:10:58 PM	PHl3 MFC set to  0.000000
8/16/2011	12:10:58 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:10:58 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:10:58 PM	Tube furnace set to 200
8/16/2011	12:11:28 PM	H2 valve closed
8/16/2011	12:11:28 PM	BCl3 valve closed
8/16/2011	12:11:28 PM	PH3 valve closed
8/16/2011	12:11:28 PM	SiCl4 pre valve closed
8/16/2011	12:11:28 PM	SiCl4 post valve closed
8/16/2011	12:11:28 PM	Bypass valve closed
8/16/2011	12:11:28 PM	Bubbler valve closed
8/16/2011	12:11:28 PM	Helium valve opened
8/16/2011	12:11:28 PM	Main Vac valve opened
8/16/2011	12:11:28 PM	Helium MFC set to  20.000000
8/16/2011	12:11:28 PM	H2 MFC set to  0.000000
8/16/2011	12:11:28 PM	BCl3 MFC set to  0.000000
8/16/2011	12:11:28 PM	PHl3 MFC set to  0.000000
8/16/2011	12:11:28 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:11:28 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:11:28 PM	Tube furnace set to 200
8/16/2011	12:11:58 PM	Helium valve closed
8/16/2011	12:11:58 PM	H2 valve closed
8/16/2011	12:11:58 PM	BCl3 valve closed
8/16/2011	12:11:58 PM	PH3 valve closed
8/16/2011	12:11:58 PM	SiCl4 pre valve closed
8/16/2011	12:11:58 PM	SiCl4 post valve closed
8/16/2011	12:11:58 PM	Bypass valve closed
8/16/2011	12:11:58 PM	Bubbler valve closed
8/16/2011	12:11:58 PM	Main Vac valve opened
8/16/2011	12:11:58 PM	Helium MFC set to  0.000000
8/16/2011	12:11:58 PM	H2 MFC set to  0.000000
8/16/2011	12:11:58 PM	BCl3 MFC set to  0.000000
8/16/2011	12:11:58 PM	PHl3 MFC set to  0.000000
8/16/2011	12:11:58 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:11:58 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:11:58 PM	Tube furnace set to 200
8/16/2011	12:12:28 PM	H2 valve closed
8/16/2011	12:12:28 PM	BCl3 valve closed
8/16/2011	12:12:28 PM	PH3 valve closed
8/16/2011	12:12:28 PM	SiCl4 pre valve closed
8/16/2011	12:12:28 PM	SiCl4 post valve closed
8/16/2011	12:12:28 PM	Bypass valve closed
8/16/2011	12:12:28 PM	Bubbler valve closed
8/16/2011	12:12:28 PM	Helium valve opened
8/16/2011	12:12:28 PM	Main Vac valve opened
8/16/2011	12:12:28 PM	Helium MFC set to  20.000000
8/16/2011	12:12:28 PM	H2 MFC set to  0.000000
8/16/2011	12:12:28 PM	BCl3 MFC set to  0.000000
8/16/2011	12:12:28 PM	PHl3 MFC set to  0.000000
8/16/2011	12:12:28 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:12:28 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:12:29 PM	Tube furnace set to 200
8/16/2011	12:12:59 PM	Helium valve closed
8/16/2011	12:12:59 PM	H2 valve closed
8/16/2011	12:12:59 PM	BCl3 valve closed
8/16/2011	12:12:59 PM	PH3 valve closed
8/16/2011	12:12:59 PM	SiCl4 pre valve closed
8/16/2011	12:12:59 PM	SiCl4 post valve closed
8/16/2011	12:12:59 PM	Bypass valve closed
8/16/2011	12:12:59 PM	Bubbler valve closed
8/16/2011	12:12:59 PM	Main Vac valve opened
8/16/2011	12:12:59 PM	Helium MFC set to  0.000000
8/16/2011	12:12:59 PM	H2 MFC set to  0.000000
8/16/2011	12:12:59 PM	BCl3 MFC set to  0.000000
8/16/2011	12:12:59 PM	PHl3 MFC set to  0.000000
8/16/2011	12:12:59 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:12:59 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:12:59 PM	Tube furnace set to 200
8/16/2011	12:13:29 PM	H2 valve closed
8/16/2011	12:13:29 PM	BCl3 valve closed
8/16/2011	12:13:29 PM	PH3 valve closed
8/16/2011	12:13:29 PM	SiCl4 pre valve closed
8/16/2011	12:13:29 PM	SiCl4 post valve closed
8/16/2011	12:13:29 PM	Bypass valve closed
8/16/2011	12:13:29 PM	Bubbler valve closed
8/16/2011	12:13:29 PM	Helium valve opened
8/16/2011	12:13:29 PM	Main Vac valve opened
8/16/2011	12:13:29 PM	Helium MFC set to  20.000000
8/16/2011	12:13:29 PM	H2 MFC set to  0.000000
8/16/2011	12:13:29 PM	BCl3 MFC set to  0.000000
8/16/2011	12:13:29 PM	PHl3 MFC set to  0.000000
8/16/2011	12:13:29 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:13:29 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:13:29 PM	Tube furnace set to 200
8/16/2011	12:13:59 PM	Helium valve closed
8/16/2011	12:13:59 PM	H2 valve closed
8/16/2011	12:13:59 PM	BCl3 valve closed
8/16/2011	12:13:59 PM	PH3 valve closed
8/16/2011	12:13:59 PM	SiCl4 pre valve closed
8/16/2011	12:13:59 PM	SiCl4 post valve closed
8/16/2011	12:13:59 PM	Bypass valve closed
8/16/2011	12:13:59 PM	Bubbler valve closed
8/16/2011	12:13:59 PM	Main Vac valve opened
8/16/2011	12:13:59 PM	Helium MFC set to  0.000000
8/16/2011	12:13:59 PM	H2 MFC set to  0.000000
8/16/2011	12:13:59 PM	BCl3 MFC set to  0.000000
8/16/2011	12:13:59 PM	PHl3 MFC set to  0.000000
8/16/2011	12:13:59 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:13:59 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:13:59 PM	Tube furnace set to 200
8/16/2011	12:14:29 PM	H2 valve closed
8/16/2011	12:14:29 PM	BCl3 valve closed
8/16/2011	12:14:29 PM	PH3 valve closed
8/16/2011	12:14:29 PM	SiCl4 pre valve closed
8/16/2011	12:14:29 PM	SiCl4 post valve closed
8/16/2011	12:14:29 PM	Bypass valve closed
8/16/2011	12:14:29 PM	Bubbler valve closed
8/16/2011	12:14:29 PM	Helium valve opened
8/16/2011	12:14:29 PM	Main Vac valve opened
8/16/2011	12:14:29 PM	Helium MFC set to  20.000000
8/16/2011	12:14:29 PM	H2 MFC set to  0.000000
8/16/2011	12:14:29 PM	BCl3 MFC set to  0.000000
8/16/2011	12:14:29 PM	PHl3 MFC set to  0.000000
8/16/2011	12:14:29 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:14:29 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:14:29 PM	Tube furnace set to 200
8/16/2011	12:14:59 PM	Helium valve closed
8/16/2011	12:15:00 PM	H2 valve closed
8/16/2011	12:15:00 PM	BCl3 valve closed
8/16/2011	12:15:00 PM	PH3 valve closed
8/16/2011	12:15:00 PM	SiCl4 pre valve closed
8/16/2011	12:15:00 PM	SiCl4 post valve closed
8/16/2011	12:15:00 PM	Bypass valve closed
8/16/2011	12:15:00 PM	Bubbler valve closed
8/16/2011	12:15:00 PM	Main Vac valve opened
8/16/2011	12:15:00 PM	Helium MFC set to  0.000000
8/16/2011	12:15:00 PM	H2 MFC set to  0.000000
8/16/2011	12:15:00 PM	BCl3 MFC set to  0.000000
8/16/2011	12:15:00 PM	PHl3 MFC set to  0.000000
8/16/2011	12:15:00 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:15:00 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:15:00 PM	Tube furnace set to 0
8/16/2011	12:15:01 PM	Run finished at 12:15 PM
8/16/2011	12:27:57 PM	Main Vac valve closed
8/16/2011	12:28:05 PM	Main Vac valve opened
8/16/2011	12:28:15 PM	Main Vac valve closed
8/16/2011	12:28:26 PM	Main Vac valve opened
8/16/2011	12:28:50 PM	Recipe started at 12:28 PM
8/16/2011	12:28:50 PM	Helium valve closed
8/16/2011	12:28:50 PM	H2 valve closed
8/16/2011	12:28:50 PM	BCl3 valve closed
8/16/2011	12:28:50 PM	PH3 valve closed
8/16/2011	12:28:50 PM	SiCl4 pre valve closed
8/16/2011	12:28:50 PM	SiCl4 post valve closed
8/16/2011	12:28:50 PM	Main Vac valve closed
8/16/2011	12:28:50 PM	Bypass valve closed
8/16/2011	12:28:50 PM	Bubbler valve closed
8/16/2011	12:28:50 PM	Helium MFC set to  0.000000
8/16/2011	12:28:50 PM	H2 MFC set to  0.000000
8/16/2011	12:28:50 PM	BCl3 MFC set to  0.000000
8/16/2011	12:28:50 PM	PHl3 MFC set to  0.000000
8/16/2011	12:28:50 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:28:50 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:28:50 PM	Tube furnace set to 0
8/16/2011	12:28:53 PM	Helium valve closed
8/16/2011	12:28:53 PM	BCl3 valve closed
8/16/2011	12:28:53 PM	PH3 valve closed
8/16/2011	12:28:53 PM	SiCl4 pre valve closed
8/16/2011	12:28:53 PM	SiCl4 post valve closed
8/16/2011	12:28:53 PM	Main Vac valve closed
8/16/2011	12:28:53 PM	Bypass valve closed
8/16/2011	12:28:53 PM	Bubbler valve closed
8/16/2011	12:28:53 PM	H2 valve opened
8/16/2011	12:28:53 PM	Helium MFC set to  0.000000
8/16/2011	12:28:53 PM	H2 MFC set to  500.000000
8/16/2011	12:28:53 PM	BCl3 MFC set to  0.000000
8/16/2011	12:28:53 PM	PHl3 MFC set to  0.000000
8/16/2011	12:28:53 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:28:53 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:28:54 PM	Tube furnace set to 0
8/16/2011	12:29:58 PM	Helium valve closed
8/16/2011	12:29:58 PM	BCl3 valve closed
8/16/2011	12:29:58 PM	PH3 valve closed
8/16/2011	12:29:58 PM	SiCl4 pre valve closed
8/16/2011	12:29:58 PM	SiCl4 post valve closed
8/16/2011	12:29:58 PM	Main Vac valve closed
8/16/2011	12:29:58 PM	Bypass valve closed
8/16/2011	12:29:58 PM	H2 valve opened
8/16/2011	12:29:58 PM	Bubbler valve opened
8/16/2011	12:29:58 PM	Helium MFC set to  0.000000
8/16/2011	12:29:58 PM	H2 MFC set to  500.000000
8/16/2011	12:29:58 PM	BCl3 MFC set to  0.000000
8/16/2011	12:29:58 PM	PHl3 MFC set to  0.000000
8/16/2011	12:29:58 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:29:58 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:29:58 PM	Tube furnace set to 0
8/16/2011	12:29:59 PM	Helium valve closed
8/16/2011	12:29:59 PM	BCl3 valve closed
8/16/2011	12:29:59 PM	PH3 valve closed
8/16/2011	12:29:59 PM	SiCl4 pre valve closed
8/16/2011	12:29:59 PM	SiCl4 post valve closed
8/16/2011	12:29:59 PM	Main Vac valve closed
8/16/2011	12:29:59 PM	Bypass valve closed
8/16/2011	12:29:59 PM	H2 valve opened
8/16/2011	12:29:59 PM	Bubbler valve opened
8/16/2011	12:29:59 PM	Helium MFC set to  0.000000
8/16/2011	12:29:59 PM	H2 MFC set to  500.000000
8/16/2011	12:29:59 PM	BCl3 MFC set to  0.000000
8/16/2011	12:29:59 PM	PHl3 MFC set to  0.000000
8/16/2011	12:29:59 PM	SiCl4 MFC set to  0.000000
8/16/2011	12:29:59 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:29:59 PM	Tube furnace set to 1040
8/16/2011	12:49:59 PM	Helium valve closed
8/16/2011	12:49:59 PM	PH3 valve closed
8/16/2011	12:49:59 PM	Main Vac valve closed
8/16/2011	12:49:59 PM	Bypass valve closed
8/16/2011	12:49:59 PM	H2 valve opened
8/16/2011	12:49:59 PM	BCl3 valve opened
8/16/2011	12:49:59 PM	SiCl4 pre valve opened
8/16/2011	12:49:59 PM	SiCl4 post valve opened
8/16/2011	12:49:59 PM	Bubbler valve opened
8/16/2011	12:49:59 PM	Helium MFC set to  0.000000
8/16/2011	12:49:59 PM	H2 MFC set to  500.000000
8/16/2011	12:49:59 PM	BCl3 MFC set to  2.200000
8/16/2011	12:49:59 PM	PHl3 MFC set to  0.000000
8/16/2011	12:49:59 PM	SiCl4 MFC set to  50.000000
8/16/2011	12:49:59 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	12:49:59 PM	Tube furnace set to 1040
8/16/2011	1:05:59 PM	Helium valve closed
8/16/2011	1:05:59 PM	BCl3 valve closed
8/16/2011	1:05:59 PM	PH3 valve closed
8/16/2011	1:05:59 PM	SiCl4 pre valve closed
8/16/2011	1:05:59 PM	SiCl4 post valve closed
8/16/2011	1:05:59 PM	Main Vac valve closed
8/16/2011	1:05:59 PM	Bypass valve closed
8/16/2011	1:05:59 PM	H2 valve opened
8/16/2011	1:05:59 PM	Bubbler valve opened
8/16/2011	1:05:59 PM	Helium MFC set to  0.000000
8/16/2011	1:05:59 PM	H2 MFC set to  500.000000
8/16/2011	1:05:59 PM	BCl3 MFC set to  0.000000
8/16/2011	1:05:59 PM	PHl3 MFC set to  0.000000
8/16/2011	1:05:59 PM	SiCl4 MFC set to  0.000000
8/16/2011	1:05:59 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	1:05:59 PM	Tube furnace set to 750
8/16/2011	1:10:59 PM	H2 valve closed
8/16/2011	1:10:59 PM	BCl3 valve closed
8/16/2011	1:10:59 PM	PH3 valve closed
8/16/2011	1:10:59 PM	SiCl4 pre valve closed
8/16/2011	1:10:59 PM	SiCl4 post valve closed
8/16/2011	1:10:59 PM	Main Vac valve closed
8/16/2011	1:10:59 PM	Bypass valve closed
8/16/2011	1:10:59 PM	Helium valve opened
8/16/2011	1:10:59 PM	Bubbler valve opened
8/16/2011	1:10:59 PM	Helium MFC set to  500.000000
8/16/2011	1:10:59 PM	H2 MFC set to  0.000000
8/16/2011	1:10:59 PM	BCl3 MFC set to  0.000000
8/16/2011	1:10:59 PM	PHl3 MFC set to  0.000000
8/16/2011	1:10:59 PM	SiCl4 MFC set to  0.000000
8/16/2011	1:10:59 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	1:11:00 PM	Tube furnace set to 0
8/16/2011	1:31:00 PM	Helium valve closed
8/16/2011	1:31:00 PM	H2 valve closed
8/16/2011	1:31:00 PM	BCl3 valve closed
8/16/2011	1:31:00 PM	PH3 valve closed
8/16/2011	1:31:00 PM	SiCl4 pre valve closed
8/16/2011	1:31:00 PM	SiCl4 post valve closed
8/16/2011	1:31:00 PM	Main Vac valve closed
8/16/2011	1:31:00 PM	Bypass valve closed
8/16/2011	1:31:00 PM	Bubbler valve closed
8/16/2011	1:31:00 PM	Helium MFC set to  0.000000
8/16/2011	1:31:00 PM	H2 MFC set to  0.000000
8/16/2011	1:31:00 PM	BCl3 MFC set to  0.000000
8/16/2011	1:31:00 PM	PHl3 MFC set to  0.000000
8/16/2011	1:31:00 PM	SiCl4 MFC set to  0.000000
8/16/2011	1:31:00 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	1:31:00 PM	Tube furnace set to 0
8/16/2011	1:31:01 PM	Run finished at 1:31 PM
8/16/2011	3:47:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/16/2011	3:47:09 PM	Recipe started at 3:47 PM
8/16/2011	3:47:09 PM	Helium valve closed
8/16/2011	3:47:09 PM	H2 valve closed
8/16/2011	3:47:09 PM	BCl3 valve closed
8/16/2011	3:47:09 PM	PH3 valve closed
8/16/2011	3:47:09 PM	SiCl4 pre valve closed
8/16/2011	3:47:09 PM	SiCl4 post valve closed
8/16/2011	3:47:09 PM	Main Vac valve closed
8/16/2011	3:47:09 PM	Bypass valve closed
8/16/2011	3:47:09 PM	Bubbler valve closed
8/16/2011	3:47:09 PM	Helium MFC set to  0.000000
8/16/2011	3:47:09 PM	H2 MFC set to  0.000000
8/16/2011	3:47:09 PM	BCl3 MFC set to  0.000000
8/16/2011	3:47:09 PM	PHl3 MFC set to  0.000000
8/16/2011	3:47:09 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:47:09 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:47:09 PM	Tube furnace set to 0
8/16/2011	3:47:13 PM	H2 valve closed
8/16/2011	3:47:13 PM	BCl3 valve closed
8/16/2011	3:47:13 PM	PH3 valve closed
8/16/2011	3:47:13 PM	SiCl4 pre valve closed
8/16/2011	3:47:13 PM	SiCl4 post valve closed
8/16/2011	3:47:13 PM	Main Vac valve closed
8/16/2011	3:47:13 PM	Bypass valve closed
8/16/2011	3:47:13 PM	Bubbler valve closed
8/16/2011	3:47:13 PM	Helium valve opened
8/16/2011	3:47:13 PM	Helium MFC set to  500.000000
8/16/2011	3:47:13 PM	H2 MFC set to  0.000000
8/16/2011	3:47:13 PM	BCl3 MFC set to  0.000000
8/16/2011	3:47:13 PM	PHl3 MFC set to  0.000000
8/16/2011	3:47:13 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:47:13 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:47:13 PM	Tube furnace set to 0
8/16/2011	3:47:19 PM	Helium valve closed
8/16/2011	3:47:19 PM	H2 valve closed
8/16/2011	3:47:19 PM	BCl3 valve closed
8/16/2011	3:47:19 PM	PH3 valve closed
8/16/2011	3:47:19 PM	SiCl4 pre valve closed
8/16/2011	3:47:19 PM	SiCl4 post valve closed
8/16/2011	3:47:19 PM	Main Vac valve closed
8/16/2011	3:47:19 PM	Bypass valve closed
8/16/2011	3:47:19 PM	Bubbler valve closed
8/16/2011	3:47:19 PM	Helium MFC set to  0.000000
8/16/2011	3:47:19 PM	H2 MFC set to  0.000000
8/16/2011	3:47:19 PM	BCl3 MFC set to  0.000000
8/16/2011	3:47:19 PM	PHl3 MFC set to  0.000000
8/16/2011	3:47:19 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:47:19 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:47:19 PM	Tube furnace set to 0
8/16/2011	3:47:20 PM	Run finished at 3:47 PM
8/16/2011	3:47:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/16/2011	3:49:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	3:49:56 PM	Recipe started at 3:49 PM
8/16/2011	3:49:56 PM	Helium valve closed
8/16/2011	3:49:56 PM	H2 valve closed
8/16/2011	3:49:56 PM	BCl3 valve closed
8/16/2011	3:49:56 PM	PH3 valve closed
8/16/2011	3:49:56 PM	SiCl4 pre valve closed
8/16/2011	3:49:56 PM	SiCl4 post valve closed
8/16/2011	3:49:56 PM	Main Vac valve closed
8/16/2011	3:49:56 PM	Bubbler valve closed
8/16/2011	3:49:56 PM	Bypass valve opened
8/16/2011	3:49:56 PM	Helium MFC set to  0.000000
8/16/2011	3:49:56 PM	H2 MFC set to  0.000000
8/16/2011	3:49:56 PM	BCl3 MFC set to  0.000000
8/16/2011	3:49:56 PM	PHl3 MFC set to  0.000000
8/16/2011	3:49:56 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:49:56 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:49:57 PM	Tube furnace set to 0
8/16/2011	3:51:05 PM	Helium valve closed
8/16/2011	3:51:05 PM	H2 valve closed
8/16/2011	3:51:05 PM	BCl3 valve closed
8/16/2011	3:51:05 PM	PH3 valve closed
8/16/2011	3:51:05 PM	SiCl4 pre valve closed
8/16/2011	3:51:05 PM	SiCl4 post valve closed
8/16/2011	3:51:05 PM	Main Vac valve closed
8/16/2011	3:51:05 PM	Bubbler valve closed
8/16/2011	3:51:05 PM	Bypass valve opened
8/16/2011	3:51:05 PM	Helium MFC set to  0.000000
8/16/2011	3:51:05 PM	H2 MFC set to  0.000000
8/16/2011	3:51:05 PM	BCl3 MFC set to  0.000000
8/16/2011	3:51:05 PM	PHl3 MFC set to  0.000000
8/16/2011	3:51:05 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:51:05 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:51:05 PM	Tube furnace set to 0
8/16/2011	3:52:05 PM	Helium valve closed
8/16/2011	3:52:05 PM	H2 valve closed
8/16/2011	3:52:05 PM	BCl3 valve closed
8/16/2011	3:52:05 PM	PH3 valve closed
8/16/2011	3:52:05 PM	SiCl4 pre valve closed
8/16/2011	3:52:05 PM	SiCl4 post valve closed
8/16/2011	3:52:05 PM	Bypass valve closed
8/16/2011	3:52:05 PM	Bubbler valve closed
8/16/2011	3:52:05 PM	Main Vac valve opened
8/16/2011	3:52:05 PM	Helium MFC set to  0.000000
8/16/2011	3:52:05 PM	H2 MFC set to  0.000000
8/16/2011	3:52:05 PM	BCl3 MFC set to  0.000000
8/16/2011	3:52:05 PM	PHl3 MFC set to  0.000000
8/16/2011	3:52:05 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:52:05 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:52:05 PM	Tube furnace set to 0
8/16/2011	3:52:06 PM	Run finished at 3:52 PM
8/16/2011	3:52:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	3:58:05 PM	Recipe started at 3:57 PM
8/16/2011	3:58:05 PM	Helium valve closed
8/16/2011	3:58:05 PM	H2 valve closed
8/16/2011	3:58:05 PM	BCl3 valve closed
8/16/2011	3:58:05 PM	PH3 valve closed
8/16/2011	3:58:05 PM	SiCl4 pre valve closed
8/16/2011	3:58:05 PM	SiCl4 post valve closed
8/16/2011	3:58:05 PM	Bypass valve closed
8/16/2011	3:58:05 PM	Bubbler valve closed
8/16/2011	3:58:05 PM	Main Vac valve opened
8/16/2011	3:58:05 PM	Helium MFC set to  0.000000
8/16/2011	3:58:05 PM	H2 MFC set to  0.000000
8/16/2011	3:58:05 PM	BCl3 MFC set to  0.000000
8/16/2011	3:58:05 PM	PHl3 MFC set to  0.000000
8/16/2011	3:58:05 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:58:05 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:58:05 PM	Tube furnace set to 0
8/16/2011	3:58:35 PM	H2 valve closed
8/16/2011	3:58:35 PM	BCl3 valve closed
8/16/2011	3:58:35 PM	PH3 valve closed
8/16/2011	3:58:35 PM	SiCl4 pre valve closed
8/16/2011	3:58:35 PM	SiCl4 post valve closed
8/16/2011	3:58:35 PM	Bypass valve closed
8/16/2011	3:58:35 PM	Bubbler valve closed
8/16/2011	3:58:35 PM	Helium valve opened
8/16/2011	3:58:35 PM	Main Vac valve opened
8/16/2011	3:58:35 PM	Helium MFC set to  20.000000
8/16/2011	3:58:35 PM	H2 MFC set to  0.000000
8/16/2011	3:58:35 PM	BCl3 MFC set to  0.000000
8/16/2011	3:58:35 PM	PHl3 MFC set to  0.000000
8/16/2011	3:58:35 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:58:35 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:58:35 PM	Tube furnace set to 0
8/16/2011	3:59:05 PM	Helium valve closed
8/16/2011	3:59:05 PM	H2 valve closed
8/16/2011	3:59:05 PM	BCl3 valve closed
8/16/2011	3:59:05 PM	PH3 valve closed
8/16/2011	3:59:05 PM	SiCl4 pre valve closed
8/16/2011	3:59:05 PM	SiCl4 post valve closed
8/16/2011	3:59:05 PM	Bypass valve closed
8/16/2011	3:59:05 PM	Bubbler valve closed
8/16/2011	3:59:05 PM	Main Vac valve opened
8/16/2011	3:59:05 PM	Helium MFC set to  0.000000
8/16/2011	3:59:05 PM	H2 MFC set to  0.000000
8/16/2011	3:59:05 PM	BCl3 MFC set to  0.000000
8/16/2011	3:59:05 PM	PHl3 MFC set to  0.000000
8/16/2011	3:59:05 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:59:05 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:59:05 PM	Tube furnace set to 0
8/16/2011	3:59:35 PM	H2 valve closed
8/16/2011	3:59:35 PM	BCl3 valve closed
8/16/2011	3:59:35 PM	PH3 valve closed
8/16/2011	3:59:35 PM	SiCl4 pre valve closed
8/16/2011	3:59:35 PM	SiCl4 post valve closed
8/16/2011	3:59:35 PM	Bypass valve closed
8/16/2011	3:59:35 PM	Bubbler valve closed
8/16/2011	3:59:35 PM	Helium valve opened
8/16/2011	3:59:35 PM	Main Vac valve opened
8/16/2011	3:59:35 PM	Helium MFC set to  20.000000
8/16/2011	3:59:35 PM	H2 MFC set to  0.000000
8/16/2011	3:59:35 PM	BCl3 MFC set to  0.000000
8/16/2011	3:59:35 PM	PHl3 MFC set to  0.000000
8/16/2011	3:59:35 PM	SiCl4 MFC set to  0.000000
8/16/2011	3:59:35 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	3:59:36 PM	Tube furnace set to 0
8/16/2011	4:00:06 PM	Helium valve closed
8/16/2011	4:00:06 PM	H2 valve closed
8/16/2011	4:00:06 PM	BCl3 valve closed
8/16/2011	4:00:06 PM	PH3 valve closed
8/16/2011	4:00:06 PM	SiCl4 pre valve closed
8/16/2011	4:00:06 PM	SiCl4 post valve closed
8/16/2011	4:00:06 PM	Bypass valve closed
8/16/2011	4:00:06 PM	Bubbler valve closed
8/16/2011	4:00:06 PM	Main Vac valve opened
8/16/2011	4:00:06 PM	Helium MFC set to  0.000000
8/16/2011	4:00:06 PM	H2 MFC set to  0.000000
8/16/2011	4:00:06 PM	BCl3 MFC set to  0.000000
8/16/2011	4:00:06 PM	PHl3 MFC set to  0.000000
8/16/2011	4:00:06 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:00:06 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:00:06 PM	Tube furnace set to 0
8/16/2011	4:00:36 PM	H2 valve closed
8/16/2011	4:00:36 PM	BCl3 valve closed
8/16/2011	4:00:36 PM	PH3 valve closed
8/16/2011	4:00:36 PM	SiCl4 pre valve closed
8/16/2011	4:00:36 PM	SiCl4 post valve closed
8/16/2011	4:00:36 PM	Bypass valve closed
8/16/2011	4:00:36 PM	Bubbler valve closed
8/16/2011	4:00:36 PM	Helium valve opened
8/16/2011	4:00:36 PM	Main Vac valve opened
8/16/2011	4:00:36 PM	Helium MFC set to  20.000000
8/16/2011	4:00:36 PM	H2 MFC set to  0.000000
8/16/2011	4:00:36 PM	BCl3 MFC set to  0.000000
8/16/2011	4:00:36 PM	PHl3 MFC set to  0.000000
8/16/2011	4:00:36 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:00:36 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:00:36 PM	Tube furnace set to 0
8/16/2011	4:01:06 PM	Helium valve closed
8/16/2011	4:01:06 PM	H2 valve closed
8/16/2011	4:01:06 PM	BCl3 valve closed
8/16/2011	4:01:06 PM	PH3 valve closed
8/16/2011	4:01:06 PM	SiCl4 pre valve closed
8/16/2011	4:01:06 PM	SiCl4 post valve closed
8/16/2011	4:01:06 PM	Bypass valve closed
8/16/2011	4:01:06 PM	Bubbler valve closed
8/16/2011	4:01:06 PM	Main Vac valve opened
8/16/2011	4:01:06 PM	Helium MFC set to  0.000000
8/16/2011	4:01:06 PM	H2 MFC set to  0.000000
8/16/2011	4:01:06 PM	BCl3 MFC set to  0.000000
8/16/2011	4:01:06 PM	PHl3 MFC set to  0.000000
8/16/2011	4:01:06 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:01:06 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:01:06 PM	Tube furnace set to 0
8/16/2011	4:01:36 PM	H2 valve closed
8/16/2011	4:01:36 PM	BCl3 valve closed
8/16/2011	4:01:36 PM	PH3 valve closed
8/16/2011	4:01:36 PM	SiCl4 pre valve closed
8/16/2011	4:01:36 PM	SiCl4 post valve closed
8/16/2011	4:01:36 PM	Bypass valve closed
8/16/2011	4:01:36 PM	Bubbler valve closed
8/16/2011	4:01:36 PM	Helium valve opened
8/16/2011	4:01:36 PM	Main Vac valve opened
8/16/2011	4:01:36 PM	Helium MFC set to  20.000000
8/16/2011	4:01:36 PM	H2 MFC set to  0.000000
8/16/2011	4:01:36 PM	BCl3 MFC set to  0.000000
8/16/2011	4:01:36 PM	PHl3 MFC set to  0.000000
8/16/2011	4:01:36 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:01:36 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:01:36 PM	Tube furnace set to 0
8/16/2011	4:02:06 PM	Helium valve closed
8/16/2011	4:02:06 PM	H2 valve closed
8/16/2011	4:02:06 PM	BCl3 valve closed
8/16/2011	4:02:06 PM	PH3 valve closed
8/16/2011	4:02:06 PM	SiCl4 pre valve closed
8/16/2011	4:02:06 PM	SiCl4 post valve closed
8/16/2011	4:02:06 PM	Bypass valve closed
8/16/2011	4:02:06 PM	Bubbler valve closed
8/16/2011	4:02:06 PM	Main Vac valve opened
8/16/2011	4:02:06 PM	Helium MFC set to  0.000000
8/16/2011	4:02:06 PM	H2 MFC set to  0.000000
8/16/2011	4:02:06 PM	BCl3 MFC set to  0.000000
8/16/2011	4:02:06 PM	PHl3 MFC set to  0.000000
8/16/2011	4:02:06 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:02:06 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:02:07 PM	Tube furnace set to 0
8/16/2011	4:02:37 PM	H2 valve closed
8/16/2011	4:02:37 PM	BCl3 valve closed
8/16/2011	4:02:37 PM	PH3 valve closed
8/16/2011	4:02:37 PM	SiCl4 pre valve closed
8/16/2011	4:02:37 PM	SiCl4 post valve closed
8/16/2011	4:02:37 PM	Bypass valve closed
8/16/2011	4:02:37 PM	Bubbler valve closed
8/16/2011	4:02:37 PM	Helium valve opened
8/16/2011	4:02:37 PM	Main Vac valve opened
8/16/2011	4:02:37 PM	Helium MFC set to  20.000000
8/16/2011	4:02:37 PM	H2 MFC set to  0.000000
8/16/2011	4:02:37 PM	BCl3 MFC set to  0.000000
8/16/2011	4:02:37 PM	PHl3 MFC set to  0.000000
8/16/2011	4:02:37 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:02:37 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:02:37 PM	Tube furnace set to 0
8/16/2011	4:03:07 PM	Helium valve closed
8/16/2011	4:03:07 PM	H2 valve closed
8/16/2011	4:03:07 PM	BCl3 valve closed
8/16/2011	4:03:07 PM	PH3 valve closed
8/16/2011	4:03:07 PM	SiCl4 pre valve closed
8/16/2011	4:03:07 PM	SiCl4 post valve closed
8/16/2011	4:03:07 PM	Bypass valve closed
8/16/2011	4:03:07 PM	Bubbler valve closed
8/16/2011	4:03:07 PM	Main Vac valve opened
8/16/2011	4:03:07 PM	Helium MFC set to  0.000000
8/16/2011	4:03:07 PM	H2 MFC set to  0.000000
8/16/2011	4:03:07 PM	BCl3 MFC set to  0.000000
8/16/2011	4:03:07 PM	PHl3 MFC set to  0.000000
8/16/2011	4:03:07 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:03:07 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:03:07 PM	Tube furnace set to 0
8/16/2011	4:03:37 PM	H2 valve closed
8/16/2011	4:03:37 PM	BCl3 valve closed
8/16/2011	4:03:37 PM	PH3 valve closed
8/16/2011	4:03:37 PM	SiCl4 pre valve closed
8/16/2011	4:03:37 PM	SiCl4 post valve closed
8/16/2011	4:03:37 PM	Bypass valve closed
8/16/2011	4:03:37 PM	Bubbler valve closed
8/16/2011	4:03:37 PM	Helium valve opened
8/16/2011	4:03:37 PM	Main Vac valve opened
8/16/2011	4:03:37 PM	Helium MFC set to  20.000000
8/16/2011	4:03:37 PM	H2 MFC set to  0.000000
8/16/2011	4:03:37 PM	BCl3 MFC set to  0.000000
8/16/2011	4:03:37 PM	PHl3 MFC set to  0.000000
8/16/2011	4:03:37 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:03:37 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:03:37 PM	Tube furnace set to 0
8/16/2011	4:04:07 PM	Helium valve closed
8/16/2011	4:04:07 PM	H2 valve closed
8/16/2011	4:04:07 PM	BCl3 valve closed
8/16/2011	4:04:07 PM	PH3 valve closed
8/16/2011	4:04:07 PM	SiCl4 pre valve closed
8/16/2011	4:04:07 PM	SiCl4 post valve closed
8/16/2011	4:04:07 PM	Bypass valve closed
8/16/2011	4:04:07 PM	Bubbler valve closed
8/16/2011	4:04:07 PM	Main Vac valve opened
8/16/2011	4:04:07 PM	Helium MFC set to  0.000000
8/16/2011	4:04:07 PM	H2 MFC set to  0.000000
8/16/2011	4:04:07 PM	BCl3 MFC set to  0.000000
8/16/2011	4:04:07 PM	PHl3 MFC set to  0.000000
8/16/2011	4:04:07 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:04:07 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:04:07 PM	Tube furnace set to 0
8/16/2011	4:04:37 PM	H2 valve closed
8/16/2011	4:04:37 PM	BCl3 valve closed
8/16/2011	4:04:37 PM	PH3 valve closed
8/16/2011	4:04:37 PM	SiCl4 pre valve closed
8/16/2011	4:04:37 PM	SiCl4 post valve closed
8/16/2011	4:04:37 PM	Bypass valve closed
8/16/2011	4:04:37 PM	Bubbler valve closed
8/16/2011	4:04:37 PM	Helium valve opened
8/16/2011	4:04:37 PM	Main Vac valve opened
8/16/2011	4:04:37 PM	Helium MFC set to  20.000000
8/16/2011	4:04:37 PM	H2 MFC set to  0.000000
8/16/2011	4:04:37 PM	BCl3 MFC set to  0.000000
8/16/2011	4:04:37 PM	PHl3 MFC set to  0.000000
8/16/2011	4:04:37 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:04:37 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:04:37 PM	Tube furnace set to 0
8/16/2011	4:05:08 PM	Helium valve closed
8/16/2011	4:05:08 PM	H2 valve closed
8/16/2011	4:05:08 PM	BCl3 valve closed
8/16/2011	4:05:08 PM	PH3 valve closed
8/16/2011	4:05:08 PM	SiCl4 pre valve closed
8/16/2011	4:05:08 PM	SiCl4 post valve closed
8/16/2011	4:05:08 PM	Bypass valve closed
8/16/2011	4:05:08 PM	Bubbler valve closed
8/16/2011	4:05:08 PM	Main Vac valve opened
8/16/2011	4:05:08 PM	Helium MFC set to  0.000000
8/16/2011	4:05:08 PM	H2 MFC set to  0.000000
8/16/2011	4:05:08 PM	BCl3 MFC set to  0.000000
8/16/2011	4:05:08 PM	PHl3 MFC set to  0.000000
8/16/2011	4:05:08 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:05:08 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:05:08 PM	Tube furnace set to 0
8/16/2011	4:05:38 PM	H2 valve closed
8/16/2011	4:05:38 PM	BCl3 valve closed
8/16/2011	4:05:38 PM	PH3 valve closed
8/16/2011	4:05:38 PM	SiCl4 pre valve closed
8/16/2011	4:05:38 PM	SiCl4 post valve closed
8/16/2011	4:05:38 PM	Bypass valve closed
8/16/2011	4:05:38 PM	Bubbler valve closed
8/16/2011	4:05:38 PM	Helium valve opened
8/16/2011	4:05:38 PM	Main Vac valve opened
8/16/2011	4:05:38 PM	Helium MFC set to  20.000000
8/16/2011	4:05:38 PM	H2 MFC set to  0.000000
8/16/2011	4:05:38 PM	BCl3 MFC set to  0.000000
8/16/2011	4:05:38 PM	PHl3 MFC set to  0.000000
8/16/2011	4:05:38 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:05:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:05:38 PM	Tube furnace set to 0
8/16/2011	4:06:08 PM	Helium valve closed
8/16/2011	4:06:08 PM	H2 valve closed
8/16/2011	4:06:08 PM	BCl3 valve closed
8/16/2011	4:06:08 PM	PH3 valve closed
8/16/2011	4:06:08 PM	SiCl4 pre valve closed
8/16/2011	4:06:08 PM	SiCl4 post valve closed
8/16/2011	4:06:08 PM	Bypass valve closed
8/16/2011	4:06:08 PM	Bubbler valve closed
8/16/2011	4:06:08 PM	Main Vac valve opened
8/16/2011	4:06:08 PM	Helium MFC set to  0.000000
8/16/2011	4:06:08 PM	H2 MFC set to  0.000000
8/16/2011	4:06:08 PM	BCl3 MFC set to  0.000000
8/16/2011	4:06:08 PM	PHl3 MFC set to  0.000000
8/16/2011	4:06:08 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:06:08 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:06:08 PM	Tube furnace set to 0
8/16/2011	4:06:38 PM	H2 valve closed
8/16/2011	4:06:38 PM	BCl3 valve closed
8/16/2011	4:06:38 PM	PH3 valve closed
8/16/2011	4:06:38 PM	SiCl4 pre valve closed
8/16/2011	4:06:38 PM	SiCl4 post valve closed
8/16/2011	4:06:38 PM	Bypass valve closed
8/16/2011	4:06:38 PM	Bubbler valve closed
8/16/2011	4:06:38 PM	Helium valve opened
8/16/2011	4:06:38 PM	Main Vac valve opened
8/16/2011	4:06:38 PM	Helium MFC set to  20.000000
8/16/2011	4:06:38 PM	H2 MFC set to  0.000000
8/16/2011	4:06:38 PM	BCl3 MFC set to  0.000000
8/16/2011	4:06:38 PM	PHl3 MFC set to  0.000000
8/16/2011	4:06:38 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:06:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:06:38 PM	Tube furnace set to 0
8/16/2011	4:07:08 PM	Helium valve closed
8/16/2011	4:07:08 PM	H2 valve closed
8/16/2011	4:07:08 PM	BCl3 valve closed
8/16/2011	4:07:08 PM	PH3 valve closed
8/16/2011	4:07:08 PM	SiCl4 pre valve closed
8/16/2011	4:07:08 PM	SiCl4 post valve closed
8/16/2011	4:07:08 PM	Bypass valve closed
8/16/2011	4:07:08 PM	Bubbler valve closed
8/16/2011	4:07:08 PM	Main Vac valve opened
8/16/2011	4:07:08 PM	Helium MFC set to  0.000000
8/16/2011	4:07:08 PM	H2 MFC set to  0.000000
8/16/2011	4:07:08 PM	BCl3 MFC set to  0.000000
8/16/2011	4:07:08 PM	PHl3 MFC set to  0.000000
8/16/2011	4:07:08 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:07:08 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:07:08 PM	Tube furnace set to 200
8/16/2011	4:07:38 PM	H2 valve closed
8/16/2011	4:07:39 PM	BCl3 valve closed
8/16/2011	4:07:39 PM	PH3 valve closed
8/16/2011	4:07:39 PM	SiCl4 pre valve closed
8/16/2011	4:07:39 PM	SiCl4 post valve closed
8/16/2011	4:07:39 PM	Bypass valve closed
8/16/2011	4:07:39 PM	Bubbler valve closed
8/16/2011	4:07:39 PM	Helium valve opened
8/16/2011	4:07:39 PM	Main Vac valve opened
8/16/2011	4:07:39 PM	Helium MFC set to  20.000000
8/16/2011	4:07:39 PM	H2 MFC set to  0.000000
8/16/2011	4:07:39 PM	BCl3 MFC set to  0.000000
8/16/2011	4:07:39 PM	PHl3 MFC set to  0.000000
8/16/2011	4:07:39 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:07:39 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:07:39 PM	Tube furnace set to 200
8/16/2011	4:08:09 PM	Helium valve closed
8/16/2011	4:08:09 PM	H2 valve closed
8/16/2011	4:08:09 PM	BCl3 valve closed
8/16/2011	4:08:09 PM	PH3 valve closed
8/16/2011	4:08:09 PM	SiCl4 pre valve closed
8/16/2011	4:08:09 PM	SiCl4 post valve closed
8/16/2011	4:08:09 PM	Bypass valve closed
8/16/2011	4:08:09 PM	Bubbler valve closed
8/16/2011	4:08:09 PM	Main Vac valve opened
8/16/2011	4:08:09 PM	Helium MFC set to  0.000000
8/16/2011	4:08:09 PM	H2 MFC set to  0.000000
8/16/2011	4:08:09 PM	BCl3 MFC set to  0.000000
8/16/2011	4:08:09 PM	PHl3 MFC set to  0.000000
8/16/2011	4:08:09 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:08:09 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:08:09 PM	Tube furnace set to 200
8/16/2011	4:08:39 PM	H2 valve closed
8/16/2011	4:08:39 PM	BCl3 valve closed
8/16/2011	4:08:39 PM	PH3 valve closed
8/16/2011	4:08:39 PM	SiCl4 pre valve closed
8/16/2011	4:08:39 PM	SiCl4 post valve closed
8/16/2011	4:08:39 PM	Bypass valve closed
8/16/2011	4:08:39 PM	Bubbler valve closed
8/16/2011	4:08:39 PM	Helium valve opened
8/16/2011	4:08:39 PM	Main Vac valve opened
8/16/2011	4:08:39 PM	Helium MFC set to  20.000000
8/16/2011	4:08:39 PM	H2 MFC set to  0.000000
8/16/2011	4:08:39 PM	BCl3 MFC set to  0.000000
8/16/2011	4:08:39 PM	PHl3 MFC set to  0.000000
8/16/2011	4:08:39 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:08:39 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:08:39 PM	Tube furnace set to 200
8/16/2011	4:09:09 PM	Helium valve closed
8/16/2011	4:09:09 PM	H2 valve closed
8/16/2011	4:09:09 PM	BCl3 valve closed
8/16/2011	4:09:09 PM	PH3 valve closed
8/16/2011	4:09:09 PM	SiCl4 pre valve closed
8/16/2011	4:09:09 PM	SiCl4 post valve closed
8/16/2011	4:09:09 PM	Bypass valve closed
8/16/2011	4:09:09 PM	Bubbler valve closed
8/16/2011	4:09:09 PM	Main Vac valve opened
8/16/2011	4:09:09 PM	Helium MFC set to  0.000000
8/16/2011	4:09:09 PM	H2 MFC set to  0.000000
8/16/2011	4:09:09 PM	BCl3 MFC set to  0.000000
8/16/2011	4:09:09 PM	PHl3 MFC set to  0.000000
8/16/2011	4:09:09 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:09:09 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:09:09 PM	Tube furnace set to 200
8/16/2011	4:09:39 PM	H2 valve closed
8/16/2011	4:09:39 PM	BCl3 valve closed
8/16/2011	4:09:39 PM	PH3 valve closed
8/16/2011	4:09:39 PM	SiCl4 pre valve closed
8/16/2011	4:09:39 PM	SiCl4 post valve closed
8/16/2011	4:09:39 PM	Bypass valve closed
8/16/2011	4:09:39 PM	Bubbler valve closed
8/16/2011	4:09:39 PM	Helium valve opened
8/16/2011	4:09:39 PM	Main Vac valve opened
8/16/2011	4:09:39 PM	Helium MFC set to  20.000000
8/16/2011	4:09:39 PM	H2 MFC set to  0.000000
8/16/2011	4:09:39 PM	BCl3 MFC set to  0.000000
8/16/2011	4:09:39 PM	PHl3 MFC set to  0.000000
8/16/2011	4:09:39 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:09:39 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:09:39 PM	Tube furnace set to 200
8/16/2011	4:10:09 PM	Helium valve closed
8/16/2011	4:10:09 PM	H2 valve closed
8/16/2011	4:10:09 PM	BCl3 valve closed
8/16/2011	4:10:09 PM	PH3 valve closed
8/16/2011	4:10:09 PM	SiCl4 pre valve closed
8/16/2011	4:10:09 PM	SiCl4 post valve closed
8/16/2011	4:10:09 PM	Bypass valve closed
8/16/2011	4:10:10 PM	Bubbler valve closed
8/16/2011	4:10:10 PM	Main Vac valve opened
8/16/2011	4:10:10 PM	Helium MFC set to  0.000000
8/16/2011	4:10:10 PM	H2 MFC set to  0.000000
8/16/2011	4:10:10 PM	BCl3 MFC set to  0.000000
8/16/2011	4:10:10 PM	PHl3 MFC set to  0.000000
8/16/2011	4:10:10 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:10:10 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:10:10 PM	Tube furnace set to 200
8/16/2011	4:10:40 PM	H2 valve closed
8/16/2011	4:10:40 PM	BCl3 valve closed
8/16/2011	4:10:40 PM	PH3 valve closed
8/16/2011	4:10:40 PM	SiCl4 pre valve closed
8/16/2011	4:10:40 PM	SiCl4 post valve closed
8/16/2011	4:10:40 PM	Bypass valve closed
8/16/2011	4:10:40 PM	Bubbler valve closed
8/16/2011	4:10:40 PM	Helium valve opened
8/16/2011	4:10:40 PM	Main Vac valve opened
8/16/2011	4:10:40 PM	Helium MFC set to  20.000000
8/16/2011	4:10:40 PM	H2 MFC set to  0.000000
8/16/2011	4:10:40 PM	BCl3 MFC set to  0.000000
8/16/2011	4:10:40 PM	PHl3 MFC set to  0.000000
8/16/2011	4:10:40 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:10:40 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:10:40 PM	Tube furnace set to 200
8/16/2011	4:11:10 PM	Helium valve closed
8/16/2011	4:11:10 PM	H2 valve closed
8/16/2011	4:11:10 PM	BCl3 valve closed
8/16/2011	4:11:10 PM	PH3 valve closed
8/16/2011	4:11:10 PM	SiCl4 pre valve closed
8/16/2011	4:11:10 PM	SiCl4 post valve closed
8/16/2011	4:11:10 PM	Bypass valve closed
8/16/2011	4:11:10 PM	Bubbler valve closed
8/16/2011	4:11:10 PM	Main Vac valve opened
8/16/2011	4:11:10 PM	Helium MFC set to  0.000000
8/16/2011	4:11:10 PM	H2 MFC set to  0.000000
8/16/2011	4:11:10 PM	BCl3 MFC set to  0.000000
8/16/2011	4:11:10 PM	PHl3 MFC set to  0.000000
8/16/2011	4:11:10 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:11:10 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:11:10 PM	Tube furnace set to 200
8/16/2011	4:11:40 PM	H2 valve closed
8/16/2011	4:11:40 PM	BCl3 valve closed
8/16/2011	4:11:40 PM	PH3 valve closed
8/16/2011	4:11:40 PM	SiCl4 pre valve closed
8/16/2011	4:11:40 PM	SiCl4 post valve closed
8/16/2011	4:11:40 PM	Bypass valve closed
8/16/2011	4:11:40 PM	Bubbler valve closed
8/16/2011	4:11:40 PM	Helium valve opened
8/16/2011	4:11:40 PM	Main Vac valve opened
8/16/2011	4:11:40 PM	Helium MFC set to  20.000000
8/16/2011	4:11:40 PM	H2 MFC set to  0.000000
8/16/2011	4:11:40 PM	BCl3 MFC set to  0.000000
8/16/2011	4:11:40 PM	PHl3 MFC set to  0.000000
8/16/2011	4:11:40 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:11:40 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:11:40 PM	Tube furnace set to 200
8/16/2011	4:12:10 PM	Helium valve closed
8/16/2011	4:12:10 PM	H2 valve closed
8/16/2011	4:12:10 PM	BCl3 valve closed
8/16/2011	4:12:10 PM	PH3 valve closed
8/16/2011	4:12:10 PM	SiCl4 pre valve closed
8/16/2011	4:12:10 PM	SiCl4 post valve closed
8/16/2011	4:12:10 PM	Bypass valve closed
8/16/2011	4:12:10 PM	Bubbler valve closed
8/16/2011	4:12:10 PM	Main Vac valve opened
8/16/2011	4:12:10 PM	Helium MFC set to  0.000000
8/16/2011	4:12:10 PM	H2 MFC set to  0.000000
8/16/2011	4:12:10 PM	BCl3 MFC set to  0.000000
8/16/2011	4:12:10 PM	PHl3 MFC set to  0.000000
8/16/2011	4:12:10 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:12:10 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:12:11 PM	Tube furnace set to 200
8/16/2011	4:12:41 PM	H2 valve closed
8/16/2011	4:12:41 PM	BCl3 valve closed
8/16/2011	4:12:41 PM	PH3 valve closed
8/16/2011	4:12:41 PM	SiCl4 pre valve closed
8/16/2011	4:12:41 PM	SiCl4 post valve closed
8/16/2011	4:12:41 PM	Bypass valve closed
8/16/2011	4:12:41 PM	Bubbler valve closed
8/16/2011	4:12:41 PM	Helium valve opened
8/16/2011	4:12:41 PM	Main Vac valve opened
8/16/2011	4:12:41 PM	Helium MFC set to  20.000000
8/16/2011	4:12:41 PM	H2 MFC set to  0.000000
8/16/2011	4:12:41 PM	BCl3 MFC set to  0.000000
8/16/2011	4:12:41 PM	PHl3 MFC set to  0.000000
8/16/2011	4:12:41 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:12:41 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:12:41 PM	Tube furnace set to 200
8/16/2011	4:13:11 PM	Helium valve closed
8/16/2011	4:13:11 PM	H2 valve closed
8/16/2011	4:13:11 PM	BCl3 valve closed
8/16/2011	4:13:11 PM	PH3 valve closed
8/16/2011	4:13:11 PM	SiCl4 pre valve closed
8/16/2011	4:13:11 PM	SiCl4 post valve closed
8/16/2011	4:13:11 PM	Bypass valve closed
8/16/2011	4:13:11 PM	Bubbler valve closed
8/16/2011	4:13:11 PM	Main Vac valve opened
8/16/2011	4:13:11 PM	Helium MFC set to  0.000000
8/16/2011	4:13:11 PM	H2 MFC set to  0.000000
8/16/2011	4:13:11 PM	BCl3 MFC set to  0.000000
8/16/2011	4:13:11 PM	PHl3 MFC set to  0.000000
8/16/2011	4:13:11 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:13:11 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:13:11 PM	Tube furnace set to 0
8/16/2011	4:13:12 PM	Run finished at 4:13 PM
8/16/2011	4:28:31 PM	Recipe started at 4:28 PM
8/16/2011	4:28:31 PM	Helium valve closed
8/16/2011	4:28:31 PM	H2 valve closed
8/16/2011	4:28:31 PM	BCl3 valve closed
8/16/2011	4:28:31 PM	PH3 valve closed
8/16/2011	4:28:31 PM	SiCl4 pre valve closed
8/16/2011	4:28:31 PM	SiCl4 post valve closed
8/16/2011	4:28:31 PM	Main Vac valve closed
8/16/2011	4:28:31 PM	Bypass valve closed
8/16/2011	4:28:31 PM	Bubbler valve closed
8/16/2011	4:28:31 PM	Helium MFC set to  0.000000
8/16/2011	4:28:31 PM	H2 MFC set to  0.000000
8/16/2011	4:28:31 PM	BCl3 MFC set to  0.000000
8/16/2011	4:28:31 PM	PHl3 MFC set to  0.000000
8/16/2011	4:28:31 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:28:31 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:28:31 PM	Tube furnace set to 0
8/16/2011	4:28:34 PM	Helium valve closed
8/16/2011	4:28:34 PM	BCl3 valve closed
8/16/2011	4:28:34 PM	PH3 valve closed
8/16/2011	4:28:34 PM	SiCl4 pre valve closed
8/16/2011	4:28:34 PM	SiCl4 post valve closed
8/16/2011	4:28:34 PM	Main Vac valve closed
8/16/2011	4:28:34 PM	Bypass valve closed
8/16/2011	4:28:34 PM	Bubbler valve closed
8/16/2011	4:28:34 PM	H2 valve opened
8/16/2011	4:28:34 PM	Helium MFC set to  0.000000
8/16/2011	4:28:34 PM	H2 MFC set to  500.000000
8/16/2011	4:28:34 PM	BCl3 MFC set to  0.000000
8/16/2011	4:28:34 PM	PHl3 MFC set to  0.000000
8/16/2011	4:28:34 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:28:34 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:28:34 PM	Tube furnace set to 0
8/16/2011	4:29:40 PM	Helium valve closed
8/16/2011	4:29:40 PM	BCl3 valve closed
8/16/2011	4:29:40 PM	PH3 valve closed
8/16/2011	4:29:40 PM	SiCl4 pre valve closed
8/16/2011	4:29:40 PM	SiCl4 post valve closed
8/16/2011	4:29:40 PM	Main Vac valve closed
8/16/2011	4:29:40 PM	Bypass valve closed
8/16/2011	4:29:40 PM	H2 valve opened
8/16/2011	4:29:40 PM	Bubbler valve opened
8/16/2011	4:29:40 PM	Helium MFC set to  0.000000
8/16/2011	4:29:40 PM	H2 MFC set to  500.000000
8/16/2011	4:29:40 PM	BCl3 MFC set to  0.000000
8/16/2011	4:29:40 PM	PHl3 MFC set to  0.000000
8/16/2011	4:29:40 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:29:40 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:29:40 PM	Tube furnace set to 0
8/16/2011	4:29:41 PM	Helium valve closed
8/16/2011	4:29:41 PM	BCl3 valve closed
8/16/2011	4:29:41 PM	PH3 valve closed
8/16/2011	4:29:41 PM	SiCl4 pre valve closed
8/16/2011	4:29:41 PM	SiCl4 post valve closed
8/16/2011	4:29:41 PM	Main Vac valve closed
8/16/2011	4:29:41 PM	Bypass valve closed
8/16/2011	4:29:41 PM	H2 valve opened
8/16/2011	4:29:41 PM	Bubbler valve opened
8/16/2011	4:29:41 PM	Helium MFC set to  0.000000
8/16/2011	4:29:41 PM	H2 MFC set to  500.000000
8/16/2011	4:29:41 PM	BCl3 MFC set to  0.000000
8/16/2011	4:29:41 PM	PHl3 MFC set to  0.000000
8/16/2011	4:29:41 PM	SiCl4 MFC set to  0.000000
8/16/2011	4:29:41 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:29:42 PM	Tube furnace set to 1000
8/16/2011	4:49:42 PM	Helium valve closed
8/16/2011	4:49:42 PM	PH3 valve closed
8/16/2011	4:49:42 PM	Main Vac valve closed
8/16/2011	4:49:42 PM	Bypass valve closed
8/16/2011	4:49:42 PM	H2 valve opened
8/16/2011	4:49:42 PM	BCl3 valve opened
8/16/2011	4:49:42 PM	SiCl4 pre valve opened
8/16/2011	4:49:42 PM	SiCl4 post valve opened
8/16/2011	4:49:42 PM	Bubbler valve opened
8/16/2011	4:49:42 PM	Helium MFC set to  0.000000
8/16/2011	4:49:42 PM	H2 MFC set to  500.000000
8/16/2011	4:49:42 PM	BCl3 MFC set to  2.200000
8/16/2011	4:49:42 PM	PHl3 MFC set to  0.000000
8/16/2011	4:49:42 PM	SiCl4 MFC set to  50.000000
8/16/2011	4:49:42 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	4:49:42 PM	Tube furnace set to 1000
8/16/2011	5:01:42 PM	Helium valve closed
8/16/2011	5:01:42 PM	BCl3 valve closed
8/16/2011	5:01:42 PM	PH3 valve closed
8/16/2011	5:01:42 PM	SiCl4 pre valve closed
8/16/2011	5:01:42 PM	SiCl4 post valve closed
8/16/2011	5:01:42 PM	Main Vac valve closed
8/16/2011	5:01:42 PM	Bypass valve closed
8/16/2011	5:01:42 PM	H2 valve opened
8/16/2011	5:01:42 PM	Bubbler valve opened
8/16/2011	5:01:42 PM	Helium MFC set to  0.000000
8/16/2011	5:01:42 PM	H2 MFC set to  500.000000
8/16/2011	5:01:42 PM	BCl3 MFC set to  0.000000
8/16/2011	5:01:42 PM	PHl3 MFC set to  0.000000
8/16/2011	5:01:42 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:01:42 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:01:42 PM	Tube furnace set to 1000
8/16/2011	5:04:42 PM	Helium valve closed
8/16/2011	5:04:42 PM	BCl3 valve closed
8/16/2011	5:04:42 PM	Main Vac valve closed
8/16/2011	5:04:42 PM	Bypass valve closed
8/16/2011	5:04:42 PM	H2 valve opened
8/16/2011	5:04:42 PM	PH3 valve opened
8/16/2011	5:04:42 PM	SiCl4 pre valve opened
8/16/2011	5:04:42 PM	SiCl4 post valve opened
8/16/2011	5:04:42 PM	Bubbler valve opened
8/16/2011	5:04:42 PM	Helium MFC set to  0.000000
8/16/2011	5:04:42 PM	H2 MFC set to  500.000000
8/16/2011	5:04:42 PM	BCl3 MFC set to  0.000000
8/16/2011	5:04:42 PM	PHl3 MFC set to  20.000000
8/16/2011	5:04:42 PM	SiCl4 MFC set to  50.000000
8/16/2011	5:04:42 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:04:42 PM	Tube furnace set to 1000
8/16/2011	5:07:42 PM	Helium valve closed
8/16/2011	5:07:42 PM	BCl3 valve closed
8/16/2011	5:07:42 PM	PH3 valve closed
8/16/2011	5:07:42 PM	SiCl4 pre valve closed
8/16/2011	5:07:42 PM	SiCl4 post valve closed
8/16/2011	5:07:42 PM	Main Vac valve closed
8/16/2011	5:07:42 PM	Bypass valve closed
8/16/2011	5:07:42 PM	H2 valve opened
8/16/2011	5:07:42 PM	Bubbler valve opened
8/16/2011	5:07:42 PM	Helium MFC set to  0.000000
8/16/2011	5:07:42 PM	H2 MFC set to  500.000000
8/16/2011	5:07:42 PM	BCl3 MFC set to  0.000000
8/16/2011	5:07:42 PM	PHl3 MFC set to  0.000000
8/16/2011	5:07:42 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:07:42 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:07:42 PM	Tube furnace set to 750
8/16/2011	5:12:42 PM	H2 valve closed
8/16/2011	5:12:42 PM	BCl3 valve closed
8/16/2011	5:12:42 PM	PH3 valve closed
8/16/2011	5:12:42 PM	SiCl4 pre valve closed
8/16/2011	5:12:42 PM	SiCl4 post valve closed
8/16/2011	5:12:42 PM	Main Vac valve closed
8/16/2011	5:12:42 PM	Bypass valve closed
8/16/2011	5:12:42 PM	Helium valve opened
8/16/2011	5:12:42 PM	Bubbler valve opened
8/16/2011	5:12:42 PM	Helium MFC set to  500.000000
8/16/2011	5:12:42 PM	H2 MFC set to  0.000000
8/16/2011	5:12:42 PM	BCl3 MFC set to  0.000000
8/16/2011	5:12:42 PM	PHl3 MFC set to  0.000000
8/16/2011	5:12:42 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:12:42 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:12:42 PM	Tube furnace set to 0
8/16/2011	5:32:42 PM	Helium valve closed
8/16/2011	5:32:42 PM	H2 valve closed
8/16/2011	5:32:42 PM	BCl3 valve closed
8/16/2011	5:32:42 PM	PH3 valve closed
8/16/2011	5:32:42 PM	SiCl4 pre valve closed
8/16/2011	5:32:42 PM	SiCl4 post valve closed
8/16/2011	5:32:42 PM	Main Vac valve closed
8/16/2011	5:32:42 PM	Bypass valve closed
8/16/2011	5:32:42 PM	Bubbler valve closed
8/16/2011	5:32:42 PM	Helium MFC set to  0.000000
8/16/2011	5:32:42 PM	H2 MFC set to  0.000000
8/16/2011	5:32:42 PM	BCl3 MFC set to  0.000000
8/16/2011	5:32:42 PM	PHl3 MFC set to  0.000000
8/16/2011	5:32:42 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:32:42 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:32:43 PM	Tube furnace set to 0
8/16/2011	5:32:44 PM	Run finished at 5:32 PM
8/16/2011	5:35:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/16/2011	5:35:20 PM	Recipe started at 5:35 PM
8/16/2011	5:35:20 PM	Helium valve closed
8/16/2011	5:35:20 PM	H2 valve closed
8/16/2011	5:35:20 PM	BCl3 valve closed
8/16/2011	5:35:20 PM	PH3 valve closed
8/16/2011	5:35:20 PM	SiCl4 pre valve closed
8/16/2011	5:35:20 PM	SiCl4 post valve closed
8/16/2011	5:35:20 PM	Main Vac valve closed
8/16/2011	5:35:20 PM	Bypass valve closed
8/16/2011	5:35:20 PM	Bubbler valve closed
8/16/2011	5:35:20 PM	Helium MFC set to  0.000000
8/16/2011	5:35:20 PM	H2 MFC set to  0.000000
8/16/2011	5:35:20 PM	BCl3 MFC set to  0.000000
8/16/2011	5:35:20 PM	PHl3 MFC set to  0.000000
8/16/2011	5:35:20 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:35:20 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:35:20 PM	Tube furnace set to 0
8/16/2011	5:35:23 PM	H2 valve closed
8/16/2011	5:35:23 PM	BCl3 valve closed
8/16/2011	5:35:23 PM	PH3 valve closed
8/16/2011	5:35:23 PM	SiCl4 pre valve closed
8/16/2011	5:35:23 PM	SiCl4 post valve closed
8/16/2011	5:35:23 PM	Main Vac valve closed
8/16/2011	5:35:23 PM	Bypass valve closed
8/16/2011	5:35:23 PM	Bubbler valve closed
8/16/2011	5:35:23 PM	Helium valve opened
8/16/2011	5:35:23 PM	Helium MFC set to  500.000000
8/16/2011	5:35:23 PM	H2 MFC set to  0.000000
8/16/2011	5:35:23 PM	BCl3 MFC set to  0.000000
8/16/2011	5:35:23 PM	PHl3 MFC set to  0.000000
8/16/2011	5:35:23 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:35:23 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:35:23 PM	Tube furnace set to 0
8/16/2011	5:35:25 PM	Helium valve closed
8/16/2011	5:35:25 PM	H2 valve closed
8/16/2011	5:35:25 PM	BCl3 valve closed
8/16/2011	5:35:25 PM	PH3 valve closed
8/16/2011	5:35:25 PM	SiCl4 pre valve closed
8/16/2011	5:35:25 PM	SiCl4 post valve closed
8/16/2011	5:35:25 PM	Main Vac valve closed
8/16/2011	5:35:25 PM	Bypass valve closed
8/16/2011	5:35:25 PM	Bubbler valve closed
8/16/2011	5:35:25 PM	Helium MFC set to  0.000000
8/16/2011	5:35:25 PM	H2 MFC set to  0.000000
8/16/2011	5:35:25 PM	BCl3 MFC set to  0.000000
8/16/2011	5:35:25 PM	PHl3 MFC set to  0.000000
8/16/2011	5:35:25 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:35:25 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:35:25 PM	Tube furnace set to 0
8/16/2011	5:35:26 PM	Run finished at 5:35 PM
8/16/2011	5:35:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/16/2011	5:37:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	5:37:59 PM	Recipe started at 5:37 PM
8/16/2011	5:37:59 PM	Helium valve closed
8/16/2011	5:37:59 PM	H2 valve closed
8/16/2011	5:37:59 PM	BCl3 valve closed
8/16/2011	5:37:59 PM	PH3 valve closed
8/16/2011	5:37:59 PM	SiCl4 pre valve closed
8/16/2011	5:37:59 PM	SiCl4 post valve closed
8/16/2011	5:37:59 PM	Main Vac valve closed
8/16/2011	5:37:59 PM	Bubbler valve closed
8/16/2011	5:37:59 PM	Bypass valve opened
8/16/2011	5:37:59 PM	Helium MFC set to  0.000000
8/16/2011	5:37:59 PM	H2 MFC set to  0.000000
8/16/2011	5:37:59 PM	BCl3 MFC set to  0.000000
8/16/2011	5:37:59 PM	PHl3 MFC set to  0.000000
8/16/2011	5:37:59 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:37:59 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:37:59 PM	Tube furnace set to 0
8/16/2011	5:39:01 PM	Helium valve closed
8/16/2011	5:39:01 PM	H2 valve closed
8/16/2011	5:39:01 PM	BCl3 valve closed
8/16/2011	5:39:01 PM	PH3 valve closed
8/16/2011	5:39:01 PM	SiCl4 pre valve closed
8/16/2011	5:39:01 PM	SiCl4 post valve closed
8/16/2011	5:39:01 PM	Main Vac valve closed
8/16/2011	5:39:01 PM	Bubbler valve closed
8/16/2011	5:39:01 PM	Bypass valve opened
8/16/2011	5:39:01 PM	Helium MFC set to  0.000000
8/16/2011	5:39:01 PM	H2 MFC set to  0.000000
8/16/2011	5:39:01 PM	BCl3 MFC set to  0.000000
8/16/2011	5:39:01 PM	PHl3 MFC set to  0.000000
8/16/2011	5:39:01 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:39:01 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:39:01 PM	Tube furnace set to 0
8/16/2011	5:40:01 PM	Helium valve closed
8/16/2011	5:40:01 PM	H2 valve closed
8/16/2011	5:40:01 PM	BCl3 valve closed
8/16/2011	5:40:01 PM	PH3 valve closed
8/16/2011	5:40:01 PM	SiCl4 pre valve closed
8/16/2011	5:40:01 PM	SiCl4 post valve closed
8/16/2011	5:40:01 PM	Bypass valve closed
8/16/2011	5:40:01 PM	Bubbler valve closed
8/16/2011	5:40:01 PM	Main Vac valve opened
8/16/2011	5:40:01 PM	Helium MFC set to  0.000000
8/16/2011	5:40:01 PM	H2 MFC set to  0.000000
8/16/2011	5:40:01 PM	BCl3 MFC set to  0.000000
8/16/2011	5:40:01 PM	PHl3 MFC set to  0.000000
8/16/2011	5:40:01 PM	SiCl4 MFC set to  0.000000
8/16/2011	5:40:01 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	5:40:01 PM	Tube furnace set to 0
8/16/2011	5:40:02 PM	Run finished at 5:40 PM
8/16/2011	5:40:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	6:00:33 PM	Recipe started at 6:00 PM
8/16/2011	6:00:33 PM	Helium valve closed
8/16/2011	6:00:33 PM	H2 valve closed
8/16/2011	6:00:33 PM	BCl3 valve closed
8/16/2011	6:00:33 PM	PH3 valve closed
8/16/2011	6:00:33 PM	SiCl4 pre valve closed
8/16/2011	6:00:33 PM	SiCl4 post valve closed
8/16/2011	6:00:33 PM	Bypass valve closed
8/16/2011	6:00:33 PM	Bubbler valve closed
8/16/2011	6:00:33 PM	Main Vac valve opened
8/16/2011	6:00:33 PM	Helium MFC set to  0.000000
8/16/2011	6:00:33 PM	H2 MFC set to  0.000000
8/16/2011	6:00:33 PM	BCl3 MFC set to  0.000000
8/16/2011	6:00:33 PM	PHl3 MFC set to  0.000000
8/16/2011	6:00:33 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:00:33 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:00:33 PM	Tube furnace set to 0
8/16/2011	6:01:03 PM	H2 valve closed
8/16/2011	6:01:03 PM	BCl3 valve closed
8/16/2011	6:01:03 PM	PH3 valve closed
8/16/2011	6:01:03 PM	SiCl4 pre valve closed
8/16/2011	6:01:03 PM	SiCl4 post valve closed
8/16/2011	6:01:03 PM	Bypass valve closed
8/16/2011	6:01:03 PM	Bubbler valve closed
8/16/2011	6:01:03 PM	Helium valve opened
8/16/2011	6:01:03 PM	Main Vac valve opened
8/16/2011	6:01:03 PM	Helium MFC set to  20.000000
8/16/2011	6:01:03 PM	H2 MFC set to  0.000000
8/16/2011	6:01:03 PM	BCl3 MFC set to  0.000000
8/16/2011	6:01:03 PM	PHl3 MFC set to  0.000000
8/16/2011	6:01:03 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:01:03 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:01:03 PM	Tube furnace set to 0
8/16/2011	6:01:33 PM	Helium valve closed
8/16/2011	6:01:33 PM	H2 valve closed
8/16/2011	6:01:33 PM	BCl3 valve closed
8/16/2011	6:01:33 PM	PH3 valve closed
8/16/2011	6:01:33 PM	SiCl4 pre valve closed
8/16/2011	6:01:33 PM	SiCl4 post valve closed
8/16/2011	6:01:33 PM	Bypass valve closed
8/16/2011	6:01:33 PM	Bubbler valve closed
8/16/2011	6:01:33 PM	Main Vac valve opened
8/16/2011	6:01:33 PM	Helium MFC set to  0.000000
8/16/2011	6:01:33 PM	H2 MFC set to  0.000000
8/16/2011	6:01:33 PM	BCl3 MFC set to  0.000000
8/16/2011	6:01:33 PM	PHl3 MFC set to  0.000000
8/16/2011	6:01:33 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:01:33 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:01:33 PM	Tube furnace set to 0
8/16/2011	6:02:03 PM	H2 valve closed
8/16/2011	6:02:03 PM	BCl3 valve closed
8/16/2011	6:02:03 PM	PH3 valve closed
8/16/2011	6:02:03 PM	SiCl4 pre valve closed
8/16/2011	6:02:03 PM	SiCl4 post valve closed
8/16/2011	6:02:03 PM	Bypass valve closed
8/16/2011	6:02:03 PM	Bubbler valve closed
8/16/2011	6:02:03 PM	Helium valve opened
8/16/2011	6:02:03 PM	Main Vac valve opened
8/16/2011	6:02:03 PM	Helium MFC set to  20.000000
8/16/2011	6:02:03 PM	H2 MFC set to  0.000000
8/16/2011	6:02:03 PM	BCl3 MFC set to  0.000000
8/16/2011	6:02:03 PM	PHl3 MFC set to  0.000000
8/16/2011	6:02:03 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:02:03 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:02:04 PM	Tube furnace set to 0
8/16/2011	6:02:34 PM	Helium valve closed
8/16/2011	6:02:34 PM	H2 valve closed
8/16/2011	6:02:34 PM	BCl3 valve closed
8/16/2011	6:02:34 PM	PH3 valve closed
8/16/2011	6:02:34 PM	SiCl4 pre valve closed
8/16/2011	6:02:34 PM	SiCl4 post valve closed
8/16/2011	6:02:34 PM	Bypass valve closed
8/16/2011	6:02:34 PM	Bubbler valve closed
8/16/2011	6:02:34 PM	Main Vac valve opened
8/16/2011	6:02:34 PM	Helium MFC set to  0.000000
8/16/2011	6:02:34 PM	H2 MFC set to  0.000000
8/16/2011	6:02:34 PM	BCl3 MFC set to  0.000000
8/16/2011	6:02:34 PM	PHl3 MFC set to  0.000000
8/16/2011	6:02:34 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:02:34 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:02:34 PM	Tube furnace set to 0
8/16/2011	6:03:04 PM	H2 valve closed
8/16/2011	6:03:04 PM	BCl3 valve closed
8/16/2011	6:03:04 PM	PH3 valve closed
8/16/2011	6:03:04 PM	SiCl4 pre valve closed
8/16/2011	6:03:04 PM	SiCl4 post valve closed
8/16/2011	6:03:04 PM	Bypass valve closed
8/16/2011	6:03:04 PM	Bubbler valve closed
8/16/2011	6:03:04 PM	Helium valve opened
8/16/2011	6:03:04 PM	Main Vac valve opened
8/16/2011	6:03:04 PM	Helium MFC set to  20.000000
8/16/2011	6:03:04 PM	H2 MFC set to  0.000000
8/16/2011	6:03:04 PM	BCl3 MFC set to  0.000000
8/16/2011	6:03:04 PM	PHl3 MFC set to  0.000000
8/16/2011	6:03:04 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:03:04 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:03:04 PM	Tube furnace set to 0
8/16/2011	6:03:34 PM	Helium valve closed
8/16/2011	6:03:34 PM	H2 valve closed
8/16/2011	6:03:34 PM	BCl3 valve closed
8/16/2011	6:03:34 PM	PH3 valve closed
8/16/2011	6:03:34 PM	SiCl4 pre valve closed
8/16/2011	6:03:34 PM	SiCl4 post valve closed
8/16/2011	6:03:34 PM	Bypass valve closed
8/16/2011	6:03:34 PM	Bubbler valve closed
8/16/2011	6:03:34 PM	Main Vac valve opened
8/16/2011	6:03:34 PM	Helium MFC set to  0.000000
8/16/2011	6:03:34 PM	H2 MFC set to  0.000000
8/16/2011	6:03:34 PM	BCl3 MFC set to  0.000000
8/16/2011	6:03:34 PM	PHl3 MFC set to  0.000000
8/16/2011	6:03:34 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:03:34 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:03:34 PM	Tube furnace set to 0
8/16/2011	6:04:04 PM	H2 valve closed
8/16/2011	6:04:04 PM	BCl3 valve closed
8/16/2011	6:04:04 PM	PH3 valve closed
8/16/2011	6:04:04 PM	SiCl4 pre valve closed
8/16/2011	6:04:04 PM	SiCl4 post valve closed
8/16/2011	6:04:04 PM	Bypass valve closed
8/16/2011	6:04:04 PM	Bubbler valve closed
8/16/2011	6:04:04 PM	Helium valve opened
8/16/2011	6:04:04 PM	Main Vac valve opened
8/16/2011	6:04:04 PM	Helium MFC set to  20.000000
8/16/2011	6:04:04 PM	H2 MFC set to  0.000000
8/16/2011	6:04:04 PM	BCl3 MFC set to  0.000000
8/16/2011	6:04:04 PM	PHl3 MFC set to  0.000000
8/16/2011	6:04:04 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:04:04 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:04:04 PM	Tube furnace set to 0
8/16/2011	6:04:35 PM	Helium valve closed
8/16/2011	6:04:35 PM	H2 valve closed
8/16/2011	6:04:35 PM	BCl3 valve closed
8/16/2011	6:04:35 PM	PH3 valve closed
8/16/2011	6:04:35 PM	SiCl4 pre valve closed
8/16/2011	6:04:35 PM	SiCl4 post valve closed
8/16/2011	6:04:35 PM	Bypass valve closed
8/16/2011	6:04:35 PM	Bubbler valve closed
8/16/2011	6:04:35 PM	Main Vac valve opened
8/16/2011	6:04:35 PM	Helium MFC set to  0.000000
8/16/2011	6:04:35 PM	H2 MFC set to  0.000000
8/16/2011	6:04:35 PM	BCl3 MFC set to  0.000000
8/16/2011	6:04:35 PM	PHl3 MFC set to  0.000000
8/16/2011	6:04:35 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:04:35 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:04:35 PM	Tube furnace set to 0
8/16/2011	6:05:05 PM	H2 valve closed
8/16/2011	6:05:05 PM	BCl3 valve closed
8/16/2011	6:05:05 PM	PH3 valve closed
8/16/2011	6:05:05 PM	SiCl4 pre valve closed
8/16/2011	6:05:05 PM	SiCl4 post valve closed
8/16/2011	6:05:05 PM	Bypass valve closed
8/16/2011	6:05:05 PM	Bubbler valve closed
8/16/2011	6:05:05 PM	Helium valve opened
8/16/2011	6:05:05 PM	Main Vac valve opened
8/16/2011	6:05:05 PM	Helium MFC set to  20.000000
8/16/2011	6:05:05 PM	H2 MFC set to  0.000000
8/16/2011	6:05:05 PM	BCl3 MFC set to  0.000000
8/16/2011	6:05:05 PM	PHl3 MFC set to  0.000000
8/16/2011	6:05:05 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:05:05 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:05:05 PM	Tube furnace set to 0
8/16/2011	6:05:35 PM	Helium valve closed
8/16/2011	6:05:35 PM	H2 valve closed
8/16/2011	6:05:35 PM	BCl3 valve closed
8/16/2011	6:05:35 PM	PH3 valve closed
8/16/2011	6:05:35 PM	SiCl4 pre valve closed
8/16/2011	6:05:35 PM	SiCl4 post valve closed
8/16/2011	6:05:35 PM	Bypass valve closed
8/16/2011	6:05:35 PM	Bubbler valve closed
8/16/2011	6:05:35 PM	Main Vac valve opened
8/16/2011	6:05:35 PM	Helium MFC set to  0.000000
8/16/2011	6:05:35 PM	H2 MFC set to  0.000000
8/16/2011	6:05:35 PM	BCl3 MFC set to  0.000000
8/16/2011	6:05:35 PM	PHl3 MFC set to  0.000000
8/16/2011	6:05:35 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:05:35 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:05:35 PM	Tube furnace set to 0
8/16/2011	6:06:05 PM	H2 valve closed
8/16/2011	6:06:05 PM	BCl3 valve closed
8/16/2011	6:06:05 PM	PH3 valve closed
8/16/2011	6:06:05 PM	SiCl4 pre valve closed
8/16/2011	6:06:05 PM	SiCl4 post valve closed
8/16/2011	6:06:05 PM	Bypass valve closed
8/16/2011	6:06:05 PM	Bubbler valve closed
8/16/2011	6:06:05 PM	Helium valve opened
8/16/2011	6:06:05 PM	Main Vac valve opened
8/16/2011	6:06:05 PM	Helium MFC set to  20.000000
8/16/2011	6:06:05 PM	H2 MFC set to  0.000000
8/16/2011	6:06:05 PM	BCl3 MFC set to  0.000000
8/16/2011	6:06:05 PM	PHl3 MFC set to  0.000000
8/16/2011	6:06:05 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:06:05 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:06:05 PM	Tube furnace set to 0
8/16/2011	6:06:35 PM	Helium valve closed
8/16/2011	6:06:35 PM	H2 valve closed
8/16/2011	6:06:35 PM	BCl3 valve closed
8/16/2011	6:06:35 PM	PH3 valve closed
8/16/2011	6:06:35 PM	SiCl4 pre valve closed
8/16/2011	6:06:35 PM	SiCl4 post valve closed
8/16/2011	6:06:35 PM	Bypass valve closed
8/16/2011	6:06:35 PM	Bubbler valve closed
8/16/2011	6:06:35 PM	Main Vac valve opened
8/16/2011	6:06:35 PM	Helium MFC set to  0.000000
8/16/2011	6:06:35 PM	H2 MFC set to  0.000000
8/16/2011	6:06:35 PM	BCl3 MFC set to  0.000000
8/16/2011	6:06:35 PM	PHl3 MFC set to  0.000000
8/16/2011	6:06:35 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:06:35 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:06:36 PM	Tube furnace set to 0
8/16/2011	6:07:06 PM	H2 valve closed
8/16/2011	6:07:06 PM	BCl3 valve closed
8/16/2011	6:07:06 PM	PH3 valve closed
8/16/2011	6:07:06 PM	SiCl4 pre valve closed
8/16/2011	6:07:06 PM	SiCl4 post valve closed
8/16/2011	6:07:06 PM	Bypass valve closed
8/16/2011	6:07:06 PM	Bubbler valve closed
8/16/2011	6:07:06 PM	Helium valve opened
8/16/2011	6:07:06 PM	Main Vac valve opened
8/16/2011	6:07:06 PM	Helium MFC set to  20.000000
8/16/2011	6:07:06 PM	H2 MFC set to  0.000000
8/16/2011	6:07:06 PM	BCl3 MFC set to  0.000000
8/16/2011	6:07:06 PM	PHl3 MFC set to  0.000000
8/16/2011	6:07:06 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:07:06 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:07:06 PM	Tube furnace set to 0
8/16/2011	6:07:36 PM	Helium valve closed
8/16/2011	6:07:36 PM	H2 valve closed
8/16/2011	6:07:36 PM	BCl3 valve closed
8/16/2011	6:07:36 PM	PH3 valve closed
8/16/2011	6:07:36 PM	SiCl4 pre valve closed
8/16/2011	6:07:36 PM	SiCl4 post valve closed
8/16/2011	6:07:36 PM	Bypass valve closed
8/16/2011	6:07:36 PM	Bubbler valve closed
8/16/2011	6:07:36 PM	Main Vac valve opened
8/16/2011	6:07:36 PM	Helium MFC set to  0.000000
8/16/2011	6:07:36 PM	H2 MFC set to  0.000000
8/16/2011	6:07:36 PM	BCl3 MFC set to  0.000000
8/16/2011	6:07:36 PM	PHl3 MFC set to  0.000000
8/16/2011	6:07:36 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:07:36 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:07:36 PM	Tube furnace set to 0
8/16/2011	6:08:06 PM	H2 valve closed
8/16/2011	6:08:06 PM	BCl3 valve closed
8/16/2011	6:08:06 PM	PH3 valve closed
8/16/2011	6:08:06 PM	SiCl4 pre valve closed
8/16/2011	6:08:06 PM	SiCl4 post valve closed
8/16/2011	6:08:06 PM	Bypass valve closed
8/16/2011	6:08:06 PM	Bubbler valve closed
8/16/2011	6:08:06 PM	Helium valve opened
8/16/2011	6:08:06 PM	Main Vac valve opened
8/16/2011	6:08:06 PM	Helium MFC set to  20.000000
8/16/2011	6:08:06 PM	H2 MFC set to  0.000000
8/16/2011	6:08:06 PM	BCl3 MFC set to  0.000000
8/16/2011	6:08:06 PM	PHl3 MFC set to  0.000000
8/16/2011	6:08:06 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:08:06 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:08:06 PM	Tube furnace set to 0
8/16/2011	6:08:36 PM	Helium valve closed
8/16/2011	6:08:36 PM	H2 valve closed
8/16/2011	6:08:36 PM	BCl3 valve closed
8/16/2011	6:08:36 PM	PH3 valve closed
8/16/2011	6:08:36 PM	SiCl4 pre valve closed
8/16/2011	6:08:36 PM	SiCl4 post valve closed
8/16/2011	6:08:36 PM	Bypass valve closed
8/16/2011	6:08:36 PM	Bubbler valve closed
8/16/2011	6:08:36 PM	Main Vac valve opened
8/16/2011	6:08:36 PM	Helium MFC set to  0.000000
8/16/2011	6:08:36 PM	H2 MFC set to  0.000000
8/16/2011	6:08:36 PM	BCl3 MFC set to  0.000000
8/16/2011	6:08:36 PM	PHl3 MFC set to  0.000000
8/16/2011	6:08:36 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:08:36 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:08:36 PM	Tube furnace set to 0
8/16/2011	6:09:06 PM	H2 valve closed
8/16/2011	6:09:06 PM	BCl3 valve closed
8/16/2011	6:09:06 PM	PH3 valve closed
8/16/2011	6:09:06 PM	SiCl4 pre valve closed
8/16/2011	6:09:06 PM	SiCl4 post valve closed
8/16/2011	6:09:06 PM	Bypass valve closed
8/16/2011	6:09:06 PM	Bubbler valve closed
8/16/2011	6:09:06 PM	Helium valve opened
8/16/2011	6:09:06 PM	Main Vac valve opened
8/16/2011	6:09:06 PM	Helium MFC set to  20.000000
8/16/2011	6:09:06 PM	H2 MFC set to  0.000000
8/16/2011	6:09:06 PM	BCl3 MFC set to  0.000000
8/16/2011	6:09:06 PM	PHl3 MFC set to  0.000000
8/16/2011	6:09:06 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:09:06 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:09:07 PM	Tube furnace set to 0
8/16/2011	6:09:37 PM	Helium valve closed
8/16/2011	6:09:37 PM	H2 valve closed
8/16/2011	6:09:37 PM	BCl3 valve closed
8/16/2011	6:09:37 PM	PH3 valve closed
8/16/2011	6:09:37 PM	SiCl4 pre valve closed
8/16/2011	6:09:37 PM	SiCl4 post valve closed
8/16/2011	6:09:37 PM	Bypass valve closed
8/16/2011	6:09:37 PM	Bubbler valve closed
8/16/2011	6:09:37 PM	Main Vac valve opened
8/16/2011	6:09:37 PM	Helium MFC set to  0.000000
8/16/2011	6:09:37 PM	H2 MFC set to  0.000000
8/16/2011	6:09:37 PM	BCl3 MFC set to  0.000000
8/16/2011	6:09:37 PM	PHl3 MFC set to  0.000000
8/16/2011	6:09:37 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:09:37 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:09:37 PM	Tube furnace set to 200
8/16/2011	6:10:07 PM	H2 valve closed
8/16/2011	6:10:07 PM	BCl3 valve closed
8/16/2011	6:10:07 PM	PH3 valve closed
8/16/2011	6:10:07 PM	SiCl4 pre valve closed
8/16/2011	6:10:07 PM	SiCl4 post valve closed
8/16/2011	6:10:07 PM	Bypass valve closed
8/16/2011	6:10:07 PM	Bubbler valve closed
8/16/2011	6:10:07 PM	Helium valve opened
8/16/2011	6:10:07 PM	Main Vac valve opened
8/16/2011	6:10:07 PM	Helium MFC set to  20.000000
8/16/2011	6:10:07 PM	H2 MFC set to  0.000000
8/16/2011	6:10:07 PM	BCl3 MFC set to  0.000000
8/16/2011	6:10:07 PM	PHl3 MFC set to  0.000000
8/16/2011	6:10:07 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:10:07 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:10:07 PM	Tube furnace set to 200
8/16/2011	6:10:37 PM	Helium valve closed
8/16/2011	6:10:37 PM	H2 valve closed
8/16/2011	6:10:37 PM	BCl3 valve closed
8/16/2011	6:10:37 PM	PH3 valve closed
8/16/2011	6:10:37 PM	SiCl4 pre valve closed
8/16/2011	6:10:37 PM	SiCl4 post valve closed
8/16/2011	6:10:37 PM	Bypass valve closed
8/16/2011	6:10:37 PM	Bubbler valve closed
8/16/2011	6:10:37 PM	Main Vac valve opened
8/16/2011	6:10:37 PM	Helium MFC set to  0.000000
8/16/2011	6:10:37 PM	H2 MFC set to  0.000000
8/16/2011	6:10:37 PM	BCl3 MFC set to  0.000000
8/16/2011	6:10:37 PM	PHl3 MFC set to  0.000000
8/16/2011	6:10:37 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:10:37 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:10:37 PM	Tube furnace set to 200
8/16/2011	6:11:07 PM	H2 valve closed
8/16/2011	6:11:07 PM	BCl3 valve closed
8/16/2011	6:11:07 PM	PH3 valve closed
8/16/2011	6:11:07 PM	SiCl4 pre valve closed
8/16/2011	6:11:07 PM	SiCl4 post valve closed
8/16/2011	6:11:07 PM	Bypass valve closed
8/16/2011	6:11:07 PM	Bubbler valve closed
8/16/2011	6:11:07 PM	Helium valve opened
8/16/2011	6:11:07 PM	Main Vac valve opened
8/16/2011	6:11:07 PM	Helium MFC set to  20.000000
8/16/2011	6:11:07 PM	H2 MFC set to  0.000000
8/16/2011	6:11:07 PM	BCl3 MFC set to  0.000000
8/16/2011	6:11:07 PM	PHl3 MFC set to  0.000000
8/16/2011	6:11:07 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:11:07 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:11:08 PM	Tube furnace set to 200
8/16/2011	6:11:38 PM	Helium valve closed
8/16/2011	6:11:38 PM	H2 valve closed
8/16/2011	6:11:38 PM	BCl3 valve closed
8/16/2011	6:11:38 PM	PH3 valve closed
8/16/2011	6:11:38 PM	SiCl4 pre valve closed
8/16/2011	6:11:38 PM	SiCl4 post valve closed
8/16/2011	6:11:38 PM	Bypass valve closed
8/16/2011	6:11:38 PM	Bubbler valve closed
8/16/2011	6:11:38 PM	Main Vac valve opened
8/16/2011	6:11:38 PM	Helium MFC set to  0.000000
8/16/2011	6:11:38 PM	H2 MFC set to  0.000000
8/16/2011	6:11:38 PM	BCl3 MFC set to  0.000000
8/16/2011	6:11:38 PM	PHl3 MFC set to  0.000000
8/16/2011	6:11:38 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:11:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:11:38 PM	Tube furnace set to 200
8/16/2011	6:12:08 PM	H2 valve closed
8/16/2011	6:12:08 PM	BCl3 valve closed
8/16/2011	6:12:08 PM	PH3 valve closed
8/16/2011	6:12:08 PM	SiCl4 pre valve closed
8/16/2011	6:12:08 PM	SiCl4 post valve closed
8/16/2011	6:12:08 PM	Bypass valve closed
8/16/2011	6:12:08 PM	Bubbler valve closed
8/16/2011	6:12:08 PM	Helium valve opened
8/16/2011	6:12:08 PM	Main Vac valve opened
8/16/2011	6:12:08 PM	Helium MFC set to  20.000000
8/16/2011	6:12:08 PM	H2 MFC set to  0.000000
8/16/2011	6:12:08 PM	BCl3 MFC set to  0.000000
8/16/2011	6:12:08 PM	PHl3 MFC set to  0.000000
8/16/2011	6:12:08 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:12:08 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:12:08 PM	Tube furnace set to 200
8/16/2011	6:12:38 PM	Helium valve closed
8/16/2011	6:12:38 PM	H2 valve closed
8/16/2011	6:12:38 PM	BCl3 valve closed
8/16/2011	6:12:38 PM	PH3 valve closed
8/16/2011	6:12:38 PM	SiCl4 pre valve closed
8/16/2011	6:12:38 PM	SiCl4 post valve closed
8/16/2011	6:12:38 PM	Bypass valve closed
8/16/2011	6:12:38 PM	Bubbler valve closed
8/16/2011	6:12:38 PM	Main Vac valve opened
8/16/2011	6:12:38 PM	Helium MFC set to  0.000000
8/16/2011	6:12:38 PM	H2 MFC set to  0.000000
8/16/2011	6:12:38 PM	BCl3 MFC set to  0.000000
8/16/2011	6:12:38 PM	PHl3 MFC set to  0.000000
8/16/2011	6:12:38 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:12:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:12:38 PM	Tube furnace set to 200
8/16/2011	6:13:08 PM	H2 valve closed
8/16/2011	6:13:08 PM	BCl3 valve closed
8/16/2011	6:13:08 PM	PH3 valve closed
8/16/2011	6:13:08 PM	SiCl4 pre valve closed
8/16/2011	6:13:08 PM	SiCl4 post valve closed
8/16/2011	6:13:08 PM	Bypass valve closed
8/16/2011	6:13:08 PM	Bubbler valve closed
8/16/2011	6:13:08 PM	Helium valve opened
8/16/2011	6:13:08 PM	Main Vac valve opened
8/16/2011	6:13:08 PM	Helium MFC set to  20.000000
8/16/2011	6:13:08 PM	H2 MFC set to  0.000000
8/16/2011	6:13:08 PM	BCl3 MFC set to  0.000000
8/16/2011	6:13:08 PM	PHl3 MFC set to  0.000000
8/16/2011	6:13:08 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:13:08 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:13:08 PM	Tube furnace set to 200
8/16/2011	6:13:38 PM	Helium valve closed
8/16/2011	6:13:38 PM	H2 valve closed
8/16/2011	6:13:38 PM	BCl3 valve closed
8/16/2011	6:13:38 PM	PH3 valve closed
8/16/2011	6:13:38 PM	SiCl4 pre valve closed
8/16/2011	6:13:38 PM	SiCl4 post valve closed
8/16/2011	6:13:38 PM	Bypass valve closed
8/16/2011	6:13:38 PM	Bubbler valve closed
8/16/2011	6:13:38 PM	Main Vac valve opened
8/16/2011	6:13:38 PM	Helium MFC set to  0.000000
8/16/2011	6:13:38 PM	H2 MFC set to  0.000000
8/16/2011	6:13:38 PM	BCl3 MFC set to  0.000000
8/16/2011	6:13:38 PM	PHl3 MFC set to  0.000000
8/16/2011	6:13:38 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:13:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:13:39 PM	Tube furnace set to 200
8/16/2011	6:14:09 PM	H2 valve closed
8/16/2011	6:14:09 PM	BCl3 valve closed
8/16/2011	6:14:09 PM	PH3 valve closed
8/16/2011	6:14:09 PM	SiCl4 pre valve closed
8/16/2011	6:14:09 PM	SiCl4 post valve closed
8/16/2011	6:14:09 PM	Bypass valve closed
8/16/2011	6:14:09 PM	Bubbler valve closed
8/16/2011	6:14:09 PM	Helium valve opened
8/16/2011	6:14:09 PM	Main Vac valve opened
8/16/2011	6:14:09 PM	Helium MFC set to  20.000000
8/16/2011	6:14:09 PM	H2 MFC set to  0.000000
8/16/2011	6:14:09 PM	BCl3 MFC set to  0.000000
8/16/2011	6:14:09 PM	PHl3 MFC set to  0.000000
8/16/2011	6:14:09 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:14:09 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:14:09 PM	Tube furnace set to 200
8/16/2011	6:14:39 PM	Helium valve closed
8/16/2011	6:14:39 PM	H2 valve closed
8/16/2011	6:14:39 PM	BCl3 valve closed
8/16/2011	6:14:39 PM	PH3 valve closed
8/16/2011	6:14:39 PM	SiCl4 pre valve closed
8/16/2011	6:14:39 PM	SiCl4 post valve closed
8/16/2011	6:14:39 PM	Bypass valve closed
8/16/2011	6:14:39 PM	Bubbler valve closed
8/16/2011	6:14:39 PM	Main Vac valve opened
8/16/2011	6:14:39 PM	Helium MFC set to  0.000000
8/16/2011	6:14:39 PM	H2 MFC set to  0.000000
8/16/2011	6:14:39 PM	BCl3 MFC set to  0.000000
8/16/2011	6:14:39 PM	PHl3 MFC set to  0.000000
8/16/2011	6:14:39 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:14:39 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:14:39 PM	Tube furnace set to 200
8/16/2011	6:15:09 PM	H2 valve closed
8/16/2011	6:15:09 PM	BCl3 valve closed
8/16/2011	6:15:09 PM	PH3 valve closed
8/16/2011	6:15:09 PM	SiCl4 pre valve closed
8/16/2011	6:15:09 PM	SiCl4 post valve closed
8/16/2011	6:15:09 PM	Bypass valve closed
8/16/2011	6:15:09 PM	Bubbler valve closed
8/16/2011	6:15:09 PM	Helium valve opened
8/16/2011	6:15:09 PM	Main Vac valve opened
8/16/2011	6:15:09 PM	Helium MFC set to  20.000000
8/16/2011	6:15:09 PM	H2 MFC set to  0.000000
8/16/2011	6:15:09 PM	BCl3 MFC set to  0.000000
8/16/2011	6:15:09 PM	PHl3 MFC set to  0.000000
8/16/2011	6:15:09 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:15:09 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:15:09 PM	Tube furnace set to 200
8/16/2011	6:15:39 PM	Helium valve closed
8/16/2011	6:15:39 PM	H2 valve closed
8/16/2011	6:15:39 PM	BCl3 valve closed
8/16/2011	6:15:39 PM	PH3 valve closed
8/16/2011	6:15:39 PM	SiCl4 pre valve closed
8/16/2011	6:15:39 PM	SiCl4 post valve closed
8/16/2011	6:15:39 PM	Bypass valve closed
8/16/2011	6:15:39 PM	Bubbler valve closed
8/16/2011	6:15:39 PM	Main Vac valve opened
8/16/2011	6:15:39 PM	Helium MFC set to  0.000000
8/16/2011	6:15:39 PM	H2 MFC set to  0.000000
8/16/2011	6:15:39 PM	BCl3 MFC set to  0.000000
8/16/2011	6:15:39 PM	PHl3 MFC set to  0.000000
8/16/2011	6:15:39 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:15:39 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:15:39 PM	Tube furnace set to 0
8/16/2011	6:15:40 PM	Run finished at 6:15 PM
8/16/2011	6:43:08 PM	Recipe started at 6:43 PM
8/16/2011	6:43:08 PM	Helium valve closed
8/16/2011	6:43:08 PM	H2 valve closed
8/16/2011	6:43:08 PM	BCl3 valve closed
8/16/2011	6:43:08 PM	PH3 valve closed
8/16/2011	6:43:08 PM	SiCl4 pre valve closed
8/16/2011	6:43:08 PM	SiCl4 post valve closed
8/16/2011	6:43:08 PM	Main Vac valve closed
8/16/2011	6:43:08 PM	Bypass valve closed
8/16/2011	6:43:08 PM	Bubbler valve closed
8/16/2011	6:43:08 PM	Helium MFC set to  0.000000
8/16/2011	6:43:08 PM	H2 MFC set to  0.000000
8/16/2011	6:43:08 PM	BCl3 MFC set to  0.000000
8/16/2011	6:43:08 PM	PHl3 MFC set to  0.000000
8/16/2011	6:43:08 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:43:08 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:43:08 PM	Tube furnace set to 0
8/16/2011	6:43:11 PM	Helium valve closed
8/16/2011	6:43:11 PM	BCl3 valve closed
8/16/2011	6:43:11 PM	PH3 valve closed
8/16/2011	6:43:11 PM	SiCl4 pre valve closed
8/16/2011	6:43:11 PM	SiCl4 post valve closed
8/16/2011	6:43:11 PM	Main Vac valve closed
8/16/2011	6:43:11 PM	Bypass valve closed
8/16/2011	6:43:11 PM	Bubbler valve closed
8/16/2011	6:43:11 PM	H2 valve opened
8/16/2011	6:43:11 PM	Helium MFC set to  0.000000
8/16/2011	6:43:11 PM	H2 MFC set to  500.000000
8/16/2011	6:43:11 PM	BCl3 MFC set to  0.000000
8/16/2011	6:43:11 PM	PHl3 MFC set to  0.000000
8/16/2011	6:43:11 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:43:11 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:43:11 PM	Tube furnace set to 0
8/16/2011	6:44:16 PM	Helium valve closed
8/16/2011	6:44:16 PM	BCl3 valve closed
8/16/2011	6:44:16 PM	PH3 valve closed
8/16/2011	6:44:16 PM	SiCl4 pre valve closed
8/16/2011	6:44:16 PM	SiCl4 post valve closed
8/16/2011	6:44:16 PM	Main Vac valve closed
8/16/2011	6:44:16 PM	Bypass valve closed
8/16/2011	6:44:16 PM	H2 valve opened
8/16/2011	6:44:16 PM	Bubbler valve opened
8/16/2011	6:44:16 PM	Helium MFC set to  0.000000
8/16/2011	6:44:16 PM	H2 MFC set to  500.000000
8/16/2011	6:44:16 PM	BCl3 MFC set to  0.000000
8/16/2011	6:44:16 PM	PHl3 MFC set to  0.000000
8/16/2011	6:44:16 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:44:16 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:44:16 PM	Tube furnace set to 0
8/16/2011	6:44:17 PM	Helium valve closed
8/16/2011	6:44:17 PM	BCl3 valve closed
8/16/2011	6:44:17 PM	PH3 valve closed
8/16/2011	6:44:17 PM	SiCl4 pre valve closed
8/16/2011	6:44:17 PM	SiCl4 post valve closed
8/16/2011	6:44:17 PM	Main Vac valve closed
8/16/2011	6:44:17 PM	Bypass valve closed
8/16/2011	6:44:17 PM	H2 valve opened
8/16/2011	6:44:17 PM	Bubbler valve opened
8/16/2011	6:44:17 PM	Helium MFC set to  0.000000
8/16/2011	6:44:17 PM	H2 MFC set to  500.000000
8/16/2011	6:44:17 PM	BCl3 MFC set to  0.000000
8/16/2011	6:44:17 PM	PHl3 MFC set to  0.000000
8/16/2011	6:44:17 PM	SiCl4 MFC set to  0.000000
8/16/2011	6:44:17 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	6:44:17 PM	Tube furnace set to 1000
8/16/2011	7:04:17 PM	Helium valve closed
8/16/2011	7:04:17 PM	PH3 valve closed
8/16/2011	7:04:17 PM	Main Vac valve closed
8/16/2011	7:04:17 PM	Bypass valve closed
8/16/2011	7:04:17 PM	H2 valve opened
8/16/2011	7:04:17 PM	BCl3 valve opened
8/16/2011	7:04:17 PM	SiCl4 pre valve opened
8/16/2011	7:04:17 PM	SiCl4 post valve opened
8/16/2011	7:04:17 PM	Bubbler valve opened
8/16/2011	7:04:17 PM	Helium MFC set to  0.000000
8/16/2011	7:04:17 PM	H2 MFC set to  500.000000
8/16/2011	7:04:17 PM	BCl3 MFC set to  2.500000
8/16/2011	7:04:17 PM	PHl3 MFC set to  0.000000
8/16/2011	7:04:17 PM	SiCl4 MFC set to  50.000000
8/16/2011	7:04:17 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	7:04:17 PM	Tube furnace set to 1000
8/16/2011	7:17:17 PM	Helium valve closed
8/16/2011	7:17:17 PM	BCl3 valve closed
8/16/2011	7:17:17 PM	PH3 valve closed
8/16/2011	7:17:17 PM	SiCl4 pre valve closed
8/16/2011	7:17:17 PM	SiCl4 post valve closed
8/16/2011	7:17:17 PM	Main Vac valve closed
8/16/2011	7:17:17 PM	Bypass valve closed
8/16/2011	7:17:17 PM	H2 valve opened
8/16/2011	7:17:17 PM	Bubbler valve opened
8/16/2011	7:17:17 PM	Helium MFC set to  0.000000
8/16/2011	7:17:17 PM	H2 MFC set to  500.000000
8/16/2011	7:17:17 PM	BCl3 MFC set to  0.000000
8/16/2011	7:17:17 PM	PHl3 MFC set to  0.000000
8/16/2011	7:17:17 PM	SiCl4 MFC set to  0.000000
8/16/2011	7:17:17 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	7:17:18 PM	Tube furnace set to 1000
8/16/2011	7:22:38 PM	Helium valve closed
8/16/2011	7:22:38 PM	BCl3 valve closed
8/16/2011	7:22:38 PM	SiCl4 pre valve closed
8/16/2011	7:22:38 PM	SiCl4 post valve closed
8/16/2011	7:22:38 PM	Main Vac valve closed
8/16/2011	7:22:38 PM	Bypass valve closed
8/16/2011	7:22:38 PM	H2 valve opened
8/16/2011	7:22:38 PM	PH3 valve opened
8/16/2011	7:22:38 PM	Bubbler valve opened
8/16/2011	7:22:38 PM	Helium MFC set to  0.000000
8/16/2011	7:22:38 PM	H2 MFC set to  500.000000
8/16/2011	7:22:38 PM	BCl3 MFC set to  0.000000
8/16/2011	7:22:38 PM	PHl3 MFC set to  20.000000
8/16/2011	7:22:38 PM	SiCl4 MFC set to  0.000000
8/16/2011	7:22:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	7:22:38 PM	Tube furnace set to 1000
8/16/2011	7:23:38 PM	Helium valve closed
8/16/2011	7:23:38 PM	BCl3 valve closed
8/16/2011	7:23:38 PM	Main Vac valve closed
8/16/2011	7:23:38 PM	Bypass valve closed
8/16/2011	7:23:38 PM	H2 valve opened
8/16/2011	7:23:38 PM	PH3 valve opened
8/16/2011	7:23:38 PM	SiCl4 pre valve opened
8/16/2011	7:23:38 PM	SiCl4 post valve opened
8/16/2011	7:23:38 PM	Bubbler valve opened
8/16/2011	7:23:38 PM	Helium MFC set to  0.000000
8/16/2011	7:23:38 PM	H2 MFC set to  500.000000
8/16/2011	7:23:38 PM	BCl3 MFC set to  0.000000
8/16/2011	7:23:38 PM	PHl3 MFC set to  20.000000
8/16/2011	7:23:38 PM	SiCl4 MFC set to  50.000000
8/16/2011	7:23:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	7:23:38 PM	Tube furnace set to 1000
8/16/2011	7:26:38 PM	Helium valve closed
8/16/2011	7:26:38 PM	BCl3 valve closed
8/16/2011	7:26:38 PM	PH3 valve closed
8/16/2011	7:26:38 PM	SiCl4 pre valve closed
8/16/2011	7:26:38 PM	SiCl4 post valve closed
8/16/2011	7:26:38 PM	Main Vac valve closed
8/16/2011	7:26:38 PM	Bypass valve closed
8/16/2011	7:26:38 PM	H2 valve opened
8/16/2011	7:26:38 PM	Bubbler valve opened
8/16/2011	7:26:38 PM	Helium MFC set to  0.000000
8/16/2011	7:26:38 PM	H2 MFC set to  500.000000
8/16/2011	7:26:38 PM	BCl3 MFC set to  0.000000
8/16/2011	7:26:38 PM	PHl3 MFC set to  0.000000
8/16/2011	7:26:38 PM	SiCl4 MFC set to  0.000000
8/16/2011	7:26:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	7:26:38 PM	Tube furnace set to 750
8/16/2011	7:31:38 PM	H2 valve closed
8/16/2011	7:31:38 PM	BCl3 valve closed
8/16/2011	7:31:38 PM	PH3 valve closed
8/16/2011	7:31:38 PM	SiCl4 pre valve closed
8/16/2011	7:31:38 PM	SiCl4 post valve closed
8/16/2011	7:31:38 PM	Main Vac valve closed
8/16/2011	7:31:38 PM	Bypass valve closed
8/16/2011	7:31:38 PM	Helium valve opened
8/16/2011	7:31:38 PM	Bubbler valve opened
8/16/2011	7:31:38 PM	Helium MFC set to  500.000000
8/16/2011	7:31:38 PM	H2 MFC set to  0.000000
8/16/2011	7:31:38 PM	BCl3 MFC set to  0.000000
8/16/2011	7:31:38 PM	PHl3 MFC set to  0.000000
8/16/2011	7:31:38 PM	SiCl4 MFC set to  0.000000
8/16/2011	7:31:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	7:31:38 PM	Tube furnace set to 0
8/16/2011	7:51:38 PM	Helium valve closed
8/16/2011	7:51:38 PM	H2 valve closed
8/16/2011	7:51:38 PM	BCl3 valve closed
8/16/2011	7:51:38 PM	PH3 valve closed
8/16/2011	7:51:38 PM	SiCl4 pre valve closed
8/16/2011	7:51:38 PM	SiCl4 post valve closed
8/16/2011	7:51:38 PM	Main Vac valve closed
8/16/2011	7:51:38 PM	Bypass valve closed
8/16/2011	7:51:38 PM	Bubbler valve closed
8/16/2011	7:51:38 PM	Helium MFC set to  0.000000
8/16/2011	7:51:38 PM	H2 MFC set to  0.000000
8/16/2011	7:51:38 PM	BCl3 MFC set to  0.000000
8/16/2011	7:51:38 PM	PHl3 MFC set to  0.000000
8/16/2011	7:51:38 PM	SiCl4 MFC set to  0.000000
8/16/2011	7:51:38 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	7:51:39 PM	Tube furnace set to 0
8/16/2011	7:51:40 PM	Run finished at 7:51 PM
8/16/2011	8:00:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	8:00:20 PM	Recipe started at 8:00 PM
8/16/2011	8:00:20 PM	Helium valve closed
8/16/2011	8:00:20 PM	H2 valve closed
8/16/2011	8:00:20 PM	BCl3 valve closed
8/16/2011	8:00:20 PM	PH3 valve closed
8/16/2011	8:00:20 PM	SiCl4 pre valve closed
8/16/2011	8:00:20 PM	SiCl4 post valve closed
8/16/2011	8:00:20 PM	Main Vac valve closed
8/16/2011	8:00:20 PM	Bubbler valve closed
8/16/2011	8:00:20 PM	Bypass valve opened
8/16/2011	8:00:20 PM	Helium MFC set to  0.000000
8/16/2011	8:00:20 PM	H2 MFC set to  0.000000
8/16/2011	8:00:20 PM	BCl3 MFC set to  0.000000
8/16/2011	8:00:20 PM	PHl3 MFC set to  0.000000
8/16/2011	8:00:20 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:00:20 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:00:20 PM	Tube furnace set to 0
8/16/2011	8:01:19 PM	Helium valve closed
8/16/2011	8:01:19 PM	H2 valve closed
8/16/2011	8:01:19 PM	BCl3 valve closed
8/16/2011	8:01:19 PM	PH3 valve closed
8/16/2011	8:01:19 PM	SiCl4 pre valve closed
8/16/2011	8:01:19 PM	SiCl4 post valve closed
8/16/2011	8:01:19 PM	Main Vac valve closed
8/16/2011	8:01:19 PM	Bubbler valve closed
8/16/2011	8:01:19 PM	Bypass valve opened
8/16/2011	8:01:19 PM	Helium MFC set to  0.000000
8/16/2011	8:01:19 PM	H2 MFC set to  0.000000
8/16/2011	8:01:19 PM	BCl3 MFC set to  0.000000
8/16/2011	8:01:19 PM	PHl3 MFC set to  0.000000
8/16/2011	8:01:19 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:01:19 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:01:19 PM	Tube furnace set to 0
8/16/2011	8:02:19 PM	Helium valve closed
8/16/2011	8:02:19 PM	H2 valve closed
8/16/2011	8:02:19 PM	BCl3 valve closed
8/16/2011	8:02:19 PM	PH3 valve closed
8/16/2011	8:02:19 PM	SiCl4 pre valve closed
8/16/2011	8:02:19 PM	SiCl4 post valve closed
8/16/2011	8:02:19 PM	Bypass valve closed
8/16/2011	8:02:19 PM	Bubbler valve closed
8/16/2011	8:02:19 PM	Main Vac valve opened
8/16/2011	8:02:19 PM	Helium MFC set to  0.000000
8/16/2011	8:02:19 PM	H2 MFC set to  0.000000
8/16/2011	8:02:19 PM	BCl3 MFC set to  0.000000
8/16/2011	8:02:19 PM	PHl3 MFC set to  0.000000
8/16/2011	8:02:19 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:02:19 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:02:19 PM	Tube furnace set to 0
8/16/2011	8:02:20 PM	Run finished at 8:02 PM
8/16/2011	8:02:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	8:16:08 PM	Recipe started at 8:15 PM
8/16/2011	8:16:08 PM	Helium valve closed
8/16/2011	8:16:08 PM	H2 valve closed
8/16/2011	8:16:08 PM	BCl3 valve closed
8/16/2011	8:16:08 PM	PH3 valve closed
8/16/2011	8:16:08 PM	SiCl4 pre valve closed
8/16/2011	8:16:08 PM	SiCl4 post valve closed
8/16/2011	8:16:08 PM	Bypass valve closed
8/16/2011	8:16:08 PM	Bubbler valve closed
8/16/2011	8:16:08 PM	Main Vac valve opened
8/16/2011	8:16:08 PM	Helium MFC set to  0.000000
8/16/2011	8:16:08 PM	H2 MFC set to  0.000000
8/16/2011	8:16:08 PM	BCl3 MFC set to  0.000000
8/16/2011	8:16:08 PM	PHl3 MFC set to  0.000000
8/16/2011	8:16:08 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:16:08 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:16:09 PM	Tube furnace set to 0
8/16/2011	8:16:39 PM	H2 valve closed
8/16/2011	8:16:39 PM	BCl3 valve closed
8/16/2011	8:16:39 PM	PH3 valve closed
8/16/2011	8:16:39 PM	SiCl4 pre valve closed
8/16/2011	8:16:39 PM	SiCl4 post valve closed
8/16/2011	8:16:39 PM	Bypass valve closed
8/16/2011	8:16:39 PM	Bubbler valve closed
8/16/2011	8:16:39 PM	Helium valve opened
8/16/2011	8:16:39 PM	Main Vac valve opened
8/16/2011	8:16:39 PM	Helium MFC set to  20.000000
8/16/2011	8:16:39 PM	H2 MFC set to  0.000000
8/16/2011	8:16:39 PM	BCl3 MFC set to  0.000000
8/16/2011	8:16:39 PM	PHl3 MFC set to  0.000000
8/16/2011	8:16:39 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:16:39 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:16:39 PM	Tube furnace set to 0
8/16/2011	8:17:09 PM	Helium valve closed
8/16/2011	8:17:09 PM	H2 valve closed
8/16/2011	8:17:09 PM	BCl3 valve closed
8/16/2011	8:17:09 PM	PH3 valve closed
8/16/2011	8:17:09 PM	SiCl4 pre valve closed
8/16/2011	8:17:09 PM	SiCl4 post valve closed
8/16/2011	8:17:09 PM	Bypass valve closed
8/16/2011	8:17:09 PM	Bubbler valve closed
8/16/2011	8:17:09 PM	Main Vac valve opened
8/16/2011	8:17:09 PM	Helium MFC set to  0.000000
8/16/2011	8:17:09 PM	H2 MFC set to  0.000000
8/16/2011	8:17:09 PM	BCl3 MFC set to  0.000000
8/16/2011	8:17:09 PM	PHl3 MFC set to  0.000000
8/16/2011	8:17:09 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:17:09 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:17:09 PM	Tube furnace set to 0
8/16/2011	8:17:39 PM	H2 valve closed
8/16/2011	8:17:39 PM	BCl3 valve closed
8/16/2011	8:17:39 PM	PH3 valve closed
8/16/2011	8:17:39 PM	SiCl4 pre valve closed
8/16/2011	8:17:39 PM	SiCl4 post valve closed
8/16/2011	8:17:39 PM	Bypass valve closed
8/16/2011	8:17:39 PM	Bubbler valve closed
8/16/2011	8:17:39 PM	Helium valve opened
8/16/2011	8:17:39 PM	Main Vac valve opened
8/16/2011	8:17:39 PM	Helium MFC set to  20.000000
8/16/2011	8:17:39 PM	H2 MFC set to  0.000000
8/16/2011	8:17:39 PM	BCl3 MFC set to  0.000000
8/16/2011	8:17:39 PM	PHl3 MFC set to  0.000000
8/16/2011	8:17:39 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:17:39 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:17:39 PM	Tube furnace set to 0
8/16/2011	8:18:09 PM	Helium valve closed
8/16/2011	8:18:09 PM	H2 valve closed
8/16/2011	8:18:09 PM	BCl3 valve closed
8/16/2011	8:18:09 PM	PH3 valve closed
8/16/2011	8:18:09 PM	SiCl4 pre valve closed
8/16/2011	8:18:09 PM	SiCl4 post valve closed
8/16/2011	8:18:09 PM	Bypass valve closed
8/16/2011	8:18:09 PM	Bubbler valve closed
8/16/2011	8:18:09 PM	Main Vac valve opened
8/16/2011	8:18:09 PM	Helium MFC set to  0.000000
8/16/2011	8:18:09 PM	H2 MFC set to  0.000000
8/16/2011	8:18:09 PM	BCl3 MFC set to  0.000000
8/16/2011	8:18:09 PM	PHl3 MFC set to  0.000000
8/16/2011	8:18:09 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:18:09 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:18:09 PM	Tube furnace set to 0
8/16/2011	8:18:39 PM	H2 valve closed
8/16/2011	8:18:39 PM	BCl3 valve closed
8/16/2011	8:18:39 PM	PH3 valve closed
8/16/2011	8:18:39 PM	SiCl4 pre valve closed
8/16/2011	8:18:39 PM	SiCl4 post valve closed
8/16/2011	8:18:39 PM	Bypass valve closed
8/16/2011	8:18:39 PM	Bubbler valve closed
8/16/2011	8:18:39 PM	Helium valve opened
8/16/2011	8:18:39 PM	Main Vac valve opened
8/16/2011	8:18:39 PM	Helium MFC set to  20.000000
8/16/2011	8:18:39 PM	H2 MFC set to  0.000000
8/16/2011	8:18:39 PM	BCl3 MFC set to  0.000000
8/16/2011	8:18:39 PM	PHl3 MFC set to  0.000000
8/16/2011	8:18:39 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:18:39 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:18:40 PM	Tube furnace set to 0
8/16/2011	8:19:10 PM	Helium valve closed
8/16/2011	8:19:10 PM	H2 valve closed
8/16/2011	8:19:10 PM	BCl3 valve closed
8/16/2011	8:19:10 PM	PH3 valve closed
8/16/2011	8:19:10 PM	SiCl4 pre valve closed
8/16/2011	8:19:10 PM	SiCl4 post valve closed
8/16/2011	8:19:10 PM	Bypass valve closed
8/16/2011	8:19:10 PM	Bubbler valve closed
8/16/2011	8:19:10 PM	Main Vac valve opened
8/16/2011	8:19:10 PM	Helium MFC set to  0.000000
8/16/2011	8:19:10 PM	H2 MFC set to  0.000000
8/16/2011	8:19:10 PM	BCl3 MFC set to  0.000000
8/16/2011	8:19:10 PM	PHl3 MFC set to  0.000000
8/16/2011	8:19:10 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:19:10 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:19:10 PM	Tube furnace set to 0
8/16/2011	8:19:40 PM	H2 valve closed
8/16/2011	8:19:40 PM	BCl3 valve closed
8/16/2011	8:19:40 PM	PH3 valve closed
8/16/2011	8:19:40 PM	SiCl4 pre valve closed
8/16/2011	8:19:40 PM	SiCl4 post valve closed
8/16/2011	8:19:40 PM	Bypass valve closed
8/16/2011	8:19:40 PM	Bubbler valve closed
8/16/2011	8:19:40 PM	Helium valve opened
8/16/2011	8:19:40 PM	Main Vac valve opened
8/16/2011	8:19:40 PM	Helium MFC set to  20.000000
8/16/2011	8:19:40 PM	H2 MFC set to  0.000000
8/16/2011	8:19:40 PM	BCl3 MFC set to  0.000000
8/16/2011	8:19:40 PM	PHl3 MFC set to  0.000000
8/16/2011	8:19:40 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:19:40 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:19:40 PM	Tube furnace set to 0
8/16/2011	8:20:10 PM	Helium valve closed
8/16/2011	8:20:10 PM	H2 valve closed
8/16/2011	8:20:10 PM	BCl3 valve closed
8/16/2011	8:20:10 PM	PH3 valve closed
8/16/2011	8:20:10 PM	SiCl4 pre valve closed
8/16/2011	8:20:10 PM	SiCl4 post valve closed
8/16/2011	8:20:10 PM	Bypass valve closed
8/16/2011	8:20:10 PM	Bubbler valve closed
8/16/2011	8:20:10 PM	Main Vac valve opened
8/16/2011	8:20:10 PM	Helium MFC set to  0.000000
8/16/2011	8:20:10 PM	H2 MFC set to  0.000000
8/16/2011	8:20:10 PM	BCl3 MFC set to  0.000000
8/16/2011	8:20:10 PM	PHl3 MFC set to  0.000000
8/16/2011	8:20:10 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:20:10 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:20:10 PM	Tube furnace set to 0
8/16/2011	8:20:40 PM	H2 valve closed
8/16/2011	8:20:40 PM	BCl3 valve closed
8/16/2011	8:20:40 PM	PH3 valve closed
8/16/2011	8:20:40 PM	SiCl4 pre valve closed
8/16/2011	8:20:40 PM	SiCl4 post valve closed
8/16/2011	8:20:40 PM	Bypass valve closed
8/16/2011	8:20:40 PM	Bubbler valve closed
8/16/2011	8:20:40 PM	Helium valve opened
8/16/2011	8:20:40 PM	Main Vac valve opened
8/16/2011	8:20:40 PM	Helium MFC set to  20.000000
8/16/2011	8:20:40 PM	H2 MFC set to  0.000000
8/16/2011	8:20:40 PM	BCl3 MFC set to  0.000000
8/16/2011	8:20:40 PM	PHl3 MFC set to  0.000000
8/16/2011	8:20:40 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:20:40 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:20:40 PM	Tube furnace set to 0
8/16/2011	8:21:10 PM	Helium valve closed
8/16/2011	8:21:10 PM	H2 valve closed
8/16/2011	8:21:10 PM	BCl3 valve closed
8/16/2011	8:21:10 PM	PH3 valve closed
8/16/2011	8:21:10 PM	SiCl4 pre valve closed
8/16/2011	8:21:10 PM	SiCl4 post valve closed
8/16/2011	8:21:10 PM	Bypass valve closed
8/16/2011	8:21:10 PM	Bubbler valve closed
8/16/2011	8:21:10 PM	Main Vac valve opened
8/16/2011	8:21:10 PM	Helium MFC set to  0.000000
8/16/2011	8:21:10 PM	H2 MFC set to  0.000000
8/16/2011	8:21:10 PM	BCl3 MFC set to  0.000000
8/16/2011	8:21:10 PM	PHl3 MFC set to  0.000000
8/16/2011	8:21:10 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:21:10 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:21:10 PM	Tube furnace set to 0
8/16/2011	8:21:41 PM	H2 valve closed
8/16/2011	8:21:41 PM	BCl3 valve closed
8/16/2011	8:21:41 PM	PH3 valve closed
8/16/2011	8:21:41 PM	SiCl4 pre valve closed
8/16/2011	8:21:41 PM	SiCl4 post valve closed
8/16/2011	8:21:41 PM	Bypass valve closed
8/16/2011	8:21:41 PM	Bubbler valve closed
8/16/2011	8:21:41 PM	Helium valve opened
8/16/2011	8:21:41 PM	Main Vac valve opened
8/16/2011	8:21:41 PM	Helium MFC set to  20.000000
8/16/2011	8:21:41 PM	H2 MFC set to  0.000000
8/16/2011	8:21:41 PM	BCl3 MFC set to  0.000000
8/16/2011	8:21:41 PM	PHl3 MFC set to  0.000000
8/16/2011	8:21:41 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:21:41 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:21:41 PM	Tube furnace set to 0
8/16/2011	8:22:11 PM	Helium valve closed
8/16/2011	8:22:11 PM	H2 valve closed
8/16/2011	8:22:11 PM	BCl3 valve closed
8/16/2011	8:22:11 PM	PH3 valve closed
8/16/2011	8:22:11 PM	SiCl4 pre valve closed
8/16/2011	8:22:11 PM	SiCl4 post valve closed
8/16/2011	8:22:11 PM	Bypass valve closed
8/16/2011	8:22:11 PM	Bubbler valve closed
8/16/2011	8:22:11 PM	Main Vac valve opened
8/16/2011	8:22:11 PM	Helium MFC set to  0.000000
8/16/2011	8:22:11 PM	H2 MFC set to  0.000000
8/16/2011	8:22:11 PM	BCl3 MFC set to  0.000000
8/16/2011	8:22:11 PM	PHl3 MFC set to  0.000000
8/16/2011	8:22:11 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:22:11 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:22:11 PM	Tube furnace set to 0
8/16/2011	8:22:41 PM	H2 valve closed
8/16/2011	8:22:41 PM	BCl3 valve closed
8/16/2011	8:22:41 PM	PH3 valve closed
8/16/2011	8:22:41 PM	SiCl4 pre valve closed
8/16/2011	8:22:41 PM	SiCl4 post valve closed
8/16/2011	8:22:41 PM	Bypass valve closed
8/16/2011	8:22:41 PM	Bubbler valve closed
8/16/2011	8:22:41 PM	Helium valve opened
8/16/2011	8:22:41 PM	Main Vac valve opened
8/16/2011	8:22:41 PM	Helium MFC set to  20.000000
8/16/2011	8:22:41 PM	H2 MFC set to  0.000000
8/16/2011	8:22:41 PM	BCl3 MFC set to  0.000000
8/16/2011	8:22:41 PM	PHl3 MFC set to  0.000000
8/16/2011	8:22:41 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:22:41 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:22:41 PM	Tube furnace set to 0
8/16/2011	8:23:11 PM	Helium valve closed
8/16/2011	8:23:11 PM	H2 valve closed
8/16/2011	8:23:11 PM	BCl3 valve closed
8/16/2011	8:23:11 PM	PH3 valve closed
8/16/2011	8:23:11 PM	SiCl4 pre valve closed
8/16/2011	8:23:11 PM	SiCl4 post valve closed
8/16/2011	8:23:11 PM	Bypass valve closed
8/16/2011	8:23:11 PM	Bubbler valve closed
8/16/2011	8:23:11 PM	Main Vac valve opened
8/16/2011	8:23:11 PM	Helium MFC set to  0.000000
8/16/2011	8:23:11 PM	H2 MFC set to  0.000000
8/16/2011	8:23:11 PM	BCl3 MFC set to  0.000000
8/16/2011	8:23:11 PM	PHl3 MFC set to  0.000000
8/16/2011	8:23:11 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:23:11 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:23:11 PM	Tube furnace set to 0
8/16/2011	8:23:41 PM	H2 valve closed
8/16/2011	8:23:41 PM	BCl3 valve closed
8/16/2011	8:23:41 PM	PH3 valve closed
8/16/2011	8:23:41 PM	SiCl4 pre valve closed
8/16/2011	8:23:41 PM	SiCl4 post valve closed
8/16/2011	8:23:41 PM	Bypass valve closed
8/16/2011	8:23:41 PM	Bubbler valve closed
8/16/2011	8:23:41 PM	Helium valve opened
8/16/2011	8:23:41 PM	Main Vac valve opened
8/16/2011	8:23:41 PM	Helium MFC set to  20.000000
8/16/2011	8:23:41 PM	H2 MFC set to  0.000000
8/16/2011	8:23:41 PM	BCl3 MFC set to  0.000000
8/16/2011	8:23:41 PM	PHl3 MFC set to  0.000000
8/16/2011	8:23:41 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:23:41 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:23:41 PM	Tube furnace set to 0
8/16/2011	8:24:11 PM	Helium valve closed
8/16/2011	8:24:12 PM	H2 valve closed
8/16/2011	8:24:12 PM	BCl3 valve closed
8/16/2011	8:24:12 PM	PH3 valve closed
8/16/2011	8:24:12 PM	SiCl4 pre valve closed
8/16/2011	8:24:12 PM	SiCl4 post valve closed
8/16/2011	8:24:12 PM	Bypass valve closed
8/16/2011	8:24:12 PM	Bubbler valve closed
8/16/2011	8:24:12 PM	Main Vac valve opened
8/16/2011	8:24:12 PM	Helium MFC set to  0.000000
8/16/2011	8:24:12 PM	H2 MFC set to  0.000000
8/16/2011	8:24:12 PM	BCl3 MFC set to  0.000000
8/16/2011	8:24:12 PM	PHl3 MFC set to  0.000000
8/16/2011	8:24:12 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:24:12 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:24:12 PM	Tube furnace set to 0
8/16/2011	8:24:42 PM	H2 valve closed
8/16/2011	8:24:42 PM	BCl3 valve closed
8/16/2011	8:24:42 PM	PH3 valve closed
8/16/2011	8:24:42 PM	SiCl4 pre valve closed
8/16/2011	8:24:42 PM	SiCl4 post valve closed
8/16/2011	8:24:42 PM	Bypass valve closed
8/16/2011	8:24:42 PM	Bubbler valve closed
8/16/2011	8:24:42 PM	Helium valve opened
8/16/2011	8:24:42 PM	Main Vac valve opened
8/16/2011	8:24:42 PM	Helium MFC set to  20.000000
8/16/2011	8:24:42 PM	H2 MFC set to  0.000000
8/16/2011	8:24:42 PM	BCl3 MFC set to  0.000000
8/16/2011	8:24:42 PM	PHl3 MFC set to  0.000000
8/16/2011	8:24:42 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:24:42 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:24:42 PM	Tube furnace set to 0
8/16/2011	8:25:12 PM	Helium valve closed
8/16/2011	8:25:12 PM	H2 valve closed
8/16/2011	8:25:12 PM	BCl3 valve closed
8/16/2011	8:25:12 PM	PH3 valve closed
8/16/2011	8:25:12 PM	SiCl4 pre valve closed
8/16/2011	8:25:12 PM	SiCl4 post valve closed
8/16/2011	8:25:12 PM	Bypass valve closed
8/16/2011	8:25:12 PM	Bubbler valve closed
8/16/2011	8:25:12 PM	Main Vac valve opened
8/16/2011	8:25:12 PM	Helium MFC set to  0.000000
8/16/2011	8:25:12 PM	H2 MFC set to  0.000000
8/16/2011	8:25:12 PM	BCl3 MFC set to  0.000000
8/16/2011	8:25:12 PM	PHl3 MFC set to  0.000000
8/16/2011	8:25:12 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:25:12 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:25:12 PM	Tube furnace set to 200
8/16/2011	8:25:42 PM	H2 valve closed
8/16/2011	8:25:42 PM	BCl3 valve closed
8/16/2011	8:25:42 PM	PH3 valve closed
8/16/2011	8:25:42 PM	SiCl4 pre valve closed
8/16/2011	8:25:42 PM	SiCl4 post valve closed
8/16/2011	8:25:42 PM	Bypass valve closed
8/16/2011	8:25:42 PM	Bubbler valve closed
8/16/2011	8:25:42 PM	Helium valve opened
8/16/2011	8:25:42 PM	Main Vac valve opened
8/16/2011	8:25:42 PM	Helium MFC set to  20.000000
8/16/2011	8:25:42 PM	H2 MFC set to  0.000000
8/16/2011	8:25:42 PM	BCl3 MFC set to  0.000000
8/16/2011	8:25:42 PM	PHl3 MFC set to  0.000000
8/16/2011	8:25:42 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:25:42 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:25:42 PM	Tube furnace set to 200
8/16/2011	8:26:12 PM	Helium valve closed
8/16/2011	8:26:12 PM	H2 valve closed
8/16/2011	8:26:12 PM	BCl3 valve closed
8/16/2011	8:26:12 PM	PH3 valve closed
8/16/2011	8:26:12 PM	SiCl4 pre valve closed
8/16/2011	8:26:12 PM	SiCl4 post valve closed
8/16/2011	8:26:12 PM	Bypass valve closed
8/16/2011	8:26:12 PM	Bubbler valve closed
8/16/2011	8:26:12 PM	Main Vac valve opened
8/16/2011	8:26:12 PM	Helium MFC set to  0.000000
8/16/2011	8:26:12 PM	H2 MFC set to  0.000000
8/16/2011	8:26:12 PM	BCl3 MFC set to  0.000000
8/16/2011	8:26:12 PM	PHl3 MFC set to  0.000000
8/16/2011	8:26:12 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:26:12 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:26:12 PM	Tube furnace set to 200
8/16/2011	8:26:42 PM	H2 valve closed
8/16/2011	8:26:42 PM	BCl3 valve closed
8/16/2011	8:26:42 PM	PH3 valve closed
8/16/2011	8:26:42 PM	SiCl4 pre valve closed
8/16/2011	8:26:42 PM	SiCl4 post valve closed
8/16/2011	8:26:42 PM	Bypass valve closed
8/16/2011	8:26:42 PM	Bubbler valve closed
8/16/2011	8:26:42 PM	Helium valve opened
8/16/2011	8:26:42 PM	Main Vac valve opened
8/16/2011	8:26:43 PM	Helium MFC set to  20.000000
8/16/2011	8:26:43 PM	H2 MFC set to  0.000000
8/16/2011	8:26:43 PM	BCl3 MFC set to  0.000000
8/16/2011	8:26:43 PM	PHl3 MFC set to  0.000000
8/16/2011	8:26:43 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:26:43 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:26:43 PM	Tube furnace set to 200
8/16/2011	8:27:13 PM	Helium valve closed
8/16/2011	8:27:13 PM	H2 valve closed
8/16/2011	8:27:13 PM	BCl3 valve closed
8/16/2011	8:27:13 PM	PH3 valve closed
8/16/2011	8:27:13 PM	SiCl4 pre valve closed
8/16/2011	8:27:13 PM	SiCl4 post valve closed
8/16/2011	8:27:13 PM	Bypass valve closed
8/16/2011	8:27:13 PM	Bubbler valve closed
8/16/2011	8:27:13 PM	Main Vac valve opened
8/16/2011	8:27:13 PM	Helium MFC set to  0.000000
8/16/2011	8:27:13 PM	H2 MFC set to  0.000000
8/16/2011	8:27:13 PM	BCl3 MFC set to  0.000000
8/16/2011	8:27:13 PM	PHl3 MFC set to  0.000000
8/16/2011	8:27:13 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:27:13 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:27:13 PM	Tube furnace set to 200
8/16/2011	8:27:43 PM	H2 valve closed
8/16/2011	8:27:43 PM	BCl3 valve closed
8/16/2011	8:27:43 PM	PH3 valve closed
8/16/2011	8:27:43 PM	SiCl4 pre valve closed
8/16/2011	8:27:43 PM	SiCl4 post valve closed
8/16/2011	8:27:43 PM	Bypass valve closed
8/16/2011	8:27:43 PM	Bubbler valve closed
8/16/2011	8:27:43 PM	Helium valve opened
8/16/2011	8:27:43 PM	Main Vac valve opened
8/16/2011	8:27:43 PM	Helium MFC set to  20.000000
8/16/2011	8:27:43 PM	H2 MFC set to  0.000000
8/16/2011	8:27:43 PM	BCl3 MFC set to  0.000000
8/16/2011	8:27:43 PM	PHl3 MFC set to  0.000000
8/16/2011	8:27:43 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:27:43 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:27:43 PM	Tube furnace set to 200
8/16/2011	8:28:13 PM	Helium valve closed
8/16/2011	8:28:13 PM	H2 valve closed
8/16/2011	8:28:13 PM	BCl3 valve closed
8/16/2011	8:28:13 PM	PH3 valve closed
8/16/2011	8:28:13 PM	SiCl4 pre valve closed
8/16/2011	8:28:13 PM	SiCl4 post valve closed
8/16/2011	8:28:13 PM	Bypass valve closed
8/16/2011	8:28:13 PM	Bubbler valve closed
8/16/2011	8:28:13 PM	Main Vac valve opened
8/16/2011	8:28:13 PM	Helium MFC set to  0.000000
8/16/2011	8:28:13 PM	H2 MFC set to  0.000000
8/16/2011	8:28:13 PM	BCl3 MFC set to  0.000000
8/16/2011	8:28:13 PM	PHl3 MFC set to  0.000000
8/16/2011	8:28:13 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:28:13 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:28:13 PM	Tube furnace set to 200
8/16/2011	8:28:43 PM	H2 valve closed
8/16/2011	8:28:43 PM	BCl3 valve closed
8/16/2011	8:28:43 PM	PH3 valve closed
8/16/2011	8:28:43 PM	SiCl4 pre valve closed
8/16/2011	8:28:43 PM	SiCl4 post valve closed
8/16/2011	8:28:43 PM	Bypass valve closed
8/16/2011	8:28:43 PM	Bubbler valve closed
8/16/2011	8:28:43 PM	Helium valve opened
8/16/2011	8:28:43 PM	Main Vac valve opened
8/16/2011	8:28:43 PM	Helium MFC set to  20.000000
8/16/2011	8:28:43 PM	H2 MFC set to  0.000000
8/16/2011	8:28:43 PM	BCl3 MFC set to  0.000000
8/16/2011	8:28:43 PM	PHl3 MFC set to  0.000000
8/16/2011	8:28:43 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:28:43 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:28:43 PM	Tube furnace set to 200
8/16/2011	8:29:14 PM	Helium valve closed
8/16/2011	8:29:14 PM	H2 valve closed
8/16/2011	8:29:14 PM	BCl3 valve closed
8/16/2011	8:29:14 PM	PH3 valve closed
8/16/2011	8:29:14 PM	SiCl4 pre valve closed
8/16/2011	8:29:14 PM	SiCl4 post valve closed
8/16/2011	8:29:14 PM	Bypass valve closed
8/16/2011	8:29:14 PM	Bubbler valve closed
8/16/2011	8:29:14 PM	Main Vac valve opened
8/16/2011	8:29:14 PM	Helium MFC set to  0.000000
8/16/2011	8:29:14 PM	H2 MFC set to  0.000000
8/16/2011	8:29:14 PM	BCl3 MFC set to  0.000000
8/16/2011	8:29:14 PM	PHl3 MFC set to  0.000000
8/16/2011	8:29:14 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:29:14 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:29:14 PM	Tube furnace set to 200
8/16/2011	8:29:44 PM	H2 valve closed
8/16/2011	8:29:44 PM	BCl3 valve closed
8/16/2011	8:29:44 PM	PH3 valve closed
8/16/2011	8:29:44 PM	SiCl4 pre valve closed
8/16/2011	8:29:44 PM	SiCl4 post valve closed
8/16/2011	8:29:44 PM	Bypass valve closed
8/16/2011	8:29:44 PM	Bubbler valve closed
8/16/2011	8:29:44 PM	Helium valve opened
8/16/2011	8:29:44 PM	Main Vac valve opened
8/16/2011	8:29:44 PM	Helium MFC set to  20.000000
8/16/2011	8:29:44 PM	H2 MFC set to  0.000000
8/16/2011	8:29:44 PM	BCl3 MFC set to  0.000000
8/16/2011	8:29:44 PM	PHl3 MFC set to  0.000000
8/16/2011	8:29:44 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:29:44 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:29:44 PM	Tube furnace set to 200
8/16/2011	8:30:14 PM	Helium valve closed
8/16/2011	8:30:14 PM	H2 valve closed
8/16/2011	8:30:14 PM	BCl3 valve closed
8/16/2011	8:30:14 PM	PH3 valve closed
8/16/2011	8:30:14 PM	SiCl4 pre valve closed
8/16/2011	8:30:14 PM	SiCl4 post valve closed
8/16/2011	8:30:14 PM	Bypass valve closed
8/16/2011	8:30:14 PM	Bubbler valve closed
8/16/2011	8:30:14 PM	Main Vac valve opened
8/16/2011	8:30:14 PM	Helium MFC set to  0.000000
8/16/2011	8:30:14 PM	H2 MFC set to  0.000000
8/16/2011	8:30:14 PM	BCl3 MFC set to  0.000000
8/16/2011	8:30:14 PM	PHl3 MFC set to  0.000000
8/16/2011	8:30:14 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:30:14 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:30:14 PM	Tube furnace set to 200
8/16/2011	8:30:44 PM	H2 valve closed
8/16/2011	8:30:44 PM	BCl3 valve closed
8/16/2011	8:30:44 PM	PH3 valve closed
8/16/2011	8:30:44 PM	SiCl4 pre valve closed
8/16/2011	8:30:44 PM	SiCl4 post valve closed
8/16/2011	8:30:44 PM	Bypass valve closed
8/16/2011	8:30:44 PM	Bubbler valve closed
8/16/2011	8:30:44 PM	Helium valve opened
8/16/2011	8:30:44 PM	Main Vac valve opened
8/16/2011	8:30:44 PM	Helium MFC set to  20.000000
8/16/2011	8:30:44 PM	H2 MFC set to  0.000000
8/16/2011	8:30:44 PM	BCl3 MFC set to  0.000000
8/16/2011	8:30:44 PM	PHl3 MFC set to  0.000000
8/16/2011	8:30:44 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:30:44 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:30:44 PM	Tube furnace set to 200
8/16/2011	8:31:14 PM	Helium valve closed
8/16/2011	8:31:14 PM	H2 valve closed
8/16/2011	8:31:14 PM	BCl3 valve closed
8/16/2011	8:31:14 PM	PH3 valve closed
8/16/2011	8:31:14 PM	SiCl4 pre valve closed
8/16/2011	8:31:14 PM	SiCl4 post valve closed
8/16/2011	8:31:14 PM	Bypass valve closed
8/16/2011	8:31:14 PM	Bubbler valve closed
8/16/2011	8:31:14 PM	Main Vac valve opened
8/16/2011	8:31:14 PM	Helium MFC set to  0.000000
8/16/2011	8:31:14 PM	H2 MFC set to  0.000000
8/16/2011	8:31:14 PM	BCl3 MFC set to  0.000000
8/16/2011	8:31:14 PM	PHl3 MFC set to  0.000000
8/16/2011	8:31:14 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:31:14 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:31:15 PM	Tube furnace set to 0
8/16/2011	8:31:16 PM	Run finished at 8:31 PM
8/16/2011	8:48:53 PM	Recipe started at 8:48 PM
8/16/2011	8:48:53 PM	Helium valve closed
8/16/2011	8:48:53 PM	H2 valve closed
8/16/2011	8:48:53 PM	BCl3 valve closed
8/16/2011	8:48:53 PM	PH3 valve closed
8/16/2011	8:48:53 PM	SiCl4 pre valve closed
8/16/2011	8:48:53 PM	SiCl4 post valve closed
8/16/2011	8:48:53 PM	Main Vac valve closed
8/16/2011	8:48:53 PM	Bypass valve closed
8/16/2011	8:48:53 PM	Bubbler valve closed
8/16/2011	8:48:53 PM	Helium MFC set to  0.000000
8/16/2011	8:48:53 PM	H2 MFC set to  0.000000
8/16/2011	8:48:53 PM	BCl3 MFC set to  0.000000
8/16/2011	8:48:53 PM	PHl3 MFC set to  0.000000
8/16/2011	8:48:53 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:48:53 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:48:53 PM	Tube furnace set to 0
8/16/2011	8:48:56 PM	Helium valve closed
8/16/2011	8:48:56 PM	BCl3 valve closed
8/16/2011	8:48:56 PM	PH3 valve closed
8/16/2011	8:48:56 PM	SiCl4 pre valve closed
8/16/2011	8:48:56 PM	SiCl4 post valve closed
8/16/2011	8:48:56 PM	Main Vac valve closed
8/16/2011	8:48:56 PM	Bypass valve closed
8/16/2011	8:48:56 PM	Bubbler valve closed
8/16/2011	8:48:56 PM	H2 valve opened
8/16/2011	8:48:56 PM	Helium MFC set to  0.000000
8/16/2011	8:48:56 PM	H2 MFC set to  500.000000
8/16/2011	8:48:56 PM	BCl3 MFC set to  0.000000
8/16/2011	8:48:56 PM	PHl3 MFC set to  0.000000
8/16/2011	8:48:56 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:48:56 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:48:56 PM	Tube furnace set to 0
8/16/2011	8:49:59 PM	Helium valve closed
8/16/2011	8:49:59 PM	BCl3 valve closed
8/16/2011	8:49:59 PM	PH3 valve closed
8/16/2011	8:49:59 PM	SiCl4 pre valve closed
8/16/2011	8:50:00 PM	SiCl4 post valve closed
8/16/2011	8:50:00 PM	Main Vac valve closed
8/16/2011	8:50:00 PM	Bypass valve closed
8/16/2011	8:50:00 PM	H2 valve opened
8/16/2011	8:50:00 PM	Bubbler valve opened
8/16/2011	8:50:00 PM	Helium MFC set to  0.000000
8/16/2011	8:50:00 PM	H2 MFC set to  500.000000
8/16/2011	8:50:00 PM	BCl3 MFC set to  0.000000
8/16/2011	8:50:00 PM	PHl3 MFC set to  0.000000
8/16/2011	8:50:00 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:50:00 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:50:00 PM	Tube furnace set to 0
8/16/2011	8:50:01 PM	Helium valve closed
8/16/2011	8:50:01 PM	BCl3 valve closed
8/16/2011	8:50:01 PM	PH3 valve closed
8/16/2011	8:50:01 PM	SiCl4 pre valve closed
8/16/2011	8:50:01 PM	SiCl4 post valve closed
8/16/2011	8:50:01 PM	Main Vac valve closed
8/16/2011	8:50:01 PM	Bypass valve closed
8/16/2011	8:50:01 PM	H2 valve opened
8/16/2011	8:50:01 PM	Bubbler valve opened
8/16/2011	8:50:01 PM	Helium MFC set to  0.000000
8/16/2011	8:50:01 PM	H2 MFC set to  500.000000
8/16/2011	8:50:01 PM	BCl3 MFC set to  0.000000
8/16/2011	8:50:01 PM	PHl3 MFC set to  0.000000
8/16/2011	8:50:01 PM	SiCl4 MFC set to  0.000000
8/16/2011	8:50:01 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	8:50:01 PM	Tube furnace set to 1000
8/16/2011	9:10:01 PM	Helium valve closed
8/16/2011	9:10:01 PM	BCl3 valve closed
8/16/2011	9:10:01 PM	Main Vac valve closed
8/16/2011	9:10:01 PM	Bypass valve closed
8/16/2011	9:10:01 PM	H2 valve opened
8/16/2011	9:10:01 PM	PH3 valve opened
8/16/2011	9:10:01 PM	SiCl4 pre valve opened
8/16/2011	9:10:01 PM	SiCl4 post valve opened
8/16/2011	9:10:01 PM	Bubbler valve opened
8/16/2011	9:10:01 PM	Helium MFC set to  0.000000
8/16/2011	9:10:01 PM	H2 MFC set to  500.000000
8/16/2011	9:10:01 PM	BCl3 MFC set to  0.000000
8/16/2011	9:10:01 PM	PHl3 MFC set to  20.000000
8/16/2011	9:10:01 PM	SiCl4 MFC set to  50.000000
8/16/2011	9:10:01 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:10:01 PM	Tube furnace set to 1000
8/16/2011	9:26:01 PM	Helium valve closed
8/16/2011	9:26:01 PM	BCl3 valve closed
8/16/2011	9:26:01 PM	PH3 valve closed
8/16/2011	9:26:01 PM	SiCl4 pre valve closed
8/16/2011	9:26:01 PM	SiCl4 post valve closed
8/16/2011	9:26:01 PM	Main Vac valve closed
8/16/2011	9:26:01 PM	Bypass valve closed
8/16/2011	9:26:01 PM	H2 valve opened
8/16/2011	9:26:01 PM	Bubbler valve opened
8/16/2011	9:26:01 PM	Helium MFC set to  0.000000
8/16/2011	9:26:01 PM	H2 MFC set to  500.000000
8/16/2011	9:26:01 PM	BCl3 MFC set to  0.000000
8/16/2011	9:26:01 PM	PHl3 MFC set to  0.000000
8/16/2011	9:26:01 PM	SiCl4 MFC set to  0.000000
8/16/2011	9:26:01 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:26:01 PM	Tube furnace set to 750
8/16/2011	9:31:01 PM	H2 valve closed
8/16/2011	9:31:01 PM	BCl3 valve closed
8/16/2011	9:31:01 PM	PH3 valve closed
8/16/2011	9:31:01 PM	SiCl4 pre valve closed
8/16/2011	9:31:01 PM	SiCl4 post valve closed
8/16/2011	9:31:01 PM	Main Vac valve closed
8/16/2011	9:31:01 PM	Bypass valve closed
8/16/2011	9:31:01 PM	Helium valve opened
8/16/2011	9:31:01 PM	Bubbler valve opened
8/16/2011	9:31:01 PM	Helium MFC set to  500.000000
8/16/2011	9:31:01 PM	H2 MFC set to  0.000000
8/16/2011	9:31:01 PM	BCl3 MFC set to  0.000000
8/16/2011	9:31:01 PM	PHl3 MFC set to  0.000000
8/16/2011	9:31:01 PM	SiCl4 MFC set to  0.000000
8/16/2011	9:31:01 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:31:01 PM	Tube furnace set to 0
8/16/2011	9:51:01 PM	Helium valve closed
8/16/2011	9:51:01 PM	H2 valve closed
8/16/2011	9:51:01 PM	BCl3 valve closed
8/16/2011	9:51:01 PM	PH3 valve closed
8/16/2011	9:51:01 PM	SiCl4 pre valve closed
8/16/2011	9:51:01 PM	SiCl4 post valve closed
8/16/2011	9:51:01 PM	Main Vac valve closed
8/16/2011	9:51:01 PM	Bypass valve closed
8/16/2011	9:51:01 PM	Bubbler valve closed
8/16/2011	9:51:01 PM	Helium MFC set to  0.000000
8/16/2011	9:51:01 PM	H2 MFC set to  0.000000
8/16/2011	9:51:01 PM	BCl3 MFC set to  0.000000
8/16/2011	9:51:01 PM	PHl3 MFC set to  0.000000
8/16/2011	9:51:01 PM	SiCl4 MFC set to  0.000000
8/16/2011	9:51:01 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	9:51:01 PM	Tube furnace set to 0
8/16/2011	9:51:02 PM	Run finished at 9:51 PM
8/16/2011	10:13:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/16/2011	10:13:29 PM	Recipe started at 10:13 PM
8/16/2011	10:13:29 PM	Helium valve closed
8/16/2011	10:13:29 PM	H2 valve closed
8/16/2011	10:13:29 PM	BCl3 valve closed
8/16/2011	10:13:29 PM	PH3 valve closed
8/16/2011	10:13:29 PM	SiCl4 pre valve closed
8/16/2011	10:13:29 PM	SiCl4 post valve closed
8/16/2011	10:13:29 PM	Main Vac valve closed
8/16/2011	10:13:29 PM	Bubbler valve closed
8/16/2011	10:13:29 PM	Bypass valve opened
8/16/2011	10:13:29 PM	Helium MFC set to  0.000000
8/16/2011	10:13:29 PM	H2 MFC set to  0.000000
8/16/2011	10:13:29 PM	BCl3 MFC set to  0.000000
8/16/2011	10:13:29 PM	PHl3 MFC set to  0.000000
8/16/2011	10:13:29 PM	SiCl4 MFC set to  0.000000
8/16/2011	10:13:29 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:13:29 PM	Tube furnace set to 0
8/16/2011	10:14:32 PM	Helium valve closed
8/16/2011	10:14:32 PM	H2 valve closed
8/16/2011	10:14:32 PM	BCl3 valve closed
8/16/2011	10:14:32 PM	PH3 valve closed
8/16/2011	10:14:32 PM	SiCl4 pre valve closed
8/16/2011	10:14:32 PM	SiCl4 post valve closed
8/16/2011	10:14:32 PM	Main Vac valve closed
8/16/2011	10:14:32 PM	Bubbler valve closed
8/16/2011	10:14:32 PM	Bypass valve opened
8/16/2011	10:14:32 PM	Helium MFC set to  0.000000
8/16/2011	10:14:32 PM	H2 MFC set to  0.000000
8/16/2011	10:14:32 PM	BCl3 MFC set to  0.000000
8/16/2011	10:14:32 PM	PHl3 MFC set to  0.000000
8/16/2011	10:14:32 PM	SiCl4 MFC set to  0.000000
8/16/2011	10:14:32 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:14:32 PM	Tube furnace set to 0
8/16/2011	10:15:32 PM	Helium valve closed
8/16/2011	10:15:32 PM	H2 valve closed
8/16/2011	10:15:32 PM	BCl3 valve closed
8/16/2011	10:15:32 PM	PH3 valve closed
8/16/2011	10:15:32 PM	SiCl4 pre valve closed
8/16/2011	10:15:32 PM	SiCl4 post valve closed
8/16/2011	10:15:32 PM	Bypass valve closed
8/16/2011	10:15:32 PM	Bubbler valve closed
8/16/2011	10:15:32 PM	Main Vac valve opened
8/16/2011	10:15:32 PM	Helium MFC set to  0.000000
8/16/2011	10:15:32 PM	H2 MFC set to  0.000000
8/16/2011	10:15:32 PM	BCl3 MFC set to  0.000000
8/16/2011	10:15:32 PM	PHl3 MFC set to  0.000000
8/16/2011	10:15:32 PM	SiCl4 MFC set to  0.000000
8/16/2011	10:15:32 PM	Bypass solenoid MFC set to  0.000000
8/16/2011	10:15:33 PM	Tube furnace set to 0
8/16/2011	10:15:34 PM	Run finished at 10:15 PM
8/16/2011	10:15:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
